TW287296B - - Google Patents

Info

Publication number
TW287296B
TW287296B TW085100903A TW85100903A TW287296B TW 287296 B TW287296 B TW 287296B TW 085100903 A TW085100903 A TW 085100903A TW 85100903 A TW85100903 A TW 85100903A TW 287296 B TW287296 B TW 287296B
Authority
TW
Taiwan
Application number
TW085100903A
Original Assignee
Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics Nv filed Critical Philips Electronics Nv
Application granted granted Critical
Publication of TW287296B publication Critical patent/TW287296B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F26B5/06—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum the process involving freezing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
TW085100903A 1994-12-27 1996-01-25 TW287296B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP94203765 1994-12-27

Publications (1)

Publication Number Publication Date
TW287296B true TW287296B (zh) 1996-10-01

Family

ID=8217498

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085100903A TW287296B (zh) 1994-12-27 1996-01-25

Country Status (8)

Country Link
US (1) US5688333A (zh)
EP (1) EP0755307B1 (zh)
JP (1) JPH09509889A (zh)
KR (1) KR100389751B1 (zh)
DE (1) DE69505243T2 (zh)
MY (1) MY131764A (zh)
TW (1) TW287296B (zh)
WO (1) WO1996020048A1 (zh)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3264747A (en) * 1964-05-13 1966-08-09 Pennsalt Chemical Corp Method and apparatus for continuous freeze drying
US3259991A (en) * 1965-01-07 1966-07-12 Abbott Lab Freeze drying method and apparatus
US3728798A (en) * 1970-08-25 1973-04-24 G Wehrmann Bulk freeze-drying apparatus
CH542415A (fr) * 1971-09-30 1973-09-30 Nestle Sa Installation de cryodessiccation
US3740860A (en) * 1972-07-31 1973-06-26 Smitherm Industries Freeze drying method and apparatus
US4409034A (en) * 1981-11-24 1983-10-11 Mobile Companies, Inc. Cryogenic cleaning process
JPS6314434A (ja) * 1986-07-04 1988-01-21 Dainippon Screen Mfg Co Ltd 基板表面処理方法および装置
JPH084063B2 (ja) * 1986-12-17 1996-01-17 富士通株式会社 半導体基板の保存方法
US4962776A (en) * 1987-03-26 1990-10-16 Regents Of The University Of Minnesota Process for surface and fluid cleaning
US4977688A (en) * 1989-10-27 1990-12-18 Semifab Incorporated Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
JPH0754795B2 (ja) * 1993-01-28 1995-06-07 日本電気株式会社 レジスト現像方法
DE4421421C2 (de) * 1993-12-24 1996-08-29 Daimler Benz Aerospace Airbus Trocknungsverfahren für Bauteile aus faserverstärkten Kunststoffen

Also Published As

Publication number Publication date
MY131764A (en) 2007-08-30
DE69505243D1 (de) 1998-11-12
EP0755307A1 (en) 1997-01-29
DE69505243T2 (de) 1999-05-20
EP0755307B1 (en) 1998-10-07
KR970701104A (ko) 1997-03-17
WO1996020048A1 (en) 1996-07-04
US5688333A (en) 1997-11-18
JPH09509889A (ja) 1997-10-07
KR100389751B1 (ko) 2003-10-17

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