ATA82892A - Interferometer - Google Patents
InterferometerInfo
- Publication number
- ATA82892A ATA82892A AT82892A AT82892A ATA82892A AT A82892 A ATA82892 A AT A82892A AT 82892 A AT82892 A AT 82892A AT 82892 A AT82892 A AT 82892A AT A82892 A ATA82892 A AT A82892A
- Authority
- AT
- Austria
- Prior art keywords
- interferometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/002—Automatic recalibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4242—Modulated light, e.g. for synchronizing source and detector circuit
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT82892A AT396526B (de) | 1992-04-23 | 1992-04-23 | Interferometer |
DE19934313076 DE4313076C2 (de) | 1992-04-23 | 1993-04-21 | Interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT82892A AT396526B (de) | 1992-04-23 | 1992-04-23 | Interferometer |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA82892A true ATA82892A (de) | 1993-01-15 |
AT396526B AT396526B (de) | 1993-10-25 |
Family
ID=3500710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT82892A AT396526B (de) | 1992-04-23 | 1992-04-23 | Interferometer |
Country Status (2)
Country | Link |
---|---|
AT (1) | AT396526B (de) |
DE (1) | DE4313076C2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0635697B1 (de) * | 1993-07-20 | 1998-09-23 | Helmut Raff | Messeinrichtung |
DE10118392A1 (de) * | 2001-04-13 | 2002-11-07 | Zeiss Carl | System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren |
EP1813962A1 (de) * | 2006-01-27 | 2007-08-01 | Polytec GmbH | Messvorrichtung und Verfahren zur optischen Vermessung eines Objektes |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD126836A5 (de) * | 1976-08-04 | 1977-08-17 | ||
US5071253A (en) * | 1985-12-26 | 1991-12-10 | Omega Tech, Inc. | Optical light beam position control system |
US5071251A (en) * | 1989-06-12 | 1991-12-10 | California Institute Of Technology | Wavelength independent interferometer |
-
1992
- 1992-04-23 AT AT82892A patent/AT396526B/de not_active IP Right Cessation
-
1993
- 1993-04-21 DE DE19934313076 patent/DE4313076C2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
AT396526B (de) | 1993-10-25 |
DE4313076A1 (de) | 1993-10-28 |
DE4313076C2 (de) | 1998-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EIH | Change in the person of patent owner | ||
ELJ | Ceased due to non-payment of the annual fee |