DE69518097T2 - Vertikaler Magnetkopf und Herstellungsverfahren - Google Patents

Vertikaler Magnetkopf und Herstellungsverfahren

Info

Publication number
DE69518097T2
DE69518097T2 DE69518097T DE69518097T DE69518097T2 DE 69518097 T2 DE69518097 T2 DE 69518097T2 DE 69518097 T DE69518097 T DE 69518097T DE 69518097 T DE69518097 T DE 69518097T DE 69518097 T2 DE69518097 T2 DE 69518097T2
Authority
DE
Germany
Prior art keywords
manufacturing process
magnetic head
vertical magnetic
vertical
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69518097T
Other languages
English (en)
Other versions
DE69518097D1 (de
Inventor
Pierre Gaud
Henri Sibuet
Christine Louis
Nathalie Vallet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69518097D1 publication Critical patent/DE69518097D1/de
Application granted granted Critical
Publication of DE69518097T2 publication Critical patent/DE69518097T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/21—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features the pole pieces being of ferrous sheet metal or other magnetic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
    • G11B5/3179—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
    • G11B5/3183—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes intersecting the gap plane, e.g. "horizontal head structure"
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49044—Plural magnetic deposition layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Heads (AREA)
DE69518097T 1994-03-07 1995-03-03 Vertikaler Magnetkopf und Herstellungsverfahren Expired - Fee Related DE69518097T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9402595A FR2716996B1 (fr) 1994-03-07 1994-03-07 Tête magnétique verticale et son procédé de réalisation.

Publications (2)

Publication Number Publication Date
DE69518097D1 DE69518097D1 (de) 2000-08-31
DE69518097T2 true DE69518097T2 (de) 2001-03-22

Family

ID=9460748

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69518097T Expired - Fee Related DE69518097T2 (de) 1994-03-07 1995-03-03 Vertikaler Magnetkopf und Herstellungsverfahren

Country Status (5)

Country Link
US (2) US6167611B1 (de)
EP (1) EP0671724B1 (de)
JP (1) JP3653778B2 (de)
DE (1) DE69518097T2 (de)
FR (1) FR2716996B1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2745111B1 (fr) 1996-02-15 1998-03-13 Commissariat Energie Atomique Tete magnetique verticale a bobinage integre et son procede de realisation
FR2781917B1 (fr) * 1998-07-28 2000-09-08 Commissariat Energie Atomique Procede de realisation collective de tetes magnetiques integrees a surface portante de hauteur determinee
KR20010040513A (ko) * 1998-12-03 2001-05-15 요트.게.아. 롤페즈 적층체의 형성방법
FR2806826B1 (fr) * 2000-03-22 2002-11-29 Commissariat Energie Atomique Tete magnetique integree pour l'enregistrement magnetique helicoidal sur bande et son procede de fabrication
US6606219B2 (en) * 2001-02-28 2003-08-12 Lafe Technology Limited Magnetic tape head including a transducer cluster and a block fixed to a u-shaped frame having a ridge
US6980404B2 (en) 2002-11-06 2005-12-27 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for improving soft magnetic properties of a spin valve while retaining high giant magnetoresistance
US6991601B2 (en) * 2002-12-02 2006-01-31 Ams Research Corporation Implantable pump
US7468864B2 (en) * 2004-07-01 2008-12-23 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3968565A (en) * 1972-09-01 1976-07-13 U.S. Philips Corporation Method of manufacturing a device comprising a semiconductor body
JPS54116663A (en) * 1978-03-03 1979-09-11 Matsushita Electric Ind Co Ltd Magnetic device
JPS5555421A (en) 1978-10-17 1980-04-23 Fuji Photo Film Co Ltd Magnetic head
JPS57203221A (en) * 1981-06-09 1982-12-13 Mitsubishi Electric Corp Thin film magnetic head
JPS57203321A (en) 1981-06-10 1982-12-13 Matsushita Electric Ind Co Ltd Digital-to-analog converter
JPS5823316A (ja) 1981-08-04 1983-02-12 Matsushita Electric Ind Co Ltd 薄膜磁気ヘツドの製造方法
JPS5837830A (ja) * 1981-08-28 1983-03-05 Fujitsu Ltd 薄膜磁気ヘツド
JPS5930227A (ja) * 1982-08-10 1984-02-17 Matsushita Electric Ind Co Ltd 磁気ヘツドの製造方法
JPS59231723A (ja) * 1983-06-13 1984-12-26 Matsushita Electric Ind Co Ltd 薄膜磁気ヘツド
JPS6045920A (ja) * 1983-08-23 1985-03-12 Fujitsu Ltd 複合・コアを有する薄膜磁気ヘッド
US5119255A (en) * 1984-08-16 1992-06-02 Ampex Corporation Magnetic saturation controlled scanning magnetic transducer
JPS62146419A (ja) * 1985-12-20 1987-06-30 Hitachi Ltd 薄膜磁気ヘツドの製造方法
FR2604021B1 (fr) * 1986-09-17 1988-10-28 Commissariat Energie Atomique Procede de realisation de tetes magnetiques en couches minces et a structure planaire et tete obtenue par ce procede
US5195004A (en) 1987-07-14 1993-03-16 Sanyo Electric Co., Ltd. Method of manufacturing a magnetic core half
JPH01133210A (ja) * 1987-11-18 1989-05-25 Hitachi Maxell Ltd 磁気ヘッドの製造方法
JPH0268704A (ja) * 1988-09-02 1990-03-08 Yamaha Corp 薄膜ヘッドの製造方法
FR2645314B1 (fr) 1989-03-29 1991-05-31 Commissariat Energie Atomique Tete magnetique a magnetoresistance pour enregistrement longitudinal et procede de realisation d'une telle tete
FR2651912B1 (fr) * 1989-09-12 1991-10-31 Europ Composants Electron Procede de realisation des pieces polaires et de l'entrefer de tetes magnetiques en couches minces pour application informatique audio ou video.
FR2652669B1 (fr) 1989-09-29 1992-11-20 Commissariat Energie Atomique Procede de realisation d'une tete d'enregistrement magnetique et tete obtenue par ce procede.
US5111351A (en) * 1989-11-27 1992-05-05 Censtor Corp. Integrated magnetic read/write head/flexure/conductor structure
FR2658430B1 (fr) * 1990-02-19 1992-06-19 Wk Gore Associes Sarl Manche de filtration a armature.
FR2658646B1 (fr) * 1990-02-21 1995-07-13 Commissariat Energie Atomique Procede de realisation d'une tete magnetique a deux materiaux magnetiques, et tete obtenue par ce procede.
FR2664729B1 (fr) * 1990-07-11 1992-09-18 Commissariat Energie Atomique Procede de fabrication de tete magnetique possedant un entrefer presentant un azimut controlable.
US5034089A (en) * 1990-08-23 1991-07-23 Storage Technology Corporation Method of manufacturing a multi-turn multi-track composite recording head
US5059278A (en) 1990-09-28 1991-10-22 Seagate Technology Selective chemical removal of coil seed-layer in thin film head magnetic transducer
US5432645A (en) * 1991-06-14 1995-07-11 Tdk Corporation Magnetic head-forming thin film
US5370766A (en) 1993-08-16 1994-12-06 California Micro Devices Methods for fabrication of thin film inductors, inductor networks and integration with other passive and active devices
FR2716995B1 (fr) * 1994-03-01 1996-04-05 Commissariat Energie Atomique Procédé de réalisation d'une tête magnétique verticale et tête obtenue par ce procédé.
US5490028A (en) 1994-08-26 1996-02-06 Aiwa Research And Development, Inc. Thin film magnetic head including an integral layered shield structure
FR2726931B1 (fr) * 1994-11-16 1996-12-06 Commissariat Energie Atomique Tete magnetique verticale a bobinage integre et son procede de realisation

Also Published As

Publication number Publication date
EP0671724B1 (de) 2000-07-26
DE69518097D1 (de) 2000-08-31
JPH07302406A (ja) 1995-11-14
US5883765A (en) 1999-03-16
JP3653778B2 (ja) 2005-06-02
EP0671724A1 (de) 1995-09-13
US6167611B1 (en) 2001-01-02
FR2716996A1 (fr) 1995-09-08
FR2716996B1 (fr) 1996-04-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee