DE69738371D1 - Heizer mit konischer heizdichtefunktion für massendurchflussmesser - Google Patents

Heizer mit konischer heizdichtefunktion für massendurchflussmesser

Info

Publication number
DE69738371D1
DE69738371D1 DE69738371T DE69738371T DE69738371D1 DE 69738371 D1 DE69738371 D1 DE 69738371D1 DE 69738371 T DE69738371 T DE 69738371T DE 69738371 T DE69738371 T DE 69738371T DE 69738371 D1 DE69738371 D1 DE 69738371D1
Authority
DE
Germany
Prior art keywords
heater
density function
mass flowmeter
heat density
conical heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69738371T
Other languages
English (en)
Other versions
DE69738371T2 (de
Inventor
Thomas O Maginnis Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE69738371D1 publication Critical patent/DE69738371D1/de
Publication of DE69738371T2 publication Critical patent/DE69738371T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
DE69738371T 1996-06-14 1997-05-12 Heizer mit konischer heizdichtefunktion für massendurchflussmesser Expired - Lifetime DE69738371T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US664141 1996-06-14
US08/664,141 US5693880A (en) 1996-06-14 1996-06-14 Heater with tapered heater density function for use with mass flowmeter
PCT/US1997/008034 WO1997047951A1 (en) 1996-06-14 1997-05-12 Heater with tapered heater density function for use with mass flowmeter

Publications (2)

Publication Number Publication Date
DE69738371D1 true DE69738371D1 (de) 2008-01-24
DE69738371T2 DE69738371T2 (de) 2008-11-27

Family

ID=24664720

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69738371T Expired - Lifetime DE69738371T2 (de) 1996-06-14 1997-05-12 Heizer mit konischer heizdichtefunktion für massendurchflussmesser

Country Status (6)

Country Link
US (1) US5693880A (de)
EP (1) EP0904525B1 (de)
JP (1) JP3540818B2 (de)
AT (1) ATE381000T1 (de)
DE (1) DE69738371T2 (de)
WO (1) WO1997047951A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1203213C (zh) * 1997-11-06 2005-05-25 住友金属工业株式会社 酸浓度测定和自动控制的方法和装置
ATE222354T1 (de) * 1997-12-30 2002-08-15 Qualiflow S A Verfahren zu herstellung von einem sensor für einen thermischen massendurchflussmesser
US6595049B1 (en) * 1999-06-18 2003-07-22 Mks Instruments, Inc. Thermal mass flow sensor with improved sensitivity and response time
US6446504B1 (en) * 2000-03-30 2002-09-10 Mks Instruments, Inc. Constant temperature gradient differential thermal mass flow sensor
US6779394B2 (en) * 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
US6668642B2 (en) * 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal isolation of thermal mass flow sensor
WO2004010091A1 (en) * 2002-07-19 2004-01-29 Celerity Group Inc. Variable resistance sensor with common reference leg
US7296465B2 (en) 2005-11-22 2007-11-20 Mks Instruments, Inc. Vertical mount mass flow sensor
US8826731B2 (en) * 2011-10-20 2014-09-09 Honeywell International Inc. Flow sensor with bypass taps in laminarizing channel and flow restrictor in a bypass channel
DE202011109511U1 (de) * 2011-12-23 2012-02-02 Bürkert Werke GmbH Massendurchflussmess- oder -regelgerät
US9823106B2 (en) * 2014-07-25 2017-11-21 General Electric Company Flow sensor with heated air collar

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3938384A (en) * 1972-10-13 1976-02-17 Tylan Corporation Mass flow meter with reduced attitude sensitivity
US4519246A (en) * 1981-12-21 1985-05-28 Advanced Semiconductor Materials International, N.V. Improved flow meter
US4464932A (en) * 1982-07-12 1984-08-14 Mks Instruments, Inc. Thermal mass flowmetering
US4686856A (en) * 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
NL8900474A (nl) * 1989-02-24 1990-09-17 Bronkhorst High Tech Bv Massa-debietmeter met temperatuursensoren.
JP2592333B2 (ja) * 1989-08-29 1997-03-19 株式会社日立製作所 空気流量センサ素子及びその製造方法
US5259243A (en) * 1991-01-04 1993-11-09 Dxl International, Inc. Flow sensor
US5142907A (en) * 1991-04-17 1992-09-01 Mks Instruments, Inc. Constant temperature gradient fluid mass flow transducer
JP2643665B2 (ja) * 1991-06-13 1997-08-20 日本エム・ケー・エス 株式会社 流量センサ
JPH06265390A (ja) * 1993-03-16 1994-09-20 Hitachi Ltd 熱式空気流量計
US5511416A (en) * 1993-09-15 1996-04-30 Alicat Scientific, Inc. Wide range laminar flow element
US5461913A (en) * 1994-06-23 1995-10-31 Mks Instruments, Inc. Differential current thermal mass flow transducer

Also Published As

Publication number Publication date
EP0904525A1 (de) 1999-03-31
JP3540818B2 (ja) 2004-07-07
US5693880A (en) 1997-12-02
EP0904525B1 (de) 2007-12-12
ATE381000T1 (de) 2007-12-15
WO1997047951A1 (en) 1997-12-18
DE69738371T2 (de) 2008-11-27
EP0904525A4 (de) 1999-04-07
WO1997047951A8 (en) 2001-06-21
JP2000512756A (ja) 2000-09-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition