DE69737037D1 - Modulare befestigung für zu beschichtende werkstücke - Google Patents

Modulare befestigung für zu beschichtende werkstücke

Info

Publication number
DE69737037D1
DE69737037D1 DE69737037T DE69737037T DE69737037D1 DE 69737037 D1 DE69737037 D1 DE 69737037D1 DE 69737037 T DE69737037 T DE 69737037T DE 69737037 T DE69737037 T DE 69737037T DE 69737037 D1 DE69737037 D1 DE 69737037D1
Authority
DE
Germany
Prior art keywords
workpieces
coat
modular fastening
modular
fastening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69737037T
Other languages
English (en)
Other versions
DE69737037T2 (de
Inventor
William Menchetti
Michael Burns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of DE69737037D1 publication Critical patent/DE69737037D1/de
Application granted granted Critical
Publication of DE69737037T2 publication Critical patent/DE69737037T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
DE69737037T 1997-01-13 1997-09-02 Modulare befestigung für zu beschichtende werkstücke Expired - Lifetime DE69737037T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/782,398 US5803971A (en) 1997-01-13 1997-01-13 Modular coating fixture
US782398 1997-01-13
PCT/US1997/015329 WO1998030338A1 (en) 1997-01-13 1997-09-02 Modular coating fixture

Publications (2)

Publication Number Publication Date
DE69737037D1 true DE69737037D1 (de) 2007-01-11
DE69737037T2 DE69737037T2 (de) 2007-04-26

Family

ID=25125927

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69737037T Expired - Lifetime DE69737037T2 (de) 1997-01-13 1997-09-02 Modulare befestigung für zu beschichtende werkstücke

Country Status (7)

Country Link
US (1) US5803971A (de)
EP (1) EP0975435B1 (de)
JP (1) JP3976099B2 (de)
DE (1) DE69737037T2 (de)
RU (1) RU2161075C2 (de)
UA (1) UA49876C2 (de)
WO (1) WO1998030338A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332926B1 (en) * 1999-08-11 2001-12-25 General Electric Company Apparatus and method for selectively coating internal and external surfaces of an airfoil
US7754016B2 (en) * 2002-10-07 2010-07-13 United Technologies Corporation Multiple axis tumbler coating apparatus
US8349086B2 (en) * 2004-07-30 2013-01-08 United Technologies Corporation Non-stick masking fixtures and methods of preparing same
EP2014377B1 (de) * 2007-07-12 2010-03-31 Siemens Aktiengesellschaft Halterung für Turbinenschaufeln
US8911624B2 (en) 2007-10-03 2014-12-16 Emd Millipore Corporation Stacked plates filtration cartridge
US8968830B2 (en) * 2007-12-06 2015-03-03 Oerlikon Trading Ag, Trubbach PVD—vacuum coating unit
US8323409B2 (en) * 2008-05-08 2012-12-04 United Technologies Corporation Systems and methods for forming components with thermal barrier coatings
US8211234B2 (en) * 2008-09-02 2012-07-03 United Technologies Corporation Coater platter homing tool
US20110171390A1 (en) * 2010-01-08 2011-07-14 United Technologies Corporation One Financial Plaza Fixture for coating application
US9044775B2 (en) * 2011-05-26 2015-06-02 Advenira Enterprises, Inc. System and process for coating an object
KR102177079B1 (ko) 2011-12-08 2020-11-10 프랙스에어 에스.티. 테크놀로지, 인코포레이티드 코팅 작업에서 사용하기 위한 툴링 고정구 조립체
US9381537B2 (en) * 2011-12-08 2016-07-05 Praxair Technology, Inc. Multifunction tooling fixture assembly for use in a coating related operations
US8889222B1 (en) * 2013-12-03 2014-11-18 Advenira Enterprises, Inc. Coating material distribution using simultaneous rotation and vibration
US9759089B2 (en) 2013-12-10 2017-09-12 General Electric Company Transportable modular coating systems and methods
CN103707203B (zh) * 2013-12-11 2016-08-17 中原内配集团股份有限公司 气缸套喷砂、喷涂用工装夹具
DE102015208783A1 (de) 2015-05-12 2016-11-17 MTU Aero Engines AG Abdeckverfahren zur Herstellung einer Kombination von Schaufelspitzenpanzerung und Erosionsschutzschicht
US11117151B2 (en) * 2017-08-23 2021-09-14 Raytheon Technologies Corporation Fixture assembly for coating combustor panels
USD881242S1 (en) * 2018-01-29 2020-04-14 Oerlikon Surface Solutions Ag, Pfaffikon Tool holder

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3594227A (en) * 1968-07-12 1971-07-20 Bell Telephone Labor Inc Method for treating semiconductor slices with gases
US3796182A (en) * 1971-12-16 1974-03-12 Applied Materials Tech Susceptor structure for chemical vapor deposition reactor
US3699298A (en) * 1971-12-23 1972-10-17 Western Electric Co Methods and apparatus for heating and/or coating articles
US3865072A (en) * 1973-10-18 1975-02-11 Hls Ind Apparatus for chemically depositing epitaxial layers on semiconductor substrates
DE2813180C2 (de) * 1978-03-25 1985-12-19 Leybold-Heraeus GmbH, 5000 Köln Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom
US4271005A (en) * 1979-12-03 1981-06-02 United Technologies Corporation Workpiece support apparatus for use with cathode sputtering devices
US4252626A (en) * 1980-03-10 1981-02-24 United Technologies Corporation Cathode sputtering with multiple targets
JPS59126541A (ja) * 1983-01-08 1984-07-21 Fuji Electric Co Ltd シ−ト状電子写真用感光体の製造方法
JPS59136541A (ja) * 1983-01-26 1984-08-06 Toyota Motor Corp アイドル回転数制御方法
US4496828A (en) * 1983-07-08 1985-01-29 Ultra Carbon Corporation Susceptor assembly
US4579080A (en) * 1983-12-09 1986-04-01 Applied Materials, Inc. Induction heated reactor system for chemical vapor deposition
DE3422718A1 (de) * 1984-06-19 1986-01-09 Plasmainvent AG, Zug Vakuum-plasma-beschichtungsanlage
US4823736A (en) * 1985-07-22 1989-04-25 Air Products And Chemicals, Inc. Barrel structure for semiconductor epitaxial reactor
JPS6312128A (ja) * 1986-03-20 1988-01-19 Toshiba Mach Co Ltd バレル型気相成長装置
GB2210387B (en) * 1987-09-30 1992-03-11 Rolls Royce Plc Chemical vapour deposition
JP2605810B2 (ja) * 1988-07-18 1997-04-30 日新電機株式会社 気相成長装置の回転シヤフト
US5264245A (en) * 1991-12-04 1993-11-23 Howmet Corporation CVD method for forming uniform coatings
US5421979A (en) * 1993-08-03 1995-06-06 Photran Corporation Load-lock drum-type coating apparatus
DE4425991C1 (de) * 1994-07-22 1995-12-07 Mtu Muenchen Gmbh Vorrichtung und Verfahren zur partiellen Beschichtung von Bauteilgruppen

Also Published As

Publication number Publication date
US5803971A (en) 1998-09-08
EP0975435A4 (de) 2004-06-02
DE69737037T2 (de) 2007-04-26
JP3976099B2 (ja) 2007-09-12
UA49876C2 (uk) 2002-10-15
WO1998030338A1 (en) 1998-07-16
EP0975435A1 (de) 2000-02-02
RU2161075C2 (ru) 2000-12-27
EP0975435B1 (de) 2006-11-29
JP2001507985A (ja) 2001-06-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition