DE69622893D1 - Verfahren zur reinigung von tetraethoxysilan - Google Patents
Verfahren zur reinigung von tetraethoxysilanInfo
- Publication number
- DE69622893D1 DE69622893D1 DE69622893T DE69622893T DE69622893D1 DE 69622893 D1 DE69622893 D1 DE 69622893D1 DE 69622893 T DE69622893 T DE 69622893T DE 69622893 T DE69622893 T DE 69622893T DE 69622893 D1 DE69622893 D1 DE 69622893D1
- Authority
- DE
- Germany
- Prior art keywords
- tetraethoxysilane
- pure
- purifying
- purified
- column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic System
- C07F7/02—Silicon compounds
- C07F7/04—Esters of silicic acids
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/558,682 US5840953A (en) | 1995-11-16 | 1995-11-16 | Purified tetraethoxysilane and method of purifying |
PCT/US1996/018067 WO1997018219A1 (en) | 1995-11-16 | 1996-11-14 | Purified tetraethoxysilane and method of purifying |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69622893D1 true DE69622893D1 (de) | 2002-09-12 |
DE69622893T2 DE69622893T2 (de) | 2002-12-12 |
Family
ID=24230519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69622893T Expired - Fee Related DE69622893T2 (de) | 1995-11-16 | 1996-11-14 | Verfahren zur reinigung von tetraethoxysilan |
Country Status (9)
Country | Link |
---|---|
US (1) | US5840953A (de) |
EP (1) | EP0970092B1 (de) |
JP (1) | JP2000500457A (de) |
AT (1) | ATE221891T1 (de) |
AU (1) | AU7726696A (de) |
DE (1) | DE69622893T2 (de) |
DK (1) | DK0970092T3 (de) |
ES (1) | ES2176517T3 (de) |
WO (1) | WO1997018219A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6660875B1 (en) | 1998-06-09 | 2003-12-09 | Ppt Technologies, Llc | Ion exchange purification of dielectric condensate precursor fluids and silicate esters such as tetraethylorthosilicate (TEOS) |
JP4288130B2 (ja) * | 2003-09-30 | 2009-07-01 | 東京エレクトロン株式会社 | 電気的接合部材及びプラズマ処理装置 |
DE102004025766A1 (de) | 2004-05-26 | 2005-12-22 | Degussa Ag | Herstellung von Organosilanestern |
JP4212106B2 (ja) * | 2005-04-19 | 2009-01-21 | オルガノ株式会社 | ガス分離装置及びガス分離方法 |
US9056264B2 (en) * | 2010-07-16 | 2015-06-16 | Idex Health & Science Llc | Biocompatible tubing for liquid chromatography systems |
CN103772424B (zh) * | 2013-12-31 | 2016-01-27 | 贵州威顿晶磷电子材料股份有限公司 | 一种电子级正硅酸四乙酯的制备方法 |
US20170023235A1 (en) * | 2015-07-21 | 2017-01-26 | Apple Inc. | Sublimator/vaporizer |
CN109459539B (zh) * | 2018-12-29 | 2024-03-22 | 金宏气体股份有限公司 | 一种高纯正硅酸乙酯中微量水分的检测方法及检测系统 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB802339A (en) * | 1955-05-17 | 1958-10-01 | Union Carbide Corp | Preparation of orthosilicates |
US3041141A (en) * | 1955-09-06 | 1962-06-26 | Baker Chem Co J T | Process of purifying silane |
US3002583A (en) * | 1957-06-10 | 1961-10-03 | Phillips Petroleum Co | Fluid separation by gas chromatography |
US2972626A (en) * | 1958-01-15 | 1961-02-21 | Monsanto Chemicals | Purification of organo-silicate condensation products |
US3019087A (en) * | 1958-09-29 | 1962-01-30 | Merck & Co Inc | Purification of silane |
US3118947A (en) * | 1960-06-22 | 1964-01-21 | Exxon Research Engineering Co | Epoxide conversion process |
US3267646A (en) * | 1963-03-04 | 1966-08-23 | Hewlett Packard Co | Automatic preparative gas chromatograph |
JPS5315477B2 (de) * | 1972-09-30 | 1978-05-25 | ||
US4003257A (en) * | 1974-03-12 | 1977-01-18 | Nasa | Analysis of volatile organic compounds |
US4070444A (en) * | 1976-07-21 | 1978-01-24 | Motorola Inc. | Low cost, high volume silicon purification process |
US4159966A (en) * | 1977-12-27 | 1979-07-03 | The Dow Chemical Company | Chromatographic column packing |
US4537759A (en) * | 1981-08-24 | 1985-08-27 | Eagle-Picher Industries, Inc. | Production of elemental silicon from impure silane feed |
JPS5930711A (ja) * | 1982-08-12 | 1984-02-18 | Showa Denko Kk | モノシランの精製法 |
US4447632A (en) * | 1983-04-18 | 1984-05-08 | Union Carbide Corporation | Process for production of alkyl silicates from silicon metal |
US4532120A (en) * | 1983-12-28 | 1985-07-30 | Ethyl Corporation | Silane purification process |
US4772296A (en) * | 1987-05-12 | 1988-09-20 | Eagle-Picher Industries, Inc. | Method of purifying and depositing group IIIa and group Va compounds to produce epitaxial films |
US5069690A (en) * | 1991-02-21 | 1991-12-03 | Air Products And Chemicals, Inc. | Process for kinetic gas-solid chromatographic separations |
DE4130643A1 (de) * | 1991-09-14 | 1993-03-18 | Degussa | Verfahren zur reinigung von alkoxysilanen |
JPH0586069A (ja) * | 1991-09-26 | 1993-04-06 | Asahi Denka Kogyo Kk | 有機珪素化合物の精製法 |
-
1995
- 1995-11-16 US US08/558,682 patent/US5840953A/en not_active Expired - Lifetime
-
1996
- 1996-11-14 JP JP9518981A patent/JP2000500457A/ja not_active Ceased
- 1996-11-14 AU AU77266/96A patent/AU7726696A/en not_active Abandoned
- 1996-11-14 WO PCT/US1996/018067 patent/WO1997018219A1/en active IP Right Grant
- 1996-11-14 DK DK96940369T patent/DK0970092T3/da active
- 1996-11-14 AT AT96940369T patent/ATE221891T1/de not_active IP Right Cessation
- 1996-11-14 ES ES96940369T patent/ES2176517T3/es not_active Expired - Lifetime
- 1996-11-14 EP EP96940369A patent/EP0970092B1/de not_active Expired - Lifetime
- 1996-11-14 DE DE69622893T patent/DE69622893T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO1997018219A1 (en) | 1997-05-22 |
DK0970092T3 (da) | 2002-09-02 |
JP2000500457A (ja) | 2000-01-18 |
EP0970092A1 (de) | 2000-01-12 |
AU7726696A (en) | 1997-06-05 |
US5840953A (en) | 1998-11-24 |
DE69622893T2 (de) | 2002-12-12 |
ATE221891T1 (de) | 2002-08-15 |
EP0970092B1 (de) | 2002-08-07 |
ES2176517T3 (es) | 2002-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |