DE69520865T2 - Pyrolytische Beschichtungstechnik von gasförmigen Ausgangsgemischen - Google Patents

Pyrolytische Beschichtungstechnik von gasförmigen Ausgangsgemischen

Info

Publication number
DE69520865T2
DE69520865T2 DE69520865T DE69520865T DE69520865T2 DE 69520865 T2 DE69520865 T2 DE 69520865T2 DE 69520865 T DE69520865 T DE 69520865T DE 69520865 T DE69520865 T DE 69520865T DE 69520865 T2 DE69520865 T2 DE 69520865T2
Authority
DE
Germany
Prior art keywords
coating technology
gaseous starting
starting mixtures
pyrolytic coating
pyrolytic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69520865T
Other languages
English (en)
Other versions
DE69520865D1 (de
Inventor
Jean-Francoisl Oudard
Patrice Jacquet
Pascal Crampon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Application granted granted Critical
Publication of DE69520865D1 publication Critical patent/DE69520865D1/de
Publication of DE69520865T2 publication Critical patent/DE69520865T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Chemically Coating (AREA)
DE69520865T 1994-09-27 1995-09-27 Pyrolytische Beschichtungstechnik von gasförmigen Ausgangsgemischen Expired - Fee Related DE69520865T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9411505A FR2724923B1 (fr) 1994-09-27 1994-09-27 Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s)

Publications (2)

Publication Number Publication Date
DE69520865D1 DE69520865D1 (de) 2001-06-13
DE69520865T2 true DE69520865T2 (de) 2002-01-17

Family

ID=9467306

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69520865T Expired - Fee Related DE69520865T2 (de) 1994-09-27 1995-09-27 Pyrolytische Beschichtungstechnik von gasförmigen Ausgangsgemischen

Country Status (7)

Country Link
US (1) US5704982A (de)
EP (1) EP0708062B1 (de)
JP (1) JP3946790B2 (de)
DE (1) DE69520865T2 (de)
ES (1) ES2158057T3 (de)
FR (1) FR2724923B1 (de)
PT (1) PT708062E (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008026001A1 (de) * 2007-09-04 2009-04-09 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6022414A (en) * 1994-07-18 2000-02-08 Semiconductor Equipment Group, Llc Single body injector and method for delivering gases to a surface
US6200389B1 (en) 1994-07-18 2001-03-13 Silicon Valley Group Thermal Systems Llc Single body injector and deposition chamber
JP2000297375A (ja) * 1999-04-09 2000-10-24 Hoya Corp 炭化珪素膜の製造方法及び製造装置、並びにｘ線マスクの製造方法
US6808741B1 (en) * 2001-10-26 2004-10-26 Seagate Technology Llc In-line, pass-by method for vapor lubrication
US7041171B2 (en) * 2003-09-10 2006-05-09 Kastalon, Inc. Nozzle for use in rotational casting apparatus
US7270711B2 (en) * 2004-06-07 2007-09-18 Kastalon, Inc. Nozzle for use in rotational casting apparatus
US6989061B2 (en) * 2003-08-22 2006-01-24 Kastalon, Inc. Nozzle for use in rotational casting apparatus
JP2014520201A (ja) 2011-03-23 2014-08-21 ピルキントン グループ リミテッド 薄膜コーティングを被覆するための装置およびこのような装置を用いた被覆方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2698812A (en) * 1949-10-21 1955-01-04 Schladitz Hermann Metal deposition process
GB1507996A (en) * 1975-06-11 1978-04-19 Pilkington Brothers Ltd Coating glass
GB1524326A (en) * 1976-04-13 1978-09-13 Bfg Glassgroup Coating of glass
GB1516032A (en) * 1976-04-13 1978-06-28 Bfg Glassgroup Coating of glass
CH628600A5 (fr) * 1979-02-14 1982-03-15 Siv Soc Italiana Vetro Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede.
IT1134153B (it) * 1979-11-21 1986-07-31 Siv Soc Italiana Vetro Ugello per depositare in continuo su un substrato uno strato di una materia solida
CH643469A5 (fr) * 1981-12-22 1984-06-15 Siv Soc Italiana Vetro Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide.
US4537795A (en) * 1982-09-16 1985-08-27 Sovonics Solar Systems Method for introducing sweep gases into a glow discharge deposition apparatus
DE3330092A1 (de) * 1983-08-20 1985-03-07 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen
US4573431A (en) * 1983-11-16 1986-03-04 Btu Engineering Corporation Modular V-CVD diffusion furnace
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass
GB8824104D0 (en) * 1988-10-14 1988-11-23 Pilkington Plc Process for coating glass
FR2653633B1 (fr) * 1989-10-19 1991-12-20 Commissariat Energie Atomique Dispositif de traitement chimique assiste par un plasma de diffusion.
JP2626925B2 (ja) * 1990-05-23 1997-07-02 三菱電機株式会社 基板処理装置および基板処理方法
US5136975A (en) * 1990-06-21 1992-08-11 Watkins-Johnson Company Injector and method for delivering gaseous chemicals to a surface
US5269847A (en) * 1990-08-23 1993-12-14 Applied Materials, Inc. Variable rate distribution gas flow reaction chamber
FR2672518B1 (fr) * 1991-02-13 1995-05-05 Saint Gobain Vitrage Int Buse a alimentation dissymetrique pour la formation d'une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux.
FR2672519B1 (fr) * 1991-02-13 1995-04-28 Saint Gobain Vitrage Int Buse a talon aval sureleve, pour deposer une couche de revetement sur un ruban de verre, par pyrolyse d'un melange gazeux.
FR2677639B1 (fr) * 1991-06-14 1994-02-25 Saint Gobain Vitrage Internal Technique de formation par pyrolyse en voie gazeuse d'un revetement essentiellement a base d'oxygene et de silicium.
EP0649479B1 (de) * 1993-04-16 2000-01-26 Libbey-Owens-Ford Co. Verfahren und vorrichtung zum beschichten eines glassubstrates

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008026001A1 (de) * 2007-09-04 2009-04-09 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre
DE102008026001B4 (de) * 2007-09-04 2012-02-16 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre und Heizelement

Also Published As

Publication number Publication date
JPH08198641A (ja) 1996-08-06
FR2724923B1 (fr) 1996-12-20
EP0708062B1 (de) 2001-05-09
US5704982A (en) 1998-01-06
DE69520865D1 (de) 2001-06-13
FR2724923A1 (fr) 1996-03-29
JP3946790B2 (ja) 2007-07-18
PT708062E (pt) 2001-10-31
ES2158057T3 (es) 2001-09-01
EP0708062A1 (de) 1996-04-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN

8339 Ceased/non-payment of the annual fee