DE69717215D1 - Rückgewinnung von Edelgasen - Google Patents

Rückgewinnung von Edelgasen

Info

Publication number
DE69717215D1
DE69717215D1 DE69717215T DE69717215T DE69717215D1 DE 69717215 D1 DE69717215 D1 DE 69717215D1 DE 69717215 T DE69717215 T DE 69717215T DE 69717215 T DE69717215 T DE 69717215T DE 69717215 D1 DE69717215 D1 DE 69717215D1
Authority
DE
Germany
Prior art keywords
noble gas
gas
recycled
purge gas
process chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69717215T
Other languages
English (en)
Other versions
DE69717215T2 (de
Inventor
Ravi Jain
Walter H Whitlock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde LLC
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Inc filed Critical BOC Group Inc
Publication of DE69717215D1 publication Critical patent/DE69717215D1/de
Application granted granted Critical
Publication of DE69717215T2 publication Critical patent/DE69717215T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0094—Combined chemical and physical processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/11—Noble gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/001—Physical processing by making use of membranes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C01B2210/0015—Physical processing by adsorption in solids characterised by the adsorbent
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0032—Neon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Hydrogen, Water And Hydrids (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
DE69717215T 1996-08-27 1997-08-05 Rückgewinnung von Edelgasen Expired - Lifetime DE69717215T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70371196A 1996-08-27 1996-08-27
US88442197A 1997-06-27 1997-06-27

Publications (2)

Publication Number Publication Date
DE69717215D1 true DE69717215D1 (de) 2003-01-02
DE69717215T2 DE69717215T2 (de) 2003-07-24

Family

ID=27107192

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69717215T Expired - Lifetime DE69717215T2 (de) 1996-08-27 1997-08-05 Rückgewinnung von Edelgasen

Country Status (6)

Country Link
EP (1) EP0826629B1 (de)
JP (1) JP3913327B2 (de)
AT (1) ATE228101T1 (de)
DE (1) DE69717215T2 (de)
ES (1) ES2183091T3 (de)
PL (1) PL191279B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10076620B2 (en) 2012-12-22 2018-09-18 Dmf Medical Incorporated Anesthetic circuit having a hollow fiber membrane

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6089282A (en) * 1998-05-08 2000-07-18 Aeronex, Inc. Method for recovery and reuse of gas
US6408849B1 (en) * 1999-06-18 2002-06-25 Aeronex, Inc. Recovery and purification of gases used in medical processes
JP4769350B2 (ja) * 2000-09-22 2011-09-07 大陽日酸株式会社 希ガスの回収方法及び装置
JP2002308605A (ja) * 2001-04-11 2002-10-23 Japan Pionics Co Ltd 水素ガスの精製方法
JP3572548B2 (ja) * 2002-05-24 2004-10-06 日本酸素株式会社 ガス精製方法及び装置
US6770895B2 (en) * 2002-11-21 2004-08-03 Asml Holding N.V. Method and apparatus for isolating light source gas from main chamber gas in a lithography tool
US6919573B2 (en) 2003-03-20 2005-07-19 Asml Holding N.V Method and apparatus for recycling gases used in a lithography tool
US7094036B2 (en) * 2003-09-24 2006-08-22 The Boc Group Plc Vacuum pumping system
DE102006034601B3 (de) 2006-07-26 2008-02-07 Schmidt, Klaus, Prof. Dr. Rückhaltung von Edelgasen im Atemgas bei beatmeten Patienten mit Hilfe von Membranseparation
WO2009073029A1 (en) * 2007-12-06 2009-06-11 Uop Llc Process for safe membrane operation
JP5134588B2 (ja) * 2009-06-12 2013-01-30 住友精化株式会社 アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置
JP5287663B2 (ja) * 2009-10-30 2013-09-11 パナソニック株式会社 ガス放電表示パネルおよびガスリサイクル方法
JP7020951B2 (ja) * 2018-02-09 2022-02-16 東京エレクトロン株式会社 プラズマ処理システムおよびプラズマ処理方法
US11420869B2 (en) * 2019-02-22 2022-08-23 Uop Llc Process for removing oxygen from a hydrogen stream
US11619442B2 (en) 2021-04-19 2023-04-04 Praxair Technology, Inc. Method for regenerating a pre-purification vessel
CN116573611A (zh) * 2023-07-13 2023-08-11 杭氧集团股份有限公司 一种发电、碳捕获与惰性组分回收耦合的装置及使用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69518710T2 (de) * 1994-09-27 2001-05-23 Applied Materials Inc Verfahren zum Behandeln eines Substrats in einer Vakuumbehandlungskammer
FR2730790B1 (fr) * 1995-02-17 1997-05-23 Air Liquide Procede d'introduction d'un gaz de remplissage dans une enceinte et installation de mise en oeuvre

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10076620B2 (en) 2012-12-22 2018-09-18 Dmf Medical Incorporated Anesthetic circuit having a hollow fiber membrane
US10960160B2 (en) 2012-12-22 2021-03-30 Dmf Medical Incorporated Anesthetic circuit having a hollow fiber membrane

Also Published As

Publication number Publication date
PL321797A1 (en) 1998-03-02
EP0826629B1 (de) 2002-11-20
ES2183091T3 (es) 2003-03-16
JP3913327B2 (ja) 2007-05-09
EP0826629A3 (de) 1998-11-04
ATE228101T1 (de) 2002-12-15
EP0826629A2 (de) 1998-03-04
PL191279B1 (pl) 2006-04-28
DE69717215T2 (de) 2003-07-24
JPH10273307A (ja) 1998-10-13

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