DE69717357T2 - Verfahren zum Entfernen von Schadstoffen aus Abgasen - Google Patents

Verfahren zum Entfernen von Schadstoffen aus Abgasen

Info

Publication number
DE69717357T2
DE69717357T2 DE69717357T DE69717357T DE69717357T2 DE 69717357 T2 DE69717357 T2 DE 69717357T2 DE 69717357 T DE69717357 T DE 69717357T DE 69717357 T DE69717357 T DE 69717357T DE 69717357 T2 DE69717357 T2 DE 69717357T2
Authority
DE
Germany
Prior art keywords
exhaust gases
removing pollutants
pollutants
gases
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69717357T
Other languages
English (en)
Other versions
DE69717357D1 (de
Inventor
James Robert Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Application granted granted Critical
Publication of DE69717357D1 publication Critical patent/DE69717357D1/de
Publication of DE69717357T2 publication Critical patent/DE69717357T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/905—Cleaning of reaction chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/909—Controlled atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Fire-Extinguishing Compositions (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
DE69717357T 1996-07-15 1997-07-10 Verfahren zum Entfernen von Schadstoffen aus Abgasen Expired - Lifetime DE69717357T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9614849.9A GB9614849D0 (en) 1996-07-15 1996-07-15 Processes for the scubbing of noxious substances

Publications (2)

Publication Number Publication Date
DE69717357D1 DE69717357D1 (de) 2003-01-09
DE69717357T2 true DE69717357T2 (de) 2003-06-18

Family

ID=10796940

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69717357T Expired - Lifetime DE69717357T2 (de) 1996-07-15 1997-07-10 Verfahren zum Entfernen von Schadstoffen aus Abgasen

Country Status (5)

Country Link
US (1) US5925167A (de)
EP (1) EP0819779B1 (de)
JP (1) JPH10137545A (de)
DE (1) DE69717357T2 (de)
GB (1) GB9614849D0 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9614849D0 (en) * 1996-07-15 1996-09-04 Boc Group Plc Processes for the scubbing of noxious substances
JP4112659B2 (ja) * 1997-12-01 2008-07-02 大陽日酸株式会社 希ガスの回収方法及び装置
US6017382A (en) * 1998-03-30 2000-01-25 The Boc Group, Inc. Method of processing semiconductor manufacturing exhaust gases
US6090222A (en) * 1998-11-16 2000-07-18 Seh-America, Inc. High pressure gas cleaning purge of a dry process vacuum pump
US6572924B1 (en) * 1999-11-18 2003-06-03 Asm America, Inc. Exhaust system for vapor deposition reactor and method of using the same
US6602323B2 (en) * 2001-03-21 2003-08-05 Samsung Electronics Co., Ltd. Method and apparatus for reducing PFC emission during semiconductor manufacture
JP2003286012A (ja) * 2002-03-28 2003-10-07 Toshiba Corp ガスリサイクルシステムおよび方法、ガス絶縁機器、六弗化硫黄供給システム並びに電力事業システム
US7021903B2 (en) * 2003-12-31 2006-04-04 The Boc Group, Inc. Fore-line preconditioning for vacuum pumps
JP4633370B2 (ja) * 2004-02-17 2011-02-16 財団法人国際科学振興財団 真空装置
JP6522892B2 (ja) * 2014-05-30 2019-05-29 株式会社荏原製作所 真空排気システム
WO2015182699A1 (ja) * 2014-05-30 2015-12-03 株式会社 荏原製作所 真空排気システム
GB2533933A (en) * 2015-01-06 2016-07-13 Edwards Ltd Improvements in or relating to vacuum pumping arrangements

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518024A (en) * 1978-07-26 1980-02-07 Chiyou Lsi Gijutsu Kenkyu Kumiai Vapor phase reactor
FR2574520B1 (fr) * 1984-12-11 1987-07-10 Cogema Dispositif de ventilation d'une enceinte confinee
CH663549A5 (en) * 1985-07-15 1987-12-31 Antoine Dubas Eliminating toxic gases from semiconductor mfr. - by thermally decomposing them at low pressure and recovering non-gaseous residues
JP2736662B2 (ja) * 1988-11-04 1998-04-02 東芝セラミックス株式会社 半導体ウェーハの曇防止装置
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
US4877429A (en) * 1989-03-06 1989-10-31 Hunter Donald W Valve device for P.S.A. or R.P.S.A. systems
US5043299B1 (en) * 1989-12-01 1997-02-25 Applied Materials Inc Process for selective deposition of tungsten on semiconductor wafer
US5350336A (en) * 1993-04-23 1994-09-27 Industrial Technology Research Institute Building and method for manufacture of integrated semiconductor circuit devices
JPH06330323A (ja) * 1993-05-18 1994-11-29 Mitsubishi Electric Corp 半導体装置製造装置及びそのクリーニング方法
JP3256037B2 (ja) * 1993-07-07 2002-02-12 東京エレクトロン株式会社 熱処理装置
GB9614849D0 (en) * 1996-07-15 1996-09-04 Boc Group Plc Processes for the scubbing of noxious substances

Also Published As

Publication number Publication date
GB9614849D0 (en) 1996-09-04
DE69717357D1 (de) 2003-01-09
JPH10137545A (ja) 1998-05-26
EP0819779A1 (de) 1998-01-21
US5925167A (en) 1999-07-20
EP0819779B1 (de) 2002-11-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS LTD., CRAWLEY, WEST SUSSEX, GB