DE69523475T2 - Mikromechanischer beschleunigungsmesser - Google Patents

Mikromechanischer beschleunigungsmesser

Info

Publication number
DE69523475T2
DE69523475T2 DE69523475T DE69523475T DE69523475T2 DE 69523475 T2 DE69523475 T2 DE 69523475T2 DE 69523475 T DE69523475 T DE 69523475T DE 69523475 T DE69523475 T DE 69523475T DE 69523475 T2 DE69523475 T2 DE 69523475T2
Authority
DE
Germany
Prior art keywords
micromechanical
accelerator
micromechanical accelerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69523475T
Other languages
English (en)
Other versions
DE69523475D1 (de
Inventor
Frank Moore
Clyde Burgess
Heather Klaubert
Hiang-Swee Chiang
Narito Shibaike
Takashi Kiriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KIRIYAMA, TAKASHI, SAN FRANCISCO, CALIF., US
Cambridge University Technical Services Ltd CUTS
Panasonic Corp
Original Assignee
Cambridge University Technical Services Ltd CUTS
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge University Technical Services Ltd CUTS, Matsushita Electric Industrial Co Ltd filed Critical Cambridge University Technical Services Ltd CUTS
Publication of DE69523475D1 publication Critical patent/DE69523475D1/de
Application granted granted Critical
Publication of DE69523475T2 publication Critical patent/DE69523475T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0894—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by non-contact electron transfer, i.e. electron tunneling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
DE69523475T 1994-12-29 1995-12-22 Mikromechanischer beschleunigungsmesser Expired - Fee Related DE69523475T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9426363.9A GB9426363D0 (en) 1994-12-29 1994-12-29 A micromechanical accelerometer
PCT/GB1995/003018 WO1996021157A1 (en) 1994-12-29 1995-12-22 A micromechanical accelerometer

Publications (2)

Publication Number Publication Date
DE69523475D1 DE69523475D1 (de) 2001-11-29
DE69523475T2 true DE69523475T2 (de) 2002-06-20

Family

ID=10766688

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69523475T Expired - Fee Related DE69523475T2 (de) 1994-12-29 1995-12-22 Mikromechanischer beschleunigungsmesser

Country Status (6)

Country Link
US (1) US5939632A (de)
EP (1) EP0800651B1 (de)
JP (1) JP3654905B2 (de)
DE (1) DE69523475T2 (de)
GB (1) GB9426363D0 (de)
WO (1) WO1996021157A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1249398C (zh) 1998-09-07 2006-04-05 坤特精密仪器有限公司 采用细长导电体之间的隧道效应电流的测量方法
AU762017C (en) * 1998-09-07 2004-02-05 Quantum Precision Instruments Asia Pte Ltd Measurements using tunnelling current between elongate conductors
PT1943527T (pt) * 2005-11-04 2017-10-03 Mc-Monitoring S A Acelerómetro para a medição de vibrações com sensor ótico
US20070247613A1 (en) * 2006-04-24 2007-10-25 Mathieu Cloutier Fiber optic accelerometer
US8277119B2 (en) * 2006-12-19 2012-10-02 Vibrosystm, Inc. Fiber optic temperature sensor
US8544324B2 (en) * 2007-08-24 2013-10-01 Pilsne Research Co., L.L.C. Quantum tunnelling sensor device and method
US9422944B2 (en) * 2014-08-15 2016-08-23 Dell Products, Lp Carbon fiber laminate piezoelectric cooler and method therefor
DE112016002627T5 (de) * 2015-06-11 2018-02-22 Georgia Tech Research Corporation MEMS-Trägheitsmessvorrichtung mit geneigten Elektroden zur Abstimmung der Quadratur
JP7225817B2 (ja) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 角速度センサー、慣性計測装置、電子機器および移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4342227A (en) * 1980-12-24 1982-08-03 International Business Machines Corporation Planar semiconductor three direction acceleration detecting device and method of fabrication
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
US4999735A (en) * 1990-03-08 1991-03-12 Allied-Signal Inc. Differential capacitive transducer and method of making
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
EP0616221B1 (de) * 1993-03-19 1998-11-25 Murata Manufacturing Co., Ltd. Beschleunigungsmessaufnehmer
DE59402799D1 (de) * 1993-04-05 1997-06-26 Siemens Ag Tunneleffekt-Beschleunigungssensor
US5911157A (en) * 1994-01-18 1999-06-08 Siemens Aktiengesellschaft Tunnel effect sensor

Also Published As

Publication number Publication date
JPH11500528A (ja) 1999-01-12
EP0800651B1 (de) 2001-10-24
GB9426363D0 (en) 1995-03-01
JP3654905B2 (ja) 2005-06-02
DE69523475D1 (de) 2001-11-29
US5939632A (en) 1999-08-17
WO1996021157A1 (en) 1996-07-11
EP0800651A1 (de) 1997-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CAMBRIDGE UNIVERSITY TECHNICAL SERVICES LTD., , GB

Owner name: KIRIYAMA, TAKASHI, SAN FRANCISCO, CALIF., US

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8339 Ceased/non-payment of the annual fee