DE69609244D1 - Verfahren zur Herstellung diamantartiger Beschichtungen - Google Patents

Verfahren zur Herstellung diamantartiger Beschichtungen

Info

Publication number
DE69609244D1
DE69609244D1 DE69609244T DE69609244T DE69609244D1 DE 69609244 D1 DE69609244 D1 DE 69609244D1 DE 69609244 T DE69609244 T DE 69609244T DE 69609244 T DE69609244 T DE 69609244T DE 69609244 D1 DE69609244 D1 DE 69609244D1
Authority
DE
Germany
Prior art keywords
diamond
coatings
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69609244T
Other languages
English (en)
Other versions
DE69609244T2 (de
Inventor
Wolfgang Neuberger
Denis Dowling
Kevin Donnely
Thomas Kelly
Terence O'brien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ceramoptec GmbH
Original Assignee
Ceramoptec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceramoptec GmbH filed Critical Ceramoptec GmbH
Publication of DE69609244D1 publication Critical patent/DE69609244D1/de
Application granted granted Critical
Publication of DE69609244T2 publication Critical patent/DE69609244T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/12—General methods of coating; Devices therefor
    • C03C25/22—Deposition from the vapour phase
    • C03C25/223—Deposition from the vapour phase by chemical vapour deposition or pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/104—Coating to obtain optical fibres
    • C03C25/106—Single coatings
    • C03C25/1061—Inorganic coatings
    • C03C25/1062—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/106—Utilizing plasma, e.g. corona, glow discharge, cold plasma
DE69609244T 1995-03-31 1996-03-25 Verfahren zur Herstellung diamantartiger Beschichtungen Expired - Fee Related DE69609244T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US41491395A 1995-03-31 1995-03-31

Publications (2)

Publication Number Publication Date
DE69609244D1 true DE69609244D1 (de) 2000-08-17
DE69609244T2 DE69609244T2 (de) 2001-03-08

Family

ID=23643545

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609244T Expired - Fee Related DE69609244T2 (de) 1995-03-31 1996-03-25 Verfahren zur Herstellung diamantartiger Beschichtungen

Country Status (3)

Country Link
US (1) US5965216A (de)
EP (1) EP0743375B1 (de)
DE (1) DE69609244T2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000064047A (ja) * 1998-06-26 2000-02-29 James A Mclaughlin ダイヤモンド様炭素（ｄｌｃ）又は他の真空蒸着被膜を基体に被覆する装置及び方法
US6447891B1 (en) 1999-05-03 2002-09-10 Guardian Industries Corp. Low-E coating system including protective DLC
US6280834B1 (en) 1999-05-03 2001-08-28 Guardian Industries Corporation Hydrophobic coating including DLC and/or FAS on substrate
US6368664B1 (en) 1999-05-03 2002-04-09 Guardian Industries Corp. Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon
US6277480B1 (en) 1999-05-03 2001-08-21 Guardian Industries Corporation Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method
US6461731B1 (en) 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
US6261693B1 (en) 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6338901B1 (en) 1999-05-03 2002-01-15 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6312808B1 (en) 1999-05-03 2001-11-06 Guardian Industries Corporation Hydrophobic coating with DLC & FAS on substrate
US6335086B1 (en) 1999-05-03 2002-01-01 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6475573B1 (en) 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
NL1013332C2 (nl) * 1999-10-18 2001-04-19 Grasso Products B V Asafdichting voor een pomp of compressor, in het bijzonder voor gebruik in compressoren voor koelinrichtingen.
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6795636B1 (en) * 2000-03-05 2004-09-21 3M Innovative Properties Company Radiation-transmissive films on glass articles
US6569580B2 (en) 2001-03-13 2003-05-27 Diverging Technologies, Inc. Binary and phase-shift photomasks
US7106939B2 (en) 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
GB0205959D0 (en) * 2002-03-14 2002-04-24 Teer Coatings Ltd Apparatus and method for applying diamond-like carbon coatings
US20040146262A1 (en) * 2003-01-23 2004-07-29 3M Innovative Properties Company Frozen-fluid fiber guide
US7387081B2 (en) * 2003-01-23 2008-06-17 3M Innovative Properties Company Plasma reactor including helical electrodes
US7306778B2 (en) * 2003-06-19 2007-12-11 Nanotech Llc Diamond films and methods of making diamond films
CN100387752C (zh) * 2005-10-14 2008-05-14 南京航空航天大学 连续批量制备金刚石膜的制备系统
US7718044B2 (en) 2006-09-11 2010-05-18 Seagate Technology Llc Method for controlling shaft coating taper
US7998881B1 (en) 2008-06-06 2011-08-16 Novellus Systems, Inc. Method for making high stress boron-doped carbon films
US7906817B1 (en) * 2008-06-06 2011-03-15 Novellus Systems, Inc. High compressive stress carbon liners for MOS devices
EP2138471A1 (de) * 2008-06-25 2009-12-30 Acreo AB Ablagerung einer atomaren Schicht aus Wasserstoffdämmbeschichtungen auf Glasfasern
WO2010120813A2 (en) * 2009-04-13 2010-10-21 Applied Materials, Inc. Composite materials containing metallized carbon nanotubes and nanofibers
US8288292B2 (en) 2010-03-30 2012-10-16 Novellus Systems, Inc. Depositing conformal boron nitride film by CVD without plasma
CN102627413B (zh) * 2012-05-10 2013-12-11 兰州大学 微波辅助类金刚石薄膜包覆玻璃纤维的复合纤维制备方法
CN110863188A (zh) * 2019-12-03 2020-03-06 中国建筑材料科学研究总院有限公司 类石墨含氢碳膜、制备方法及光学薄膜

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2105371B (en) * 1981-08-18 1985-10-02 Secr Defence Carbon deposited on fibre by glow discharge method
US4663183A (en) * 1984-09-10 1987-05-05 Energy Conversion Devices, Inc. Glow discharge method of applying a carbon coating onto a substrate
JPH0660412B2 (ja) * 1986-08-21 1994-08-10 東京瓦斯株式会社 薄膜形成法
KR0145302B1 (ko) * 1988-04-28 1998-08-17 카자마 젠쥬 얇은 막의 형성방법
JPH0721858B2 (ja) * 1989-12-11 1995-03-08 松下電器産業株式会社 磁気記録媒体およびその製造方法
JP3059227B2 (ja) * 1991-02-01 2000-07-04 住友電気工業株式会社 ハーメチックコートファイバの製造方法
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma
US5431963A (en) * 1993-02-01 1995-07-11 General Electric Company Method for adhering diamondlike carbon to a substrate
KR0136632B1 (ko) * 1994-07-26 1998-05-15 김은영 다이아몬드상 경질 카본 필름이 이중 코팅된 vtr 헤드 드럼과 그 코팅층 형성방법 및 장치

Also Published As

Publication number Publication date
EP0743375A3 (de) 1997-05-21
US5965216A (en) 1999-10-12
EP0743375A2 (de) 1996-11-20
EP0743375B1 (de) 2000-07-12
DE69609244T2 (de) 2001-03-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee