DE69738986D1 - Mikrosystem mit flexibler Membran zur Erfassung von Drücken - Google Patents

Mikrosystem mit flexibler Membran zur Erfassung von Drücken

Info

Publication number
DE69738986D1
DE69738986D1 DE69738986T DE69738986T DE69738986D1 DE 69738986 D1 DE69738986 D1 DE 69738986D1 DE 69738986 T DE69738986 T DE 69738986T DE 69738986 T DE69738986 T DE 69738986T DE 69738986 D1 DE69738986 D1 DE 69738986D1
Authority
DE
Germany
Prior art keywords
microsystem
flexible membrane
detecting pressures
pressures
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69738986T
Other languages
English (en)
Inventor
Marie-Therese Delaye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69738986D1 publication Critical patent/DE69738986D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
DE69738986T 1997-04-17 1998-04-15 Mikrosystem mit flexibler Membran zur Erfassung von Drücken Expired - Lifetime DE69738986D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9704767A FR2762389B1 (fr) 1997-04-17 1997-04-17 Microsysteme a membrane souple pour capteur de pression et procede de realisation

Publications (1)

Publication Number Publication Date
DE69738986D1 true DE69738986D1 (de) 2008-10-23

Family

ID=9506045

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69824782T Expired - Lifetime DE69824782T2 (de) 1997-04-17 1998-04-15 Mikrostruktur mit flexibler Membran zur Druckmessung und Verfahren zu ihrer Herstellung
DE69738986T Expired - Lifetime DE69738986D1 (de) 1997-04-17 1998-04-15 Mikrosystem mit flexibler Membran zur Erfassung von Drücken

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69824782T Expired - Lifetime DE69824782T2 (de) 1997-04-17 1998-04-15 Mikrostruktur mit flexibler Membran zur Druckmessung und Verfahren zu ihrer Herstellung

Country Status (5)

Country Link
US (2) US6431005B1 (de)
EP (2) EP1351044B1 (de)
JP (1) JP4812915B2 (de)
DE (2) DE69824782T2 (de)
FR (1) FR2762389B1 (de)

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US7980145B2 (en) * 2007-12-27 2011-07-19 Y Point Capital, Inc Microelectromechanical capacitive device
US7719007B2 (en) * 2008-04-30 2010-05-18 Milliken & Company Flexible electroluminescent capacitive sensor
JP5409251B2 (ja) * 2008-11-19 2014-02-05 キヤノン株式会社 電気機械変換装置およびその製造方法
US8791792B2 (en) * 2010-01-15 2014-07-29 Idex Asa Electronic imager using an impedance sensor grid array mounted on or about a switch and method of making
US8866347B2 (en) 2010-01-15 2014-10-21 Idex Asa Biometric image sensing
US8421890B2 (en) 2010-01-15 2013-04-16 Picofield Technologies, Inc. Electronic imager using an impedance sensor grid array and method of making
US8471304B2 (en) 2010-06-04 2013-06-25 Carnegie Mellon University Method, apparatus, and system for micromechanical gas chemical sensing capacitor
US20160302729A1 (en) 2013-12-11 2016-10-20 The Board Of Regents Of The University Of Texas System Devices and methods for parameter measurement
US10309252B2 (en) 2015-12-16 2019-06-04 General Electric Company System and method for cooling turbine shroud trailing edge
US10378380B2 (en) 2015-12-16 2019-08-13 General Electric Company Segmented micro-channel for improved flow
WO2017136719A1 (en) 2016-02-03 2017-08-10 Hutchinson Technology Incorporated Miniature pressure/force sensor with integrated leads
CN116907693A (zh) 2017-02-09 2023-10-20 触控解决方案股份有限公司 集成数字力传感器和相关制造方法
WO2018148510A1 (en) 2017-02-09 2018-08-16 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
WO2019023309A1 (en) 2017-07-25 2019-01-31 Nextinput, Inc. FORCE SENSOR AND INTEGRATED FINGERPRINTS
US11243126B2 (en) 2017-07-27 2022-02-08 Nextinput, Inc. Wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture
WO2019079420A1 (en) 2017-10-17 2019-04-25 Nextinput, Inc. SHIFT TEMPERATURE COEFFICIENT COMPENSATION FOR FORCE SENSOR AND STRAIN GAUGE
US11874185B2 (en) 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
US11206494B2 (en) 2018-10-05 2021-12-21 Knowles Electronics, Llc Microphone device with ingress protection
WO2020072938A1 (en) 2018-10-05 2020-04-09 Knowles Electronics, Llc Methods of forming mems diaphragms including corrugations
DE112019005007T5 (de) 2018-10-05 2021-07-15 Knowles Electronics, Llc Akustikwandler mit einer Niederdruckzone und Membranen, die eine erhöhte Nachgiebigkeit aufweisen
CN112351158B (zh) * 2019-08-06 2022-12-09 中芯集成电路（宁波）有限公司 成像模组及其形成方法、镜头组件
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint

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JPH04278462A (ja) * 1991-03-07 1992-10-05 Nec Corp 半導体加速度センサ
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JPH06112509A (ja) * 1992-09-28 1994-04-22 Oki Electric Ind Co Ltd マイクロマシンの製造方法
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FR2700003B1 (fr) 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'un capteur de pression utilisant la technologie silicium sur isolant et capteur obtenu.
US5316619A (en) * 1993-02-05 1994-05-31 Ford Motor Company Capacitive surface micromachine absolute pressure sensor and method for processing
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JP3593712B2 (ja) * 1994-03-17 2004-11-24 日産自動車株式会社 半導体装置およびその製造方法
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US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
FR2739977B1 (fr) * 1995-10-17 1998-01-23 France Telecom Capteur monolithique d'empreintes digitales

Also Published As

Publication number Publication date
EP1351044A1 (de) 2003-10-08
EP1351044A8 (de) 2003-12-17
DE69824782T2 (de) 2005-06-30
US20010009112A1 (en) 2001-07-26
EP1351044B1 (de) 2008-09-10
DE69824782D1 (de) 2004-08-05
US6431005B1 (en) 2002-08-13
FR2762389A1 (fr) 1998-10-23
US6435033B2 (en) 2002-08-20
JPH10300610A (ja) 1998-11-13
JP4812915B2 (ja) 2011-11-09
EP0872720A1 (de) 1998-10-21
EP0872720B1 (de) 2004-06-30
FR2762389B1 (fr) 1999-05-21

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