DE69723372D1 - Tintenstrahlkopfsubstrat, Verfahren zum Herstellen des Substrats, Tintenstrahlaufzeichnungskopf mit dem Substrat und Verfahren zur Herstellung des Kopfes - Google Patents

Tintenstrahlkopfsubstrat, Verfahren zum Herstellen des Substrats, Tintenstrahlaufzeichnungskopf mit dem Substrat und Verfahren zur Herstellung des Kopfes

Info

Publication number
DE69723372D1
DE69723372D1 DE69723372T DE69723372T DE69723372D1 DE 69723372 D1 DE69723372 D1 DE 69723372D1 DE 69723372 T DE69723372 T DE 69723372T DE 69723372 T DE69723372 T DE 69723372T DE 69723372 D1 DE69723372 D1 DE 69723372D1
Authority
DE
Germany
Prior art keywords
substrate
head
manufacturing
ink jet
jet recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69723372T
Other languages
English (en)
Other versions
DE69723372T2 (de
Inventor
Ichiro Saito
Yoshiyuki Imanaka
Teruo Ozaki
Toshimori Miyakoshi
Muga Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69723372D1 publication Critical patent/DE69723372D1/de
Application granted granted Critical
Publication of DE69723372T2 publication Critical patent/DE69723372T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69723372T 1996-08-22 1997-08-21 Tintenstrahlkopfsubstrat, Verfahren zum Herstellen des Substrats, Tintenstrahlaufzeichnungskopf mit dem Substrat und Verfahren zur Herstellung des Kopfes Expired - Fee Related DE69723372T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22140396 1996-08-22
JP22140396 1996-08-22

Publications (2)

Publication Number Publication Date
DE69723372D1 true DE69723372D1 (de) 2003-08-14
DE69723372T2 DE69723372T2 (de) 2004-07-01

Family

ID=16766212

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69723372T Expired - Fee Related DE69723372T2 (de) 1996-08-22 1997-08-21 Tintenstrahlkopfsubstrat, Verfahren zum Herstellen des Substrats, Tintenstrahlaufzeichnungskopf mit dem Substrat und Verfahren zur Herstellung des Kopfes

Country Status (4)

Country Link
US (1) US6068369A (de)
EP (1) EP0825027B1 (de)
DE (1) DE69723372T2 (de)
ES (1) ES2201231T3 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6527813B1 (en) 1996-08-22 2003-03-04 Canon Kabushiki Kaisha Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
WO2000069635A1 (en) * 1999-05-13 2000-11-23 Casio Computer Co., Ltd. Heating resistor and manufacturing method thereof
JP3697196B2 (ja) * 2001-10-22 2005-09-21 キヤノン株式会社 記録ヘッド用基体、記録ヘッド及び記録装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311037A (en) * 1976-07-19 1978-02-01 Toshiba Corp Thin film thermal head
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPH01202457A (ja) * 1988-02-08 1989-08-15 Nec Corp サーマルインクジェット用発熱素子
JPH05338175A (ja) * 1992-06-10 1993-12-21 Canon Inc インクジェット記録ヘッド
ES2126022T3 (es) * 1993-06-28 1999-03-16 Canon Kk Resistencia generadora de calor que contiene tan0,8, substrato dotado de dicha resistencia generadora de calor, para cabezal por chorros de liquido, cabezal para chorros de liquido dotado de dicho substrato y aparato de chorros de tinta dotado del cabezal para chorros de liquido.
JP3155423B2 (ja) * 1993-06-28 2001-04-09 キヤノン株式会社 発熱抵抗体、該発熱抵抗体を備えた液体吐出ヘッド用基体、該基体を備えた液体吐出ヘッド、及び該液体吐出ヘッドを備えた液体吐出装置
JPH07101066A (ja) * 1993-09-30 1995-04-18 Canon Inc インクジェット記録ヘッドの製造方法
JP3285719B2 (ja) * 1994-10-28 2002-05-27 キヤノン株式会社 インクジェットヘッド及び該ヘッドの製造法

Also Published As

Publication number Publication date
US6068369A (en) 2000-05-30
EP0825027B1 (de) 2003-07-09
EP0825027A2 (de) 1998-02-25
DE69723372T2 (de) 2004-07-01
ES2201231T3 (es) 2004-03-16
EP0825027A3 (de) 1999-01-20

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication of lapse of patent is to be deleted
8339 Ceased/non-payment of the annual fee