DE69637883D1 - Vielfachmoden-piezoelektrisches filter - Google Patents

Vielfachmoden-piezoelektrisches filter

Info

Publication number
DE69637883D1
DE69637883D1 DE69637883T DE69637883T DE69637883D1 DE 69637883 D1 DE69637883 D1 DE 69637883D1 DE 69637883 T DE69637883 T DE 69637883T DE 69637883 T DE69637883 T DE 69637883T DE 69637883 D1 DE69637883 D1 DE 69637883D1
Authority
DE
Germany
Prior art keywords
piezoelectric filter
model piezoelectric
model
filter
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69637883T
Other languages
English (en)
Inventor
Hiroyuki Arimura
Kiminori Kawano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daishinku Corp
Original Assignee
Daishinku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19214295A external-priority patent/JP3507206B2/ja
Priority claimed from JP23547495A external-priority patent/JPH0983290A/ja
Application filed by Daishinku Corp filed Critical Daishinku Corp
Application granted granted Critical
Publication of DE69637883D1 publication Critical patent/DE69637883D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE69637883T 1995-07-27 1996-07-26 Vielfachmoden-piezoelektrisches filter Expired - Lifetime DE69637883D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP19214295A JP3507206B2 (ja) 1995-07-27 1995-07-27 多重モード圧電フィルタ
JP23547495A JPH0983290A (ja) 1995-09-13 1995-09-13 表面実装型圧電フィルタ
PCT/JP1996/002125 WO1997005699A1 (fr) 1995-07-27 1996-07-26 Filtre piezo-electrique a mode multiple

Publications (1)

Publication Number Publication Date
DE69637883D1 true DE69637883D1 (de) 2009-05-07

Family

ID=26507131

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69637883T Expired - Lifetime DE69637883D1 (de) 1995-07-27 1996-07-26 Vielfachmoden-piezoelektrisches filter

Country Status (7)

Country Link
US (1) US5939956A (de)
EP (1) EP0783205B1 (de)
KR (1) KR100294103B1 (de)
CN (2) CN1080953C (de)
DE (1) DE69637883D1 (de)
TW (1) TW438155U (de)
WO (1) WO1997005699A1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19649332C1 (de) * 1996-11-28 1998-01-22 Tele Quarz Gmbh Resonator mit Kristall
JPH10215143A (ja) * 1997-01-31 1998-08-11 Nec Corp 弾性表面波装置
SE9800189L (sv) * 1998-01-23 1999-07-24 Sense Ab Q Anordning vid en piezoelektrisk kristalloscillator
US6150703A (en) * 1998-06-29 2000-11-21 Trw Inc. Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
GB2352101B (en) * 1999-07-13 2003-02-26 Peter Kenneth Wall Balanced monolithic resonators
JP2001077664A (ja) * 1999-09-06 2001-03-23 Ngk Spark Plug Co Ltd エネルギー閉じ込め型圧電フィルタ
EP1170862B1 (de) * 2000-06-23 2012-10-10 Murata Manufacturing Co., Ltd. Piezoelektrischer Resonator und diesen enthaltendes piezoelektrisches Filter
EP1202455A3 (de) * 2000-10-31 2004-09-15 Agilent Technologies, Inc. (a Delaware corporation) Verfahren zum Verpacken von Duplexern unter Gebrauch von akustischen Dünnfilmvolumenresonatoren
JP3838024B2 (ja) * 2000-11-27 2006-10-25 株式会社村田製作所 縦結合型マルチモード圧電フィルタ
JP3682224B2 (ja) * 2000-12-19 2005-08-10 日本電波工業株式会社 ４ポール・モノリシック・フィルタ
JP2002368577A (ja) * 2001-04-06 2002-12-20 Murata Mfg Co Ltd 二重モードフィルタ
US6794958B2 (en) * 2002-07-25 2004-09-21 Agilent Technologies, Inc. Method of fabricating a semiconductor device and an apparatus embodying the method
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
WO2010077311A1 (en) * 2008-12-17 2010-07-08 Sand9, Inc. Multi-port mechanical resonating devices and related methods
WO2010077313A1 (en) 2008-12-17 2010-07-08 Sand9, Inc. Mechanical resonating structures including a temperature compensation structure
US8456250B2 (en) * 2009-02-04 2013-06-04 Sand 9, Inc. Methods and apparatus for tuning devices having resonators
US8446227B2 (en) * 2009-02-04 2013-05-21 Sand 9, Inc. Methods and apparatus for tuning devices having mechanical resonators
US8395456B2 (en) * 2009-02-04 2013-03-12 Sand 9, Inc. Variable phase amplifier circuit and method of use
US8736388B2 (en) 2009-12-23 2014-05-27 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
CN101800524B (zh) * 2010-01-05 2011-12-14 浙江大学 一种非对称结构的剪切模式fbar
WO2011109382A1 (en) 2010-03-01 2011-09-09 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
CN101800525A (zh) * 2010-03-05 2010-08-11 中国电子科技集团公司第二十六研究所 小型化多级级联单片压电滤波器
US8833161B2 (en) 2010-04-20 2014-09-16 Sand 9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
US9075077B2 (en) 2010-09-20 2015-07-07 Analog Devices, Inc. Resonant sensing using extensional modes of a plate
US9383208B2 (en) 2011-10-13 2016-07-05 Analog Devices, Inc. Electromechanical magnetometer and applications thereof
CN104662797B (zh) * 2012-09-25 2017-06-09 株式会社村田制作所 弹性波装置及其制造方法
JP5949445B2 (ja) * 2012-10-26 2016-07-06 株式会社大真空 圧電フィルタ
CN103187946B (zh) * 2013-03-23 2015-12-09 湖南嘉业达电子有限公司 一种压电陶瓷滤波器
US10800649B2 (en) 2016-11-28 2020-10-13 Analog Devices International Unlimited Company Planar processing of suspended microelectromechanical systems (MEMS) devices
JP7205497B2 (ja) * 2018-02-02 2023-01-17 株式会社大真空 圧電フィルタ
US10843920B2 (en) 2019-03-08 2020-11-24 Analog Devices International Unlimited Company Suspended microelectromechanical system (MEMS) devices

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846577Y2 (ja) * 1976-05-14 1983-10-24 キンセキ株式会社 複合振動子の保持容器
JPS5743383Y2 (de) * 1976-05-08 1982-09-24
JPS52152636A (en) * 1976-06-15 1977-12-19 Tadashi Hagiwara Rotary refuse removing device
DE2715202A1 (de) * 1977-04-05 1978-10-19 Draloric Electronic Piezoelektrisches filter und verfahren zu seiner herstellung
JPS5617710A (en) * 1979-07-17 1981-02-19 Asahi Glass Co Ltd Connection mechanism for forklift towing trailer
JPS5617710U (de) * 1979-07-18 1981-02-16
US4365181A (en) * 1979-07-18 1982-12-21 Murata Manufacturing Co., Ltd. Piezoelectric vibrator with damping electrodes
JPS56137519U (de) * 1980-03-18 1981-10-17
JPS6032885B2 (ja) * 1980-03-26 1985-07-31 松下電器産業株式会社 薄膜磁気ヘッド
JPS5743383A (en) * 1980-08-28 1982-03-11 Matsushita Electric Ind Co Ltd Infrared radiation heater and method of manufacturing same
GB2100950A (en) * 1981-06-23 1983-01-06 Standard Telephones Cables Ltd Crystal filter
JPS5923910A (ja) * 1982-07-30 1984-02-07 Toyo Commun Equip Co Ltd 多段接続モノリシツク・フイルタ
JPH066175A (ja) * 1992-06-19 1994-01-14 Murata Mfg Co Ltd 圧電部品
US5382929A (en) * 1992-07-31 1995-01-17 Ndk, Nihon Dempa Kogyo Company, Ltd. Monolithic crystal filter
DE69415202T2 (de) * 1993-04-15 1999-06-17 Murata Manufacturing Co Piezoelektrisches Filter
JPH07336189A (ja) * 1994-06-09 1995-12-22 Murata Mfg Co Ltd 圧電フィルタ
US5572082A (en) * 1994-11-14 1996-11-05 Sokol; Thomas J. Monolithic crystal strip filter

Also Published As

Publication number Publication date
TW438155U (en) 2001-05-28
US5939956A (en) 1999-08-17
KR970706651A (ko) 1997-11-03
EP0783205A1 (de) 1997-07-09
KR100294103B1 (ko) 2001-09-17
EP0783205A4 (de) 2002-04-17
CN1164940A (zh) 1997-11-12
EP0783205B1 (de) 2009-03-25
CN1240184C (zh) 2006-02-01
CN1080953C (zh) 2002-03-13
WO1997005699A1 (fr) 1997-02-13
CN1404222A (zh) 2003-03-19

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Legal Events

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