DE69606141D1 - Gasrückgewinnungsvorrichtung - Google Patents
GasrückgewinnungsvorrichtungInfo
- Publication number
- DE69606141D1 DE69606141D1 DE69606141T DE69606141T DE69606141D1 DE 69606141 D1 DE69606141 D1 DE 69606141D1 DE 69606141 T DE69606141 T DE 69606141T DE 69606141 T DE69606141 T DE 69606141T DE 69606141 D1 DE69606141 D1 DE 69606141D1
- Authority
- DE
- Germany
- Prior art keywords
- recovery device
- gas recovery
- gas
- recovery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Analytical Chemistry (AREA)
- Treating Waste Gases (AREA)
- Chemical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7287143A JPH09129561A (ja) | 1995-11-06 | 1995-11-06 | ガス回収装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69606141D1 true DE69606141D1 (de) | 2000-02-17 |
DE69606141T2 DE69606141T2 (de) | 2000-08-24 |
Family
ID=17713634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69606141T Expired - Fee Related DE69606141T2 (de) | 1995-11-06 | 1996-11-05 | Gasrückgewinnungsvorrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5958138A (de) |
EP (1) | EP0771887B1 (de) |
JP (1) | JPH09129561A (de) |
DE (1) | DE69606141T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5766683A (en) * | 1996-11-12 | 1998-06-16 | New American Tec | Nickel deposition system with a vapor recovery system |
JP4159004B2 (ja) * | 1997-06-13 | 2008-10-01 | 財団法人国際科学振興財団 | ガス回収方法 |
US6257018B1 (en) * | 1999-06-28 | 2001-07-10 | Praxair Technology, Inc. | PFC recovery using condensation |
JP4246343B2 (ja) * | 2000-01-06 | 2009-04-02 | 株式会社荏原製作所 | ガス雰囲気形成装置及びガス雰囲気形成方法 |
US6383257B1 (en) * | 2000-04-04 | 2002-05-07 | Air Products And Chemicals, Inc. | Reclamation and separation of perfluorocarbons using condensation |
GB2363129A (en) * | 2000-05-04 | 2001-12-12 | Boc Group Plc | Gas supply method and apparatus |
US6737361B2 (en) | 2001-04-06 | 2004-05-18 | Wafermaster, Inc | Method for H2 Recycling in semiconductor processing system |
US8475966B2 (en) | 2003-09-25 | 2013-07-02 | IES Consulting, Inc. | Apparatus and method of recovering vapors |
US7762082B1 (en) * | 2003-09-25 | 2010-07-27 | IES Consulting Inc. | Apparatus and method of recovering vapors |
US20050250347A1 (en) * | 2003-12-31 | 2005-11-10 | Bailey Christopher M | Method and apparatus for maintaining by-product volatility in deposition process |
JP4659820B2 (ja) * | 2005-03-07 | 2011-03-30 | シャープ株式会社 | プラズマ処理装置およびそれを用いた半導体薄膜の製造方法 |
GB0505674D0 (en) * | 2005-03-22 | 2005-04-27 | Boc Group Plc | Trap device |
GB0618016D0 (en) * | 2006-09-13 | 2006-10-18 | Boc Group Plc | Method of recycling hydrogen |
KR20080029497A (ko) * | 2006-09-29 | 2008-04-03 | 삼성전자주식회사 | 플라즈마 공정 장비와 이를 이용한 기판 가공 방법 |
FR2933714B1 (fr) * | 2008-07-11 | 2011-05-06 | Air Liquide | Procede de recyclage de silane (sih4) |
EP2332177A4 (de) * | 2008-09-29 | 2012-12-26 | Thinsilicon Corp | Monolithisch integriertes solarmodul |
EP2356673A4 (de) * | 2008-12-10 | 2012-06-06 | Thinsilicon Corp | System und method zum recycling eines zur ablagerung einer halbleiterschicht verwendeten gases |
US8241379B2 (en) * | 2009-04-16 | 2012-08-14 | PTG Industries, LLC | Natural gas reclaimer device |
US8728240B2 (en) | 2012-05-02 | 2014-05-20 | Msp Corporation | Apparatus for vapor condensation and recovery |
NL2010809C2 (nl) * | 2013-05-16 | 2014-11-24 | Smit Ovens Bv | Inrichting en werkwijze voor het aanbrengen van een materiaal op een substraat. |
JP6201496B2 (ja) | 2013-08-02 | 2017-09-27 | セントラル硝子株式会社 | If7由来フッ化ヨウ素化合物の回収方法及び回収装置 |
US10443127B2 (en) * | 2013-11-05 | 2019-10-15 | Taiwan Semiconductor Manufacturing Company Limited | System and method for supplying a precursor for an atomic layer deposition (ALD) process |
CN103611386B (zh) * | 2013-11-07 | 2015-10-21 | 同济大学 | 一种控制生产过程物料损失和减少污染气体排放的方法 |
CN105169878A (zh) * | 2015-09-15 | 2015-12-23 | 蚌埠高科能源装备有限公司 | 一种新型的冷却分离装置 |
CN113800484A (zh) * | 2021-09-24 | 2021-12-17 | 中船重工(邯郸)派瑞特种气体有限公司 | 一种放空尾气中三氟化氮气体的回收设备和回收方法 |
KR102588509B1 (ko) * | 2022-12-09 | 2023-10-13 | 크라이오에이치앤아이(주) | 초저온 냉동기를 이용하여 반도체 장비에서 이용되는 공정 가스를 처리하는 공정 가스 처리 장치 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3207065C2 (de) * | 1982-02-26 | 1985-08-22 | Gosudarstvennyj naučno-issledovatel'skij i proektnyj institut redkometalličeskoj promyšlennosti GIREDMET, Moskva | Verfahren zur Regenerierung von nichtumgesetzten Chlorsilanen und nichtumgesetztem Wasserstoff bei der Herstellung von polykristallinem Halbleitersilizium |
JPS58209113A (ja) * | 1982-05-31 | 1983-12-06 | Semiconductor Energy Lab Co Ltd | 半導体用反応性気体精製方法 |
NL8402636A (nl) * | 1984-08-30 | 1986-03-17 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting waarbij een halfgeleidersubstraat wordt onderworpen aan een behandeling in een reaktiegas. |
US5118485A (en) * | 1988-03-25 | 1992-06-02 | Hemlock Semiconductor Corporation | Recovery of lower-boiling silanes in a cvd process |
US5250323A (en) * | 1989-10-30 | 1993-10-05 | Kabushiki Kaisha Toshiba | Chemical vapor growth apparatus having an exhaust device including trap |
JPH08507575A (ja) * | 1993-08-17 | 1996-08-13 | アクツィオネルノエ オブシュストボ “ルッスコエ オブシュストボ プリクラドノイ エレクトロニキ” | 炭化ケイ素層の製造方法とその物品 |
US5426945A (en) * | 1994-02-04 | 1995-06-27 | Jordan Holding Company | Process and apparatus for recovering vapor |
-
1995
- 1995-11-06 JP JP7287143A patent/JPH09129561A/ja active Pending
-
1996
- 1996-11-05 US US08/743,188 patent/US5958138A/en not_active Expired - Fee Related
- 1996-11-05 DE DE69606141T patent/DE69606141T2/de not_active Expired - Fee Related
- 1996-11-05 EP EP96402344A patent/EP0771887B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0771887A1 (de) | 1997-05-07 |
DE69606141T2 (de) | 2000-08-24 |
JPH09129561A (ja) | 1997-05-16 |
EP0771887B1 (de) | 2000-01-12 |
US5958138A (en) | 1999-09-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |