DE69617593T2 - Akustische Oberflächenwellenanordnung mit Diamant-ZnO mit verhältnismässig dünner piezoelektrischer ZnO-Schicht - Google Patents

Akustische Oberflächenwellenanordnung mit Diamant-ZnO mit verhältnismässig dünner piezoelektrischer ZnO-Schicht

Info

Publication number
DE69617593T2
DE69617593T2 DE69617593T DE69617593T DE69617593T2 DE 69617593 T2 DE69617593 T2 DE 69617593T2 DE 69617593 T DE69617593 T DE 69617593T DE 69617593 T DE69617593 T DE 69617593T DE 69617593 T2 DE69617593 T2 DE 69617593T2
Authority
DE
Germany
Prior art keywords
zno
diamond
relatively thin
surface wave
acoustic surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69617593T
Other languages
English (en)
Other versions
DE69617593D1 (de
Inventor
Hiroyuki Kitabayashi
Hideaki Nakahata
Kenjiro Higaki
Satoshi Fujii
Shin-Ichi Shikata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69617593D1 publication Critical patent/DE69617593D1/de
Publication of DE69617593T2 publication Critical patent/DE69617593T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02582—Characteristics of substrate, e.g. cutting angles of diamond substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69617593T 1995-09-29 1996-09-25 Akustische Oberflächenwellenanordnung mit Diamant-ZnO mit verhältnismässig dünner piezoelektrischer ZnO-Schicht Expired - Lifetime DE69617593T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27626095A JP3205981B2 (ja) 1995-09-29 1995-09-29 表面弾性波素子

Publications (2)

Publication Number Publication Date
DE69617593D1 DE69617593D1 (de) 2002-01-17
DE69617593T2 true DE69617593T2 (de) 2002-05-02

Family

ID=17566958

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69617593T Expired - Lifetime DE69617593T2 (de) 1995-09-29 1996-09-25 Akustische Oberflächenwellenanordnung mit Diamant-ZnO mit verhältnismässig dünner piezoelektrischer ZnO-Schicht

Country Status (5)

Country Link
US (1) US5777422A (de)
EP (1) EP0766383B1 (de)
JP (1) JP3205981B2 (de)
CA (1) CA2186185C (de)
DE (1) DE69617593T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3205978B2 (ja) * 1995-08-08 2001-09-04 住友電気工業株式会社 表面弾性波素子
US5959389A (en) * 1995-08-08 1999-09-28 Sumitomo Electronic Industries, Ltd. Diamond-ZnO surface acoustic wave device
MY129974A (en) * 1996-11-07 2007-05-31 Sumitomo Electric Industries Diamond-zn0 surface acoustic wave device
US6713941B2 (en) 2000-03-24 2004-03-30 Seiko Epson Corporation Surface acoustic wave element
JP2002057549A (ja) * 2000-08-09 2002-02-22 Sumitomo Electric Ind Ltd 表面弾性波素子用基板及び表面弾性波素子
US6930364B2 (en) * 2001-09-13 2005-08-16 Silicon Light Machines Corporation Microelectronic mechanical system and methods
EP1540736A4 (de) * 2002-08-28 2006-03-08 Silicon Light Machines Corp Versiegelung auf waferebene für nicht auf silizium basierende bauelemente
US6846423B1 (en) 2002-08-28 2005-01-25 Silicon Light Machines Corporation Wafer-level seal for non-silicon-based devices
US6877209B1 (en) * 2002-08-28 2005-04-12 Silicon Light Machines, Inc. Method for sealing an active area of a surface acoustic wave device on a wafer
US20040091208A1 (en) * 2002-11-12 2004-05-13 Yutaka Doi Planar optical wave-guide with dielectric mirrors
US7645513B2 (en) * 2003-02-14 2010-01-12 City University Of Hong Kong Cubic boron nitride/diamond composite layers
DE112004000499B4 (de) * 2003-04-18 2011-05-05 Murata Mfg. Co., Ltd., Nagaokakyo-shi Grenzakustikwellenbauelement
US7750420B2 (en) * 2004-03-26 2010-07-06 Cypress Semiconductor Corporation Integrated circuit having one or more conductive devices formed over a SAW and/or MEMS device
EP1926211A3 (de) * 2006-11-21 2013-08-14 Imec Scherenmodusresonator für Diamanten von höherer Dicke
US7579759B2 (en) * 2007-06-11 2009-08-25 City University Of Hong Kong Surface acoustic wave (SAW) devices based on cubic boron nitride/diamond composite structures
US9973169B2 (en) * 2015-10-01 2018-05-15 Qorvo Us, Inc. Surface acoustic wave filter with a cap layer for improved reliability

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4952832A (en) * 1989-10-24 1990-08-28 Sumitomo Electric Industries, Ltd. Surface acoustic wave device
JP2885349B2 (ja) * 1989-12-26 1999-04-19 住友電気工業株式会社 表面弾性波素子
EP0534354A1 (de) * 1991-09-25 1993-03-31 Sumitomo Electric Industries, Limited Akustische Oberflächenwellenanordnung und ihr Herstellungsverfahren
JP3225495B2 (ja) * 1992-02-21 2001-11-05 住友電気工業株式会社 表面弾性波素子及びその製造方法
JP3205976B2 (ja) * 1992-09-14 2001-09-04 住友電気工業株式会社 表面弾性波素子
JP3163606B2 (ja) * 1993-01-29 2001-05-08 住友電気工業株式会社 表面弾性波素子
JP3344441B2 (ja) * 1994-03-25 2002-11-11 住友電気工業株式会社 表面弾性波素子

Also Published As

Publication number Publication date
EP0766383A3 (de) 1998-01-14
JP3205981B2 (ja) 2001-09-04
EP0766383A2 (de) 1997-04-02
CA2186185C (en) 2006-08-01
DE69617593D1 (de) 2002-01-17
JPH0998059A (ja) 1997-04-08
US5777422A (en) 1998-07-07
EP0766383B1 (de) 2001-12-05
CA2186185A1 (en) 1997-03-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SEIKO EPSON CORP., TOKIO/TOKYO, JP