DE69505320D1 - Kraft-Frequenz-Wandler mit vibrierenden Balken und Mittenkraftangriff - Google Patents

Kraft-Frequenz-Wandler mit vibrierenden Balken und Mittenkraftangriff

Info

Publication number
DE69505320D1
DE69505320D1 DE69505320T DE69505320T DE69505320D1 DE 69505320 D1 DE69505320 D1 DE 69505320D1 DE 69505320 T DE69505320 T DE 69505320T DE 69505320 T DE69505320 T DE 69505320T DE 69505320 D1 DE69505320 D1 DE 69505320D1
Authority
DE
Germany
Prior art keywords
force
frequency converter
center
vibrating bars
attack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69505320T
Other languages
English (en)
Other versions
DE69505320T2 (de
Inventor
Yvon Amand
Jean-Pierre Peghaire
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sagem SA
Original Assignee
Sagem SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem SA filed Critical Sagem SA
Application granted granted Critical
Publication of DE69505320D1 publication Critical patent/DE69505320D1/de
Publication of DE69505320T2 publication Critical patent/DE69505320T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
DE69505320T 1994-08-10 1995-08-08 Kraft-Frequenz-Wandler mit vibrierenden Balken und Mittenkraftangriff Expired - Fee Related DE69505320T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9409908A FR2723638B1 (fr) 1994-08-10 1994-08-10 Transducteur force-frequence a poutres vibrantes

Publications (2)

Publication Number Publication Date
DE69505320D1 true DE69505320D1 (de) 1998-11-19
DE69505320T2 DE69505320T2 (de) 1999-06-17

Family

ID=9466232

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505320T Expired - Fee Related DE69505320T2 (de) 1994-08-10 1995-08-08 Kraft-Frequenz-Wandler mit vibrierenden Balken und Mittenkraftangriff

Country Status (6)

Country Link
US (1) US5574220A (de)
EP (1) EP0696728B1 (de)
JP (1) JPH095176A (de)
CA (1) CA2155702A1 (de)
DE (1) DE69505320T2 (de)
FR (1) FR2723638B1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6450032B1 (en) * 2000-03-14 2002-09-17 Pressure Systems, Inc. Vibrating beam force sensor having improved producibility
EP1334341A1 (de) * 2000-11-15 2003-08-13 K.K. Holding Ag Resonator chip sensor für druck, kraft mit mechanisch entkoppelten teilbereichen ( schlitze ) sowie weicher membran
US20040016307A1 (en) * 2002-07-24 2004-01-29 Albert William C. Vibration isolation mechanism for a vibrating beam force sensor
DE10238721A1 (de) * 2002-08-23 2004-03-11 Robert Bosch Gmbh Vorrichtung zur Messung einer Kraft, Vorrichtung zur Messung eines Drucks und Drucksensor
US20050061081A1 (en) * 2003-09-22 2005-03-24 Butler Andrew G. Dual wire differential strain based sensor
US6848307B1 (en) * 2003-10-14 2005-02-01 Kulite Semiconductor Products, Inc. Dual beam frequency-output accelerometer
DE102006037948B3 (de) * 2006-08-12 2007-12-13 National Rejectors, Inc. Gmbh Münzgerät mit Gewichtsmessung
DE102006037947B3 (de) * 2006-08-12 2007-12-13 National Rejectors, Inc. Gmbh Münzgerät mit Gewichtsmessung
JP5076657B2 (ja) * 2007-06-11 2012-11-21 セイコーエプソン株式会社 応力感応型センサ用の双音叉型振動素子及び加速度検知ユニット
JP5446175B2 (ja) * 2008-09-02 2014-03-19 セイコーエプソン株式会社 振動型センサ
JP5446187B2 (ja) * 2008-09-17 2014-03-19 セイコーエプソン株式会社 振動片および振動型センサ
US8143768B2 (en) * 2009-06-26 2012-03-27 Hanson Richard A Miniature mechanical resonator device
IT1395419B1 (it) 2009-09-07 2012-09-14 Milano Politecnico Accelerometro risonante mems con migliorate caretteristiche elettriche
JP2011117944A (ja) * 2009-10-29 2011-06-16 Seiko Epson Corp 加速度センサー
IT1405796B1 (it) 2010-11-26 2014-01-24 St Microelectronics Srl Struttura di accelerometro biassiale risonante di tipo microelettromeccanico
FR2970776B1 (fr) * 2011-01-24 2014-05-02 Onera (Off Nat Aerospatiale) Dispositif de mesure de la temperature d'une poutre vibrante et application a l'amelioration de la precision de mesure d'un capteur a poutre vibrante
US9759739B2 (en) * 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
US9750124B2 (en) * 2015-04-03 2017-08-29 The Board Of Trustees Of The Leland Stanford Junior University Piezoelectric particle accelerator
EP3336485B1 (de) 2016-12-15 2020-09-23 Safran Landing Systems UK Limited Flugzeuganordnung mit ablenkungssensor
CH718762A1 (de) * 2021-06-23 2022-12-30 Digi Sens Holding Ag Schwingbrücke für einen Schwingsaitensensor und Schwingsaitensensor.

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3238789A (en) 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
US4215570A (en) 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer
US4321500A (en) * 1979-12-17 1982-03-23 Paroscientific, Inc. Longitudinal isolation system for flexurally vibrating force transducers
US4658174A (en) * 1986-03-20 1987-04-14 The Singer Company-Kearfott Division Vibrating beam force transducer with angled isolator springs
EP0313570B1 (de) * 1986-07-01 1992-02-26 Sensor International Vibrationskraftsensor
IL80550A0 (en) * 1986-11-07 1987-02-27 Israel Aircraft Ind Ltd Resonant element force transducer for acceleration sensing
US4856350A (en) * 1987-10-22 1989-08-15 Hanson Richard A Force sensing device and method
FR2622970B1 (fr) * 1987-11-05 1990-06-01 Esselte Moreau Sa Transducteur de force feuillete en forme de double diapason,son procede de fabrication,et son application dans une cellule de charge
FR2640045B1 (fr) * 1988-12-02 1991-03-08 Sagem Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
US5036715A (en) * 1989-06-30 1991-08-06 Richard Hanson Cantilevered force sensing assembly utilizing one or two resonating force sensing devices
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer

Also Published As

Publication number Publication date
US5574220A (en) 1996-11-12
FR2723638A1 (fr) 1996-02-16
CA2155702A1 (fr) 1996-02-11
JPH095176A (ja) 1997-01-10
EP0696728A1 (de) 1996-02-14
DE69505320T2 (de) 1999-06-17
EP0696728B1 (de) 1998-10-14
FR2723638B1 (fr) 1996-10-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN

8339 Ceased/non-payment of the annual fee