DE69609074D1 - Fraktionierung von phenol-formaldehyd-kondensaten und die hergestellte fotoresistzusammensetzungen - Google Patents
Fraktionierung von phenol-formaldehyd-kondensaten und die hergestellte fotoresistzusammensetzungenInfo
- Publication number
- DE69609074D1 DE69609074D1 DE69609074T DE69609074T DE69609074D1 DE 69609074 D1 DE69609074 D1 DE 69609074D1 DE 69609074 T DE69609074 T DE 69609074T DE 69609074 T DE69609074 T DE 69609074T DE 69609074 D1 DE69609074 D1 DE 69609074D1
- Authority
- DE
- Germany
- Prior art keywords
- fractionation
- photo resist
- phenol formaldehyde
- resist compositions
- formaldehyde condensates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/530,648 US5693749A (en) | 1995-09-20 | 1995-09-20 | Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom |
PCT/US1996/014948 WO1997011101A1 (en) | 1995-09-20 | 1996-09-18 | Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69609074D1 true DE69609074D1 (de) | 2000-08-03 |
DE69609074T2 DE69609074T2 (de) | 2001-03-08 |
Family
ID=24114425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69609074T Expired - Fee Related DE69609074T2 (de) | 1995-09-20 | 1996-09-18 | Fraktionierung von phenol-formaldehyd-kondensaten und die hergestellte fotoresistzusammensetzungen |
Country Status (9)
Country | Link |
---|---|
US (1) | US5693749A (de) |
EP (1) | EP0851880B1 (de) |
JP (1) | JPH11512833A (de) |
KR (1) | KR100412531B1 (de) |
CN (2) | CN1105129C (de) |
DE (1) | DE69609074T2 (de) |
HK (1) | HK1054269A1 (de) |
TW (1) | TW397935B (de) |
WO (1) | WO1997011101A1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5739265A (en) * | 1995-09-20 | 1998-04-14 | Clariant Finance (Bvi) Ltd. | Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom |
TW475099B (en) * | 1996-12-18 | 2002-02-01 | Hoechst Celanese Corp | Isolation of novolak resin without high temperature distillation and photoresist composition therefrom |
US6297352B1 (en) * | 1998-11-12 | 2001-10-02 | Clariant Finance (Bvi) Limited | Method of reducing metal ion content of film-forming resins using a liquid/liquid centrifuge |
US6121412A (en) * | 1998-11-12 | 2000-09-19 | Clariant Finance (Bvi) Limited | Preparation of fractionated novolak resins by a novel extraction technique |
US6506831B2 (en) | 1998-12-20 | 2003-01-14 | Honeywell International Inc. | Novolac polymer planarization films with high temperature stability |
KR100594815B1 (ko) * | 1999-12-24 | 2006-07-03 | 삼성전자주식회사 | 포토레지스트 린스용 씬너 및 이를 이용한 포토레지스트막의 처리 방법 |
JP3894001B2 (ja) * | 2001-09-06 | 2007-03-14 | 住友化学株式会社 | 化学増幅型ポジ型レジスト組成物 |
DE60317651T2 (de) * | 2002-04-01 | 2008-03-06 | Daicel Chemical Industries, Ltd., Sakai | Verfahren zur herstellung von fotolackpolymerverbindungen |
JP5541766B2 (ja) * | 2009-05-19 | 2014-07-09 | 株式会社ダイセル | フォトレジスト用高分子化合物の製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE938233C (de) * | 1953-03-11 | 1956-01-26 | Kalle & Co Ag | Lichtempfindliches Material fuer die photomechanische Herstellung von Druckformen |
US4033909A (en) * | 1974-08-13 | 1977-07-05 | Union Carbide Corporation | Stable phenolic resoles |
GB1509354A (en) * | 1976-04-24 | 1978-05-04 | Maruzen Oil Co Ltd | Process for purifying halogenated alkenyl-phenol polymers |
JPS61185741A (ja) * | 1985-02-13 | 1986-08-19 | Mitsubishi Chem Ind Ltd | ポジ型フオトレジスト組成物 |
US4784937A (en) * | 1985-08-06 | 1988-11-15 | Tokyo Ohka Kogyo Co., Ltd. | Developing solution for positive-working photoresist comprising a metal ion free organic base and an anionic surfactant |
GB8729510D0 (en) * | 1987-12-18 | 1988-02-03 | Ucb Sa | Photosensitive compositions containing phenolic resins & diazoquinone compounds |
DE3923426A1 (de) * | 1989-07-15 | 1991-01-17 | Hoechst Ag | Verfahren zur herstellung von novolak-harzen mit geringem metallionengehalt |
US5378802A (en) * | 1991-09-03 | 1995-01-03 | Ocg Microelectronic Materials, Inc. | Method for removing impurities from resist components and novolak resins |
JPH0768297B2 (ja) * | 1991-11-28 | 1995-07-26 | 丸善石油化学株式会社 | フォトレジスト用ビニルフェノール系重合体の精製方法 |
SG48902A1 (en) * | 1991-12-18 | 1998-05-18 | Hoechst Celanese Corp | Metal ion reduction in novolak resins |
KR100242920B1 (ko) * | 1992-03-06 | 2000-03-02 | 잰대머 | 저수준의 금속이온을 갖는 포토레지스트(rhotoresists having a low level of metal ions) |
US5286606A (en) * | 1992-12-29 | 1994-02-15 | Hoechst Celanese Corporation | Process for producing a developer having a low metal ion level |
US5476750A (en) * | 1992-12-29 | 1995-12-19 | Hoechst Celanese Corporation | Metal ion reduction in the raw materials and using a Lewis base to control molecular weight of novolak resin to be used in positive photoresists |
US5350714A (en) * | 1993-11-08 | 1994-09-27 | Shipley Company Inc. | Point-of-use purification |
US5500127A (en) * | 1994-03-14 | 1996-03-19 | Rohm And Haas Company | Purification process |
US5521052A (en) * | 1994-12-30 | 1996-05-28 | Hoechst Celanese Corporation | Metal ion reduction in novolak resin using an ion exchange catalyst in a polar solvent and photoresists compositions therefrom |
-
1995
- 1995-09-20 US US08/530,648 patent/US5693749A/en not_active Expired - Fee Related
-
1996
- 1996-08-30 TW TW085110592A patent/TW397935B/zh not_active IP Right Cessation
- 1996-09-18 WO PCT/US1996/014948 patent/WO1997011101A1/en active IP Right Grant
- 1996-09-18 CN CN96197087A patent/CN1105129C/zh not_active Expired - Fee Related
- 1996-09-18 CN CNB021428379A patent/CN1189791C/zh not_active Expired - Fee Related
- 1996-09-18 DE DE69609074T patent/DE69609074T2/de not_active Expired - Fee Related
- 1996-09-18 KR KR10-1998-0701998A patent/KR100412531B1/ko not_active IP Right Cessation
- 1996-09-18 EP EP96933044A patent/EP0851880B1/de not_active Expired - Lifetime
- 1996-09-18 JP JP9512856A patent/JPH11512833A/ja not_active Ceased
-
2003
- 2003-09-11 HK HK03106510.5A patent/HK1054269A1/zh unknown
Also Published As
Publication number | Publication date |
---|---|
US5693749A (en) | 1997-12-02 |
CN1196736A (zh) | 1998-10-21 |
KR100412531B1 (ko) | 2004-04-28 |
WO1997011101A1 (en) | 1997-03-27 |
DE69609074T2 (de) | 2001-03-08 |
EP0851880B1 (de) | 2000-06-28 |
CN1189791C (zh) | 2005-02-16 |
CN1105129C (zh) | 2003-04-09 |
HK1054269A1 (zh) | 2003-11-21 |
KR19990045754A (ko) | 1999-06-25 |
JPH11512833A (ja) | 1999-11-02 |
EP0851880A1 (de) | 1998-07-08 |
CN1432870A (zh) | 2003-07-30 |
TW397935B (en) | 2000-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AZ ELECTRONIC MATERIALS USA CORP. (N.D.GES.D. STAA |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: PATENTANWAELTE ISENBRUCK BOESL HOERSCHLER WICHMANN HU |
|
8339 | Ceased/non-payment of the annual fee |