DE69506054T2 - Schutzvorrichtung für Masken - Google Patents

Schutzvorrichtung für Masken

Info

Publication number
DE69506054T2
DE69506054T2 DE1995606054 DE69506054T DE69506054T2 DE 69506054 T2 DE69506054 T2 DE 69506054T2 DE 1995606054 DE1995606054 DE 1995606054 DE 69506054 T DE69506054 T DE 69506054T DE 69506054 T2 DE69506054 T2 DE 69506054T2
Authority
DE
Germany
Prior art keywords
masks
protective device
protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1995606054
Other languages
English (en)
Other versions
DE69506054D1 (de
Inventor
Minoru Fujita
Hiroaki Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Application granted granted Critical
Publication of DE69506054D1 publication Critical patent/DE69506054D1/de
Publication of DE69506054T2 publication Critical patent/DE69506054T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
    • Y10T428/31544—Addition polymer is perhalogenated

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE1995606054 1994-08-11 1995-08-08 Schutzvorrichtung für Masken Expired - Lifetime DE69506054T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18967694 1994-08-11
JP14797495A JP3445685B2 (ja) 1994-08-11 1995-06-15 マスク保護装置

Publications (2)

Publication Number Publication Date
DE69506054D1 DE69506054D1 (de) 1998-12-24
DE69506054T2 true DE69506054T2 (de) 1999-05-12

Family

ID=26478348

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1995606054 Expired - Lifetime DE69506054T2 (de) 1994-08-11 1995-08-08 Schutzvorrichtung für Masken

Country Status (6)

Country Link
US (1) US5601955A (de)
EP (1) EP0696760B1 (de)
JP (1) JP3445685B2 (de)
KR (1) KR0164946B1 (de)
CA (1) CA2154600C (de)
DE (1) DE69506054T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19808461A1 (de) * 1998-03-02 1999-09-09 Zeiss Carl Fa Retikel mit Kristall-Trägermaterial
US6190743B1 (en) * 1998-07-06 2001-02-20 Micro Lithography, Inc. Photomask protection system
JP3434731B2 (ja) * 1999-06-09 2003-08-11 Ｎｅｃエレクトロニクス株式会社 ペリクル及びそのケース
JP2001201845A (ja) * 1999-11-09 2001-07-27 Asahi Kasei Electronics Co Ltd 大型ペリクル
US6279249B1 (en) 1999-12-30 2001-08-28 Intel Corporation Reduced particle contamination manufacturing and packaging for reticles
US6507390B1 (en) * 2000-02-10 2003-01-14 Asml Us, Inc. Method and apparatus for a reticle with purged pellicle-to-reticle gap
US6847434B2 (en) * 2000-02-10 2005-01-25 Asml Holding N.V. Method and apparatus for a pellicle frame with porous filtering inserts
JP2003315983A (ja) * 2002-04-22 2003-11-06 Mitsubishi Electric Corp フォトマスク
EP1429186A3 (de) * 2002-12-09 2006-06-07 ASML Holding N.V. Rahmen mit porösen Einsätzen oder erhöhten Haftflächen für eine Abdeckungsmembran
US6822731B1 (en) 2003-06-18 2004-11-23 Asml Holding N.V. Method and apparatus for a pellicle frame with heightened bonding surfaces
JP5047232B2 (ja) * 2009-06-26 2012-10-10 信越化学工業株式会社 ペリクル
SG11201701805QA (en) * 2014-09-19 2017-04-27 Mitsui Chemicals Inc Pellicle, production method thereof, exposure method
EP3079013B1 (de) * 2015-03-30 2018-01-24 Shin-Etsu Chemical Co., Ltd. Pellikel
JP6395320B2 (ja) * 2015-03-30 2018-09-26 信越化学工業株式会社 ペリクル
WO2020009169A1 (ja) * 2018-07-04 2020-01-09 日本特殊陶業株式会社 ペリクル枠
JP7103252B2 (ja) * 2019-02-01 2022-07-20 信越化学工業株式会社 ペリクルフレーム、ペリクル、マスク粘着剤付ペリクルフレーム、ペリクル付露光原版、露光方法及び半導体の製造方法
KR102207853B1 (ko) * 2019-06-27 2021-01-27 주식회사 에프에스티 펠리클용 벤트 필터 및 이를 포함하는 펠리클
TW202326288A (zh) * 2021-08-25 2023-07-01 日商信越化學工業股份有限公司 能夠高速地進行氣壓調整的曝光用防護膜及其製造方法、曝光遮罩、曝光方法與半導體裝置的製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4833051A (en) * 1984-08-20 1989-05-23 Nippon Kogaku K.K. Protective device for photographic masks
JPS6339703U (de) 1986-09-01 1988-03-15
JPH055982A (ja) * 1991-06-27 1993-01-14 Shin Etsu Chem Co Ltd リソグラフイ−用ペリクル
US5344677A (en) * 1992-08-27 1994-09-06 Hong Gilbert H Photochemically stable deep ultraviolet pellicles for excimer lasers

Also Published As

Publication number Publication date
KR960008411A (ko) 1996-03-22
CA2154600C (en) 1998-12-22
KR0164946B1 (ko) 1999-01-15
EP0696760B1 (de) 1998-11-18
CA2154600A1 (en) 1996-02-12
JPH08106156A (ja) 1996-04-23
JP3445685B2 (ja) 2003-09-08
US5601955A (en) 1997-02-11
EP0696760A1 (de) 1996-02-14
DE69506054D1 (de) 1998-12-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition