DE69733381D1 - Verfahren und Vorrichtung zur Effizienzverbesserung strahlender Energiequellen für schnelle thermische Behandlung von Substraten durch Energiereflexion - Google Patents

Verfahren und Vorrichtung zur Effizienzverbesserung strahlender Energiequellen für schnelle thermische Behandlung von Substraten durch Energiereflexion

Info

Publication number
DE69733381D1
DE69733381D1 DE69733381T DE69733381T DE69733381D1 DE 69733381 D1 DE69733381 D1 DE 69733381D1 DE 69733381 T DE69733381 T DE 69733381T DE 69733381 T DE69733381 T DE 69733381T DE 69733381 D1 DE69733381 D1 DE 69733381D1
Authority
DE
Germany
Prior art keywords
substrates
improving
efficiency
thermal treatment
rapid thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69733381T
Other languages
English (en)
Other versions
DE69733381T2 (de
Inventor
Suneet Bahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69733381D1 publication Critical patent/DE69733381D1/de
Application granted granted Critical
Publication of DE69733381T2 publication Critical patent/DE69733381T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/12—Heating of the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Drying Of Semiconductors (AREA)
DE69733381T 1996-06-03 1997-06-03 Verfahren und Vorrichtung zur Effizienzverbesserung strahlender Energiequellen für schnelle thermische Behandlung von Substraten durch Energiereflexion Expired - Fee Related DE69733381T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US659064 1996-06-03
US08/659,064 US6072160A (en) 1996-06-03 1996-06-03 Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection

Publications (2)

Publication Number Publication Date
DE69733381D1 true DE69733381D1 (de) 2005-07-07
DE69733381T2 DE69733381T2 (de) 2006-04-27

Family

ID=24643885

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69733381T Expired - Fee Related DE69733381T2 (de) 1996-06-03 1997-06-03 Verfahren und Vorrichtung zur Effizienzverbesserung strahlender Energiequellen für schnelle thermische Behandlung von Substraten durch Energiereflexion

Country Status (4)

Country Link
US (1) US6072160A (de)
EP (1) EP0811709B1 (de)
JP (1) JPH1056008A (de)
DE (1) DE69733381T2 (de)

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Also Published As

Publication number Publication date
JPH1056008A (ja) 1998-02-24
EP0811709A2 (de) 1997-12-10
EP0811709A3 (de) 1998-08-12
EP0811709B1 (de) 2005-06-01
US6072160A (en) 2000-06-06
DE69733381T2 (de) 2006-04-27

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