DE69603079D1 - Vorrichtung zum materialbeschichten grossflächiger substrate - Google Patents

Vorrichtung zum materialbeschichten grossflächiger substrate

Info

Publication number
DE69603079D1
DE69603079D1 DE69603079T DE69603079T DE69603079D1 DE 69603079 D1 DE69603079 D1 DE 69603079D1 DE 69603079 T DE69603079 T DE 69603079T DE 69603079 T DE69603079 T DE 69603079T DE 69603079 D1 DE69603079 D1 DE 69603079D1
Authority
DE
Germany
Prior art keywords
large area
material coating
area substrates
substrates
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69603079T
Other languages
English (en)
Other versions
DE69603079T2 (de
Inventor
Michel Ida
Aime Perrin
Michel Borel
Raymond Charles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69603079D1 publication Critical patent/DE69603079D1/de
Application granted granted Critical
Publication of DE69603079T2 publication Critical patent/DE69603079T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
DE69603079T 1995-04-24 1996-04-23 Vorrichtung zum materialbeschichten grossflächiger substrate Expired - Lifetime DE69603079T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9504873A FR2733253B1 (fr) 1995-04-24 1995-04-24 Dispositif pour deposer un materiau par evaporation sur des substrats de grande surface
PCT/FR1996/000616 WO1996034123A1 (fr) 1995-04-24 1996-04-23 Dispositif pour deposer un materiau par evaporation sur des substrats de grande surface

Publications (2)

Publication Number Publication Date
DE69603079D1 true DE69603079D1 (de) 1999-08-05
DE69603079T2 DE69603079T2 (de) 2000-03-16

Family

ID=9478388

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69603079T Expired - Lifetime DE69603079T2 (de) 1995-04-24 1996-04-23 Vorrichtung zum materialbeschichten grossflächiger substrate

Country Status (6)

Country Link
US (1) US6509061B1 (de)
EP (1) EP0824603B1 (de)
JP (1) JP4072570B2 (de)
DE (1) DE69603079T2 (de)
FR (1) FR2733253B1 (de)
WO (1) WO1996034123A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2185640A1 (en) * 1995-11-30 1997-05-31 Russell J. Hill Electron beam evaporation apparatus and method
US6592675B2 (en) * 2001-08-09 2003-07-15 Moore Epitaxial, Inc. Rotating susceptor
CN100479082C (zh) * 2003-04-04 2009-04-15 松下电器产业株式会社 等离子体显示面板的制造方法
KR100637180B1 (ko) * 2004-11-05 2006-10-23 삼성에스디아이 주식회사 증착 방법 및 이를 위한 증착 장치
US20100247747A1 (en) * 2009-03-27 2010-09-30 Semiconductor Energy Laboratory Co., Ltd. Film Deposition Apparatus, Method for Depositing Film, and Method for Manufacturing Lighting Device
CA2757872C (en) * 2009-04-28 2019-03-26 Ferrotec (Usa) Corporation Lift-off deposition system featuring a density optimized hula substrate holder in a conical deposition chamber
KR20120138305A (ko) * 2011-06-14 2012-12-26 삼성디스플레이 주식회사 유기 박막 증착 시스템 및 유기 박막 증착 방법
JP2013137379A (ja) * 2011-12-28 2013-07-11 Dainippon Printing Co Ltd フレネルレンズシートに対する蒸着方法、反射スクリーンの製造方法
HK1215127A2 (zh) 2015-06-17 2016-08-12 Master Dynamic Ltd 製品塗層的設備、儀器和工藝
CN105088145B (zh) * 2015-08-19 2017-03-29 京东方科技集团股份有限公司 用于oled蒸发源的坩埚及其制造方法
JP2017173742A (ja) * 2016-03-25 2017-09-28 大日本印刷株式会社 偏光子の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244557A (en) * 1963-09-19 1966-04-05 Ibm Process of vapor depositing and annealing vapor deposited layers of tin-germanium and indium-germanium metastable solid solutions
US3853091A (en) * 1973-12-03 1974-12-10 Ibm Thin film coating apparatus
US4681773A (en) * 1981-03-27 1987-07-21 American Telephone And Telegraph Company At&T Bell Laboratories Apparatus for simultaneous molecular beam deposition on a plurality of substrates
US4646680A (en) * 1985-12-23 1987-03-03 General Electric Company Crucible for use in molecular beam epitaxial processing
FR2593953B1 (fr) 1986-01-24 1988-04-29 Commissariat Energie Atomique Procede de fabrication d'un dispositif de visualisation par cathodoluminescence excitee par emission de champ
JPH0745711B2 (ja) * 1987-12-10 1995-05-17 株式会社日立製作所 高指向性蒸着装置
US5133286A (en) * 1989-04-14 1992-07-28 Samsung Electro-Mechanics Co., Ltd. Substrate-heating device and boat structure for a vacuum-depositing apparatus
JPH03134164A (ja) * 1989-10-18 1991-06-07 Ricoh Co Ltd 薄膜形成装置及びこの装置を用いた超伝導薄膜形成方法
FR2663462B1 (fr) 1990-06-13 1992-09-11 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes.
DE4025659A1 (de) * 1990-08-14 1992-02-20 Leybold Ag Umlaufraedergetriebe mit einem raedersatz, insbesondere fuer vorrichtungen zum beschichten von substraten
JPH04285157A (ja) * 1991-03-12 1992-10-09 Hitachi Ltd 金属の蒸発方法
DE4123342C2 (de) * 1991-07-15 1999-08-19 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
JP3134164B2 (ja) 1991-07-31 2001-02-13 京セラ株式会社 留守番電話機の録音再生方式
US5334302A (en) * 1991-11-15 1994-08-02 Tokyo Electron Limited Magnetron sputtering apparatus and sputtering gun for use in the same
US5344352A (en) * 1992-04-02 1994-09-06 U.S. Philips Corporation Method of manufacturing a pointed electrode, and device for using said method
US5584739A (en) * 1993-02-10 1996-12-17 Futaba Denshi Kogyo K.K Field emission element and process for manufacturing same
US5518548A (en) * 1995-08-03 1996-05-21 Honeywell Inc. Deposition barrier

Also Published As

Publication number Publication date
FR2733253B1 (fr) 1997-06-13
US6509061B1 (en) 2003-01-21
JPH11504077A (ja) 1999-04-06
FR2733253A1 (fr) 1996-10-25
WO1996034123A1 (fr) 1996-10-31
EP0824603A1 (de) 1998-02-25
EP0824603B1 (de) 1999-06-30
DE69603079T2 (de) 2000-03-16
JP4072570B2 (ja) 2008-04-09

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Legal Events

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8364 No opposition during term of opposition