DE69714320T2 - Sonde für Atomkraftmikroskop, Verfahren zur Herstellung der Sonde und Atomkraftmikroskop - Google Patents
Sonde für Atomkraftmikroskop, Verfahren zur Herstellung der Sonde und AtomkraftmikroskopInfo
- Publication number
- DE69714320T2 DE69714320T2 DE69714320T DE69714320T DE69714320T2 DE 69714320 T2 DE69714320 T2 DE 69714320T2 DE 69714320 T DE69714320 T DE 69714320T DE 69714320 T DE69714320 T DE 69714320T DE 69714320 T2 DE69714320 T2 DE 69714320T2
- Authority
- DE
- Germany
- Prior art keywords
- probe
- atomic force
- force microscope
- manufacturing
- atomic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000523 sample Substances 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
- Y10S977/878—Shape/taper
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
- Y10S977/879—Material
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5210996 | 1996-03-08 | ||
JP29404596A JP3370527B2 (ja) | 1996-03-08 | 1996-11-06 | 原子間力顕微鏡用プローブとその製造方法および原子間力顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69714320D1 DE69714320D1 (de) | 2002-09-05 |
DE69714320T2 true DE69714320T2 (de) | 2003-01-23 |
Family
ID=26392718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69714320T Expired - Fee Related DE69714320T2 (de) | 1996-03-08 | 1997-03-06 | Sonde für Atomkraftmikroskop, Verfahren zur Herstellung der Sonde und Atomkraftmikroskop |
Country Status (5)
Country | Link |
---|---|
US (2) | US5877412A (de) |
EP (1) | EP0794406B1 (de) |
JP (1) | JP3370527B2 (de) |
CA (1) | CA2199528A1 (de) |
DE (1) | DE69714320T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010023353B4 (de) | 2010-06-10 | 2022-05-05 | Jenoptik Industrial Metrology Germany Gmbh | Tastarm für ein Oberflächenmeßgerät |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19740763C2 (de) * | 1997-09-16 | 2001-06-07 | Forschungszentrum Juelich Gmbh | Hebelarm für ein Rasterkraftmikroskop |
US6415653B1 (en) * | 1998-03-24 | 2002-07-09 | Olympus Optical Co., Ltd. | Cantilever for use in a scanning probe microscope |
JP3387846B2 (ja) * | 1999-03-04 | 2003-03-17 | セイコーインスツルメンツ株式会社 | 走査型プローブ顕微鏡 |
US6405584B1 (en) * | 1999-10-05 | 2002-06-18 | Agere Systems Guardian Corp. | Probe for scanning probe microscopy and related methods |
US6437329B1 (en) | 1999-10-27 | 2002-08-20 | Advanced Micro Devices, Inc. | Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tube |
US6583412B2 (en) * | 2000-03-17 | 2003-06-24 | University Of Utah Research Foundation | Scanning tunneling charge transfer microscope |
US6455847B1 (en) | 2000-04-26 | 2002-09-24 | Advanced Micro Devices, Inc. | Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts |
DE10027060B4 (de) * | 2000-06-05 | 2006-11-30 | Nanosurf Ag | Abtastspitzen,Verfahren zur Herstellung und Verwendung derselben, insbesondere für die Rastersondenmikroskopie |
US6504151B1 (en) * | 2000-09-13 | 2003-01-07 | Fei Company | Wear coating applied to an atomic force probe tip |
JP2003215161A (ja) * | 2002-01-22 | 2003-07-30 | Tokyo Electron Ltd | プローブ、プローブの製造方法、プローブの取付方法、プローブの取付装置及びプローブカード |
US7089787B2 (en) * | 2004-07-08 | 2006-08-15 | Board Of Trustees Of The Leland Stanford Junior University | Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy |
KR100624434B1 (ko) * | 2004-09-07 | 2006-09-19 | 삼성전자주식회사 | 저항성 팁을 구비한 반도체 탐침 및 그 제조방법 |
US7444856B2 (en) * | 2004-09-23 | 2008-11-04 | The Board Of Trustees Of The Leland Stanford Junior University | Sensors for electrochemical, electrical or topographical analysis |
WO2006042065A2 (en) * | 2004-10-08 | 2006-04-20 | Imago Scientific Instruments Corporation | Method to form microptips |
US7571638B1 (en) * | 2005-05-10 | 2009-08-11 | Kley Victor B | Tool tips with scanning probe microscopy and/or atomic force microscopy applications |
US9423693B1 (en) | 2005-05-10 | 2016-08-23 | Victor B. Kley | In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate |
KR100664443B1 (ko) * | 2005-08-10 | 2007-01-03 | 주식회사 파이컴 | 캔틸레버형 프로브 및 그 제조 방법 |
DE102006011598A1 (de) * | 2006-03-10 | 2007-09-13 | Universität Hamburg | Cantilever eines Rastersondenmikroskops |
US7603891B2 (en) | 2006-04-25 | 2009-10-20 | Asylum Research Corporation | Multiple frequency atomic force microscopy |
US7784107B2 (en) * | 2006-06-02 | 2010-08-24 | Victor B. Kley | High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer |
CN101501785A (zh) * | 2006-06-02 | 2009-08-05 | 维克托·B·克利 | 针对米到亚纳米长度范围内的高速测量、分析和成像的系统及方法 |
EP2034504A4 (de) * | 2006-06-28 | 2010-08-18 | Sumitomo Electric Industries | Diamantenelektronen-strahlungskathode, elektronenquelle, elektronenmikroskop und elektronenstrahlbelichtungsvorrichtung |
US8024963B2 (en) * | 2006-10-05 | 2011-09-27 | Asylum Research Corporation | Material property measurements using multiple frequency atomic force microscopy |
JP4916893B2 (ja) * | 2007-01-05 | 2012-04-18 | 株式会社日本マイクロニクス | プローブの製造方法 |
US8484761B2 (en) | 2008-06-11 | 2013-07-09 | Imec | Method for cost-efficient manufacturing diamond tips for ultra-high resolution electrical measurements and devices obtained thereof |
WO2012057723A1 (en) | 2009-10-22 | 2012-05-03 | Proksch, Roger | Thermal measurements using multiple frequency atomic force microscopy |
US8984966B2 (en) * | 2011-10-04 | 2015-03-24 | Femtotools Ag | Sub-millinewton capacitive MEMS force sensor for mechanical testing on a microscope |
US8689361B1 (en) | 2012-10-29 | 2014-04-01 | Oicmicro, LLC | Method of making thin film probe tip for atomic force microscopy |
US9778572B1 (en) | 2013-03-15 | 2017-10-03 | Victor B. Kley | In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate |
US9383388B2 (en) | 2014-04-21 | 2016-07-05 | Oxford Instruments Asylum Research, Inc | Automated atomic force microscope and the operation thereof |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0290647B1 (de) * | 1987-05-12 | 1991-07-24 | International Business Machines Corporation | Atomares Kräftemikroskop mit oscillierendem Quarz |
EP0413041B1 (de) * | 1989-08-16 | 1992-07-15 | International Business Machines Corporation | Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf |
US5021364A (en) * | 1989-10-31 | 1991-06-04 | The Board Of Trustees Of The Leland Stanford Junior University | Microcantilever with integral self-aligned sharp tetrahedral tip |
JPH03218998A (ja) | 1989-10-10 | 1991-09-26 | Univ Leland Stanford Jr | 探針付きカンチレバー及びその製造方法 |
JP2624873B2 (ja) * | 1990-05-16 | 1997-06-25 | 松下電器産業株式会社 | 原子間力顕微鏡用探針およびその製造方法 |
JP3053456B2 (ja) * | 1990-08-31 | 2000-06-19 | オリンパス光学工業株式会社 | 走査型プローブ顕微鏡用カンチレバー及びその作製方法 |
JP3010318B2 (ja) * | 1991-02-26 | 2000-02-21 | キヤノン株式会社 | 微小プローブ、その製造方法、該プローブを用いた表面観察装置及び情報処理装置 |
US5264696A (en) * | 1991-05-20 | 1993-11-23 | Olympus Optical Co., Ltd. | Cantilever chip for scanning probe microscope having first and second probes formed with different aspect ratios |
JPH06103176A (ja) | 1992-09-18 | 1994-04-15 | Sony Corp | 不揮発性メモリの処理方法 |
JPH06323845A (ja) | 1993-03-19 | 1994-11-25 | Tadatomo Suga | 走査型力顕微鏡用薄膜式力検出プローブ |
US5883387A (en) * | 1994-11-15 | 1999-03-16 | Olympus Optical Co., Ltd. | SPM cantilever and a method for manufacturing the same |
-
1996
- 1996-11-06 JP JP29404596A patent/JP3370527B2/ja not_active Expired - Fee Related
-
1997
- 1997-03-06 DE DE69714320T patent/DE69714320T2/de not_active Expired - Fee Related
- 1997-03-06 EP EP97103780A patent/EP0794406B1/de not_active Expired - Lifetime
- 1997-03-06 US US08/812,846 patent/US5877412A/en not_active Expired - Fee Related
- 1997-03-07 CA CA002199528A patent/CA2199528A1/en not_active Abandoned
-
1999
- 1999-01-22 US US09/235,668 patent/US6358426B1/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010023353B4 (de) | 2010-06-10 | 2022-05-05 | Jenoptik Industrial Metrology Germany Gmbh | Tastarm für ein Oberflächenmeßgerät |
Also Published As
Publication number | Publication date |
---|---|
US5877412A (en) | 1999-03-02 |
JPH09297148A (ja) | 1997-11-18 |
DE69714320D1 (de) | 2002-09-05 |
JP3370527B2 (ja) | 2003-01-27 |
EP0794406B1 (de) | 2002-07-31 |
US6358426B1 (en) | 2002-03-19 |
EP0794406A1 (de) | 1997-09-10 |
CA2199528A1 (en) | 1997-09-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: SII NANO TECHNOLOGY INC., CHIBA, JP |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN |
|
8339 | Ceased/non-payment of the annual fee |