DE69735148D1 - Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers - Google Patents

Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers

Info

Publication number
DE69735148D1
DE69735148D1 DE69735148T DE69735148T DE69735148D1 DE 69735148 D1 DE69735148 D1 DE 69735148D1 DE 69735148 T DE69735148 T DE 69735148T DE 69735148 T DE69735148 T DE 69735148T DE 69735148 D1 DE69735148 D1 DE 69735148D1
Authority
DE
Germany
Prior art keywords
improvement
signal
noise ratio
harmonic interferometer
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69735148T
Other languages
English (en)
Other versions
DE69735148T2 (de
Inventor
Paul Zorabedian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE69735148D1 publication Critical patent/DE69735148D1/de
Application granted granted Critical
Publication of DE69735148T2 publication Critical patent/DE69735148T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
DE69735148T 1996-11-14 1997-06-19 Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers Expired - Fee Related DE69735148T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/746,683 US5748313A (en) 1996-11-14 1996-11-14 Signal-to-noise ratio of second harmonic interferometers
US746683 1996-11-14

Publications (2)

Publication Number Publication Date
DE69735148D1 true DE69735148D1 (de) 2006-04-13
DE69735148T2 DE69735148T2 (de) 2006-07-20

Family

ID=25001886

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69735148T Expired - Fee Related DE69735148T2 (de) 1996-11-14 1997-06-19 Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers

Country Status (5)

Country Link
US (1) US5748313A (de)
EP (1) EP0843152B1 (de)
JP (1) JPH10153403A (de)
DE (1) DE69735148T2 (de)
SG (1) SG54508A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6157458A (en) * 1998-04-30 2000-12-05 Agilent Technologies Achromatic quarter wave plate for an air turbulence compensating inteferometer
US6014216A (en) * 1999-01-08 2000-01-11 Hewlett-Packard Company Architecture for air-turbulence-compensated dual-wavelength heterodyne interferometer
US6256102B1 (en) 1999-04-27 2001-07-03 University Of Central Florida Dual-beam low-coherence interferometer with improved signal-to-noise ratio
US6417927B2 (en) * 1999-04-28 2002-07-09 Zygo Corporation Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer
US6724486B1 (en) 1999-04-28 2004-04-20 Zygo Corporation Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry
US7508487B2 (en) 2000-06-01 2009-03-24 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
EP1160627A3 (de) * 2000-06-01 2004-08-18 ASML Netherlands B.V. Lithographischer Apparat, Verfahren zur Herstellung eines Artikels und damit hergestellter Artikel
US6816264B1 (en) * 2001-12-21 2004-11-09 Itt Manufacturing Enterprises, Inc. Systems and methods for amplified optical metrology
TWI304157B (en) * 2002-11-27 2008-12-11 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US7826063B2 (en) 2005-04-29 2010-11-02 Zygo Corporation Compensation of effects of atmospheric perturbations in optical metrology
US20070077071A1 (en) * 2005-09-30 2007-04-05 Mikhail Belenkiy System for measuring atmospheric turbulence
WO2008051232A2 (en) * 2006-10-25 2008-05-02 Zygo Corporation Compensation of effects of atmospheric perturbations in optical metrology
JP5276595B2 (ja) 2006-11-15 2013-08-28 ザイゴ コーポレーション リソグラフィツールにおいて使用される距離測定干渉計及びエンコーダ測定システム
US7812965B2 (en) 2006-12-11 2010-10-12 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects
US7894075B2 (en) 2006-12-11 2011-02-22 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects
CN101614523B (zh) * 2009-08-10 2010-10-27 中国科学院长春光学精密机械与物理研究所 一种检测掠射筒状离轴非球面镜的多光束长轨干涉仪
GB201411206D0 (en) * 2014-06-24 2014-08-06 Sec Dep For Business Innovation & Skills The And Usw Commercial Services Ltd Dual laser frequency sweep interferometry system and method
DE102022120607A1 (de) 2022-08-16 2024-02-22 Deutsches Zentrum für Luft- und Raumfahrt e.V. Optische Vorrichtung, System und Verfahren zur Dispersionsinterferometrie

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation

Also Published As

Publication number Publication date
JPH10153403A (ja) 1998-06-09
EP0843152B1 (de) 2006-01-25
SG54508A1 (en) 1998-11-16
DE69735148T2 (de) 2006-07-20
US5748313A (en) 1998-05-05
EP0843152A2 (de) 1998-05-20
EP0843152A3 (de) 2000-02-23

Similar Documents

Publication Publication Date Title
DE69735148D1 (de) Verbesserung des Signal-Rauschverhältnisses eines 2. harmonischen Interferometers
DE778952T1 (de) Bestimmung der herkunft eines projektils
DE69611731T2 (de) Dampfbügeleiesen
DE69120914D1 (de) Interferometer
DE69404746T2 (de) Kombinierter Dampf-Staubsauger
DE59202512D1 (de) Interferometer nach Michelson.
BR9710275A (pt) Interferômetro
ATA81696A (de) Dampfbügeleisen
DE69403099T2 (de) Dampfbügeleisen
DE69107269T2 (de) Michelson interferometer.
DE69525956T2 (de) Interferometer
DE59408798D1 (de) Interferometer nach Michelson
DE69420267T2 (de) Verringerung des interferometrischen rauschen eines optischen netzwerks
DE69517101T2 (de) Dampfbügeleisen
DE69123253T2 (de) Interferometer
DE69106470T2 (de) Zweistrahl-Interferometer.
DE69403218D1 (de) Dampfbügeleisen
ATA82892A (de) Interferometer
DE69521729D1 (de) Laserinterferometer
FR2694539B1 (fr) Perfectionnement de boîte du type dit "mono-cuvette".
DE29521780U1 (de) Interferometer
ATA92894A (de) Dynamische hornhaut-topographie-analyse
DE29721030U1 (de) Interferometer nach Michelson
ES1025461Y (es) "anillo doble"
DE29514910U1 (de) Dampfbügeleisen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee