DE69520550D1 - Verfahren zum Herstellen von Mustern durch Laserstrahlabtasten und Gerät und die auf demselben Gerät aufgebrachte Masker - Google Patents

Verfahren zum Herstellen von Mustern durch Laserstrahlabtasten und Gerät und die auf demselben Gerät aufgebrachte Masker

Info

Publication number
DE69520550D1
DE69520550D1 DE69520550T DE69520550T DE69520550D1 DE 69520550 D1 DE69520550 D1 DE 69520550D1 DE 69520550 T DE69520550 T DE 69520550T DE 69520550 T DE69520550 T DE 69520550T DE 69520550 D1 DE69520550 D1 DE 69520550D1
Authority
DE
Germany
Prior art keywords
masker
laser beam
beam scanning
making patterns
same device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69520550T
Other languages
English (en)
Other versions
DE69520550T2 (de
Inventor
Yoshimitsu Baba
Satoshi Togari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Laserfront Technologies Inc
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE69520550D1 publication Critical patent/DE69520550D1/de
Publication of DE69520550T2 publication Critical patent/DE69520550T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0988—Diaphragms, spatial filters, masks for removing or filtering a part of the beam
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K1/00—Methods or arrangements for marking the record carrier in digital fashion
    • G06K1/12—Methods or arrangements for marking the record carrier in digital fashion otherwise than by punching
    • G06K1/126—Methods or arrangements for marking the record carrier in digital fashion otherwise than by punching by photographic or thermographic registration

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
DE69520550T 1994-11-28 1995-11-27 Verfahren zum Herstellen von Mustern durch Laserstrahlabtasten und Gerät und die auf demselben Gerät aufgebrachte Masker Expired - Fee Related DE69520550T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6292623A JP2773661B2 (ja) 1994-11-28 1994-11-28 ビームスキャン式レーザマーキング方法および装置ならびにこのためのマスク

Publications (2)

Publication Number Publication Date
DE69520550D1 true DE69520550D1 (de) 2001-05-10
DE69520550T2 DE69520550T2 (de) 2001-10-31

Family

ID=17784202

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69520550T Expired - Fee Related DE69520550T2 (de) 1994-11-28 1995-11-27 Verfahren zum Herstellen von Mustern durch Laserstrahlabtasten und Gerät und die auf demselben Gerät aufgebrachte Masker

Country Status (5)

Country Link
US (1) US6097420A (de)
EP (1) EP0714726B1 (de)
JP (1) JP2773661B2 (de)
KR (1) KR100193411B1 (de)
DE (1) DE69520550T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6603136B1 (en) * 1999-10-15 2003-08-05 Videojet Systems International Laser marker focal length setting device
KR100370555B1 (ko) * 2000-11-16 2003-01-29 주식회사 이오테크닉스 마스크 헤드 어셈블리 및 이를 적용한 레이저 가공장치
CA2480600C (en) * 2002-04-11 2015-04-07 Sensormatic Electronics Corporation System and method for managing assets using a portable combined electronic article surveillance system and barcode scanner
KR100492748B1 (ko) * 2002-09-11 2005-06-07 (주)하드램 셀렉터블 다중 스캔헤드를 이용한 시분할 레이저 마킹장치및 방법
US6958762B2 (en) * 2003-12-09 2005-10-25 Markem Corporation Filling an area of an image marked on a material with a laser
US20060011617A1 (en) * 2004-07-13 2006-01-19 Ricardo Covarrubias Automated laser cutting of optical lenses
JP2008062259A (ja) * 2006-09-06 2008-03-21 Keyence Corp レーザ加工装置、レーザ加工方法及びレーザ加工プログラム
KR100846975B1 (ko) * 2006-11-09 2008-07-17 삼성에스디아이 주식회사 밀봉 장치 및 그를 이용한 표시 장치의 제조 방법
US8448468B2 (en) * 2008-06-11 2013-05-28 Corning Incorporated Mask and method for sealing a glass envelope
JP2010089094A (ja) * 2008-10-03 2010-04-22 Disco Abrasive Syst Ltd レーザ加工装置
JP5596456B2 (ja) * 2010-07-23 2014-09-24 セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー レーザー加工方法及びその加工方法を用いた半導体装置
CN108363932B (zh) 2017-01-26 2023-04-18 手持产品公司 读取条形码并去激活商品电子防窃标签的方法
CN108169920B (zh) * 2018-01-24 2020-03-20 河南科技大学 可传输吞吐微粒的椭圆光学传送带光束掩模板的设计方法
JP7353171B2 (ja) * 2019-12-26 2023-09-29 株式会社ディスコ レーザー加工装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947093A (en) * 1973-06-28 1976-03-30 Canon Kabushiki Kaisha Optical device for producing a minute light beam
JPS5945091A (ja) * 1982-09-07 1984-03-13 Toshiba Corp レ−ザ印字加工装置
US4636043A (en) 1984-03-01 1987-01-13 Laser Photonics, Inc. Laser beam scanning device and marking system
US5053171A (en) * 1986-10-14 1991-10-01 Allergan, Inc. Manufacture of ophthalmic lenses by excimer laser
US4911711A (en) * 1986-12-05 1990-03-27 Taunton Technologies, Inc. Sculpture apparatus for correcting curvature of the cornea
JPH02251387A (ja) 1989-03-27 1990-10-09 Toshiba Corp レーザマーキング装置
JPH02165881A (ja) 1988-12-15 1990-06-26 Nec Corp レーザマーキング装置のシャドウマスク
JPH02187288A (ja) 1989-01-11 1990-07-23 Hitachi Ltd レーザマーキングシステム
US5389954A (en) * 1990-11-21 1995-02-14 Canon Kabushiki Kaisha Laser process apparatus for forming holes in a workpiece
JPH052152A (ja) * 1990-12-19 1993-01-08 Hitachi Ltd 光ビーム作成方法、装置、それを用いた寸法測定方法、外観検査方法、高さ測定方法、露光方法および半導体集積回路装置の製造方法
JPH07102470B2 (ja) * 1991-01-29 1995-11-08 大阪府 金属表面のレーザー加工方法
JPH0699297A (ja) * 1992-09-17 1994-04-12 Omron Corp レーザ加工装置
US5331468A (en) * 1992-11-27 1994-07-19 Eastman Kodak Company Intensity redistribution for exposure correction in an overfilled symmetrical laser printer
US5521628A (en) * 1993-08-30 1996-05-28 Lumonics Corporation Laser system for simultaneously marking multiple parts

Also Published As

Publication number Publication date
EP0714726B1 (de) 2001-04-04
DE69520550T2 (de) 2001-10-31
EP0714726A2 (de) 1996-06-05
KR100193411B1 (ko) 1999-06-15
JP2773661B2 (ja) 1998-07-09
EP0714726A3 (de) 1996-08-28
US6097420A (en) 2000-08-01
JPH08150484A (ja) 1996-06-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: LASERFRONT TECHNOLOGIES,INC., SAGAMIHARA, KANAGAWA

8339 Ceased/non-payment of the annual fee