DE29521780U1 - Interferometer - Google Patents

Interferometer

Info

Publication number
DE29521780U1
DE29521780U1 DE29521780U DE29521780U DE29521780U1 DE 29521780 U1 DE29521780 U1 DE 29521780U1 DE 29521780 U DE29521780 U DE 29521780U DE 29521780 U DE29521780 U DE 29521780U DE 29521780 U1 DE29521780 U1 DE 29521780U1
Authority
DE
Germany
Prior art keywords
interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29521780U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP94102938A external-priority patent/EP0670467B1/de
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of DE29521780U1 publication Critical patent/DE29521780U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
DE29521780U 1994-02-26 1995-02-15 Interferometer Expired - Lifetime DE29521780U1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP94102938A EP0670467B1 (de) 1994-02-26 1994-02-26 Interferometer
DE19504907A DE19504907A1 (de) 1994-02-26 1995-02-15 Interferometer

Publications (1)

Publication Number Publication Date
DE29521780U1 true DE29521780U1 (de) 1998-08-06

Family

ID=26012436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29521780U Expired - Lifetime DE29521780U1 (de) 1994-02-26 1995-02-15 Interferometer

Country Status (1)

Country Link
DE (1) DE29521780U1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085748A1 (en) * 2004-03-04 2005-09-15 Renishaw Plc Optical readhead

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005085748A1 (en) * 2004-03-04 2005-09-15 Renishaw Plc Optical readhead

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19980917

R150 Term of protection extended to 6 years

Effective date: 19981209

R151 Term of protection extended to 8 years

Effective date: 20010223

R152 Term of protection extended to 10 years

Effective date: 20030221

R071 Expiry of right