DE69522747D1 - Akustische Oberflächenwellenanordnung von Diamant-LiTaO3 - Google Patents

Akustische Oberflächenwellenanordnung von Diamant-LiTaO3

Info

Publication number
DE69522747D1
DE69522747D1 DE69522747T DE69522747T DE69522747D1 DE 69522747 D1 DE69522747 D1 DE 69522747D1 DE 69522747 T DE69522747 T DE 69522747T DE 69522747 T DE69522747 T DE 69522747T DE 69522747 D1 DE69522747 D1 DE 69522747D1
Authority
DE
Germany
Prior art keywords
litao3
diamond
surface wave
acoustic surface
wave arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69522747T
Other languages
English (en)
Other versions
DE69522747T2 (de
Inventor
Hideaki Nakahata
Kenjiro Higaki
Satoshi Fujii
Akihiro Hachigo
Shin-Ichi Shikata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69522747D1 publication Critical patent/DE69522747D1/de
Publication of DE69522747T2 publication Critical patent/DE69522747T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02582—Characteristics of substrate, e.g. cutting angles of diamond substrates
DE69522747T 1994-06-16 1995-06-14 Akustische Oberflächenwellenanordnung von Diamant-LiTaO3 Expired - Lifetime DE69522747T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13451594 1994-06-16
JP21010594A JP3282645B2 (ja) 1994-06-16 1994-09-02 表面弾性波素子

Publications (2)

Publication Number Publication Date
DE69522747D1 true DE69522747D1 (de) 2001-10-25
DE69522747T2 DE69522747T2 (de) 2002-02-28

Family

ID=26468617

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522747T Expired - Lifetime DE69522747T2 (de) 1994-06-16 1995-06-14 Akustische Oberflächenwellenanordnung von Diamant-LiTaO3

Country Status (4)

Country Link
US (1) US5646468A (de)
EP (1) EP0688098B1 (de)
JP (1) JP3282645B2 (de)
DE (1) DE69522747T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3205978B2 (ja) * 1995-08-08 2001-09-04 住友電気工業株式会社 表面弾性波素子
US5783896A (en) * 1995-08-08 1998-07-21 Sumitomo Electric Industries, Ltd. Diamond-Zn0 surface acoustic wave device
US5959389A (en) * 1995-08-08 1999-09-28 Sumitomo Electronic Industries, Ltd. Diamond-ZnO surface acoustic wave device
RU2099857C1 (ru) * 1996-01-10 1997-12-20 Наталья Федоровна Науменко Высокочастотное устройство на поверхностных акустических волнах
JP3168961B2 (ja) * 1997-10-06 2001-05-21 住友電気工業株式会社 ダイヤモンド基板及びダイヤモンド基板の評価方法並びにダイヤモンド表面弾性波フィルタ
US6222299B1 (en) 1998-02-09 2001-04-24 Lucent Technologies Inc. Surface acoustic wave devices comprising large-grained diamonds and methods for making
US6097131A (en) * 1998-03-19 2000-08-01 Sawtek Inc. Optimal cut for SAW devices on langatate
US6416865B1 (en) * 1998-10-30 2002-07-09 Sumitomo Electric Industries, Ltd. Hard carbon film and surface acoustic-wave substrate
JP3717034B2 (ja) * 1998-11-10 2005-11-16 株式会社村田製作所 弾性表面波素子
JP3485831B2 (ja) * 1999-03-25 2004-01-13 三洋電機株式会社 弾性表面波デバイス
JP3485833B2 (ja) * 1999-03-25 2004-01-13 三洋電機株式会社 弾性表面波デバイス
JP3485832B2 (ja) * 1999-03-25 2004-01-13 三洋電機株式会社 弾性表面波デバイス
US6972508B2 (en) * 2000-04-28 2005-12-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP2002057549A (ja) * 2000-08-09 2002-02-22 Sumitomo Electric Ind Ltd 表面弾性波素子用基板及び表面弾性波素子
JP4092900B2 (ja) * 2000-11-22 2008-05-28 住友電気工業株式会社 圧電体薄膜を形成したダイヤモンド基板およびその製造方法
US6717327B2 (en) * 2001-04-23 2004-04-06 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP5045864B1 (ja) * 2011-03-16 2012-10-10 株式会社村田製作所 弾性波装置の製造方法
JP7037439B2 (ja) * 2018-05-31 2022-03-16 京セラ株式会社 弾性波素子、分波器および通信装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462911A (en) 1987-09-03 1989-03-09 Sumitomo Electric Industries Surface acoustic wave element
JP2885349B2 (ja) * 1989-12-26 1999-04-19 住友電気工業株式会社 表面弾性波素子
JPH04358410A (ja) * 1991-06-05 1992-12-11 Sumitomo Electric Ind Ltd 表面弾性波素子及びその製造方法
JP3170819B2 (ja) * 1991-09-24 2001-05-28 住友電気工業株式会社 表面弾性波素子
JP3225495B2 (ja) * 1992-02-21 2001-11-05 住友電気工業株式会社 表面弾性波素子及びその製造方法
JP3192502B2 (ja) 1992-10-23 2001-07-30 古河電気工業株式会社 内面溝付管加工装置
JPH06210105A (ja) 1993-01-14 1994-08-02 Japan Gore Tex Inc フレキシブル脱気用二重チューブ
JP3163606B2 (ja) * 1993-01-29 2001-05-08 住友電気工業株式会社 表面弾性波素子
JPH06326548A (ja) * 1993-05-14 1994-11-25 Kobe Steel Ltd 高配向性ダイヤモンド薄膜を使用した表面弾性波素子

Also Published As

Publication number Publication date
DE69522747T2 (de) 2002-02-28
EP0688098A1 (de) 1995-12-20
JPH0865088A (ja) 1996-03-08
JP3282645B2 (ja) 2002-05-20
US5646468A (en) 1997-07-08
EP0688098B1 (de) 2001-09-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: SEIKO EPSON CORP., TOKIO/TOKYO, JP

8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, SCHUMACHER, KNAUER, VON HIRSCHHAUSEN, 8033