DE69505243T2 - Verfahren zum waschen und trocknen grosser mengen von diskreten komponenten - Google Patents

Verfahren zum waschen und trocknen grosser mengen von diskreten komponenten

Info

Publication number
DE69505243T2
DE69505243T2 DE69505243T DE69505243T DE69505243T2 DE 69505243 T2 DE69505243 T2 DE 69505243T2 DE 69505243 T DE69505243 T DE 69505243T DE 69505243 T DE69505243 T DE 69505243T DE 69505243 T2 DE69505243 T2 DE 69505243T2
Authority
DE
Germany
Prior art keywords
washing
large amounts
discrete components
drying large
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69505243T
Other languages
English (en)
Other versions
DE69505243D1 (de
Inventor
Peter Schelwald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Application granted granted Critical
Publication of DE69505243D1 publication Critical patent/DE69505243D1/de
Publication of DE69505243T2 publication Critical patent/DE69505243T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F26B5/06—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum the process involving freezing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
DE69505243T 1994-12-27 1995-11-27 Verfahren zum waschen und trocknen grosser mengen von diskreten komponenten Expired - Fee Related DE69505243T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP94203765 1994-12-27
PCT/IB1995/001065 WO1996020048A1 (en) 1994-12-27 1995-11-27 Method of bulk washing and drying of discrete components

Publications (2)

Publication Number Publication Date
DE69505243D1 DE69505243D1 (de) 1998-11-12
DE69505243T2 true DE69505243T2 (de) 1999-05-20

Family

ID=8217498

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505243T Expired - Fee Related DE69505243T2 (de) 1994-12-27 1995-11-27 Verfahren zum waschen und trocknen grosser mengen von diskreten komponenten

Country Status (8)

Country Link
US (1) US5688333A (de)
EP (1) EP0755307B1 (de)
JP (1) JPH09509889A (de)
KR (1) KR100389751B1 (de)
DE (1) DE69505243T2 (de)
MY (1) MY131764A (de)
TW (1) TW287296B (de)
WO (1) WO1996020048A1 (de)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3264747A (en) * 1964-05-13 1966-08-09 Pennsalt Chemical Corp Method and apparatus for continuous freeze drying
US3259991A (en) * 1965-01-07 1966-07-12 Abbott Lab Freeze drying method and apparatus
US3728798A (en) * 1970-08-25 1973-04-24 G Wehrmann Bulk freeze-drying apparatus
CH542415A (fr) * 1971-09-30 1973-09-30 Nestle Sa Installation de cryodessiccation
US3740860A (en) * 1972-07-31 1973-06-26 Smitherm Industries Freeze drying method and apparatus
US4409034A (en) * 1981-11-24 1983-10-11 Mobile Companies, Inc. Cryogenic cleaning process
JPS6314434A (ja) * 1986-07-04 1988-01-21 Dainippon Screen Mfg Co Ltd 基板表面処理方法および装置
JPH084063B2 (ja) * 1986-12-17 1996-01-17 富士通株式会社 半導体基板の保存方法
US4962776A (en) * 1987-03-26 1990-10-16 Regents Of The University Of Minnesota Process for surface and fluid cleaning
US4977688A (en) * 1989-10-27 1990-12-18 Semifab Incorporated Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
JPH0754795B2 (ja) * 1993-01-28 1995-06-07 日本電気株式会社 レジスト現像方法
DE4421421C2 (de) * 1993-12-24 1996-08-29 Daimler Benz Aerospace Airbus Trocknungsverfahren für Bauteile aus faserverstärkten Kunststoffen

Also Published As

Publication number Publication date
MY131764A (en) 2007-08-30
EP0755307A1 (de) 1997-01-29
EP0755307B1 (de) 1998-10-07
JPH09509889A (ja) 1997-10-07
TW287296B (de) 1996-10-01
KR100389751B1 (ko) 2003-10-17
WO1996020048A1 (en) 1996-07-04
KR970701104A (ko) 1997-03-17
DE69505243D1 (de) 1998-11-12
US5688333A (en) 1997-11-18

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DE69505243T2 (de) Verfahren zum waschen und trocknen grosser mengen von diskreten komponenten

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee