DE69530834D1 - Oberflächenwellenvorrichtung und produktionsverfahren dafür - Google Patents

Oberflächenwellenvorrichtung und produktionsverfahren dafür

Info

Publication number
DE69530834D1
DE69530834D1 DE69530834T DE69530834T DE69530834D1 DE 69530834 D1 DE69530834 D1 DE 69530834D1 DE 69530834 T DE69530834 T DE 69530834T DE 69530834 T DE69530834 T DE 69530834T DE 69530834 D1 DE69530834 D1 DE 69530834D1
Authority
DE
Germany
Prior art keywords
production method
method therefor
shaft device
surface shaft
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530834T
Other languages
English (en)
Other versions
DE69530834T2 (de
Inventor
Yukio Ohkubo
Takahiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority claimed from PCT/JP1995/001554 external-priority patent/WO1996004713A1/ja
Application granted granted Critical
Publication of DE69530834D1 publication Critical patent/DE69530834D1/de
Publication of DE69530834T2 publication Critical patent/DE69530834T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02236—Details of surface skimming bulk wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE69530834T 1994-10-20 1995-08-04 Oberflächenwellenvorrichtung und produktionsverfahren dafür Expired - Lifetime DE69530834T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP27973894 1994-10-20
JP27973894 1994-10-20
JP27973794 1994-10-20
JP27973794 1994-10-20
PCT/JP1995/001554 WO1996004713A1 (fr) 1994-08-05 1995-08-04 Dispositif a ondes acoustiques de surface et procede de production

Publications (2)

Publication Number Publication Date
DE69530834D1 true DE69530834D1 (de) 2003-06-26
DE69530834T2 DE69530834T2 (de) 2004-03-11

Family

ID=26553467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530834T Expired - Lifetime DE69530834T2 (de) 1994-10-20 1995-08-04 Oberflächenwellenvorrichtung und produktionsverfahren dafür

Country Status (3)

Country Link
EP (1) EP0744830B1 (de)
JP (1) JP3461834B2 (de)
DE (1) DE69530834T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7538636B2 (en) 2002-12-25 2009-05-26 Panasonic Corporation Electronic part with a comb electrode and protective film and electronic equipment including same
JP2005176152A (ja) * 2003-12-15 2005-06-30 Alps Electric Co Ltd 弾性表面波素子及びその製造方法
EP1990915B1 (de) 2006-03-02 2017-11-01 Murata Manufacturing Co., Ltd. Oberflächenwellenanordnung und verfahren zu ihrer herstellung
WO2012137027A1 (en) * 2011-04-07 2012-10-11 Gvr Trade Sa Surface acoustic wave resonator
CN112436816B (zh) * 2020-12-03 2024-04-09 广东广纳芯科技有限公司 温度补偿型声表面波器件及其制造方法
CN114531133B (zh) * 2022-04-22 2022-07-15 深圳新声半导体有限公司 一种体声波滤波器芯片封装方法和封装结构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116317A (en) * 1980-02-19 1981-09-12 Matsushita Electric Ind Co Ltd Material for elastic surface wave
JPS6090412A (ja) * 1983-10-24 1985-05-21 Pioneer Electronic Corp 弾性表面波素子
JPH03278605A (ja) * 1990-03-28 1991-12-10 Hitachi Ltd 弾性表面波装置およびその製造方法
JP3140767B2 (ja) * 1990-10-23 2001-03-05 キンセキ株式会社 弾性表面波素子の製造方法
JP3244094B2 (ja) * 1992-03-13 2002-01-07 キンセキ株式会社 弾性表面波装置

Also Published As

Publication number Publication date
EP0744830A4 (de) 1999-02-03
DE69530834T2 (de) 2004-03-11
EP0744830A1 (de) 1996-11-27
JP3461834B2 (ja) 2003-10-27
EP0744830B1 (de) 2003-05-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition