DE69503693T2 - Verfahren zur Bearbeitung von oxidischen Materialien mittels eines Laserstrahls - Google Patents

Verfahren zur Bearbeitung von oxidischen Materialien mittels eines Laserstrahls

Info

Publication number
DE69503693T2
DE69503693T2 DE69503693T DE69503693T DE69503693T2 DE 69503693 T2 DE69503693 T2 DE 69503693T2 DE 69503693 T DE69503693 T DE 69503693T DE 69503693 T DE69503693 T DE 69503693T DE 69503693 T2 DE69503693 T2 DE 69503693T2
Authority
DE
Germany
Prior art keywords
band gap
energy
less
laser beam
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69503693T
Other languages
English (en)
Other versions
DE69503693D1 (de
Inventor
Frank Christensen
Matthias Muellenborn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spectrum Control Inc
Original Assignee
Whitaker LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Whitaker LLC filed Critical Whitaker LLC
Publication of DE69503693D1 publication Critical patent/DE69503693D1/de
Application granted granted Critical
Publication of DE69503693T2 publication Critical patent/DE69503693T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/53—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Photovoltaic Devices (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE69503693T 1994-05-03 1995-05-03 Verfahren zur Bearbeitung von oxidischen Materialien mittels eines Laserstrahls Expired - Fee Related DE69503693T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK50394 1994-05-03
DK121994A DK121994A (da) 1994-05-03 1994-10-20 Fremgangsmåde til bearbejdning af oxidmaterialer ved hjælp af en laserstråle

Publications (2)

Publication Number Publication Date
DE69503693D1 DE69503693D1 (de) 1998-09-03
DE69503693T2 true DE69503693T2 (de) 1999-01-07

Family

ID=26064122

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69503693T Expired - Fee Related DE69503693T2 (de) 1994-05-03 1995-05-03 Verfahren zur Bearbeitung von oxidischen Materialien mittels eines Laserstrahls

Country Status (4)

Country Link
EP (1) EP0680804B1 (de)
AT (1) ATE168913T1 (de)
DE (1) DE69503693T2 (de)
DK (1) DK121994A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6225032B1 (en) 1997-08-27 2001-05-01 Canon Kabushiki Kaisha Method for manufacturing liquid jet recording heads and a head manufactured by such method of manufacture
WO2024040142A2 (en) * 2022-08-17 2024-02-22 Nielson Scientific Llc Parallelized three-dimensional semiconductor fabrication

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136578A (ja) * 1985-12-10 1987-06-19 Nec Corp ニオブ酸リチウム基板の加工方法
JPS62180088A (ja) * 1986-02-04 1987-08-07 Nec Corp レ−ザ加工方法およびレ−ザ加工装置
DE3718323A1 (de) * 1987-06-01 1988-12-22 Siemens Ag Verfahren zur oberflaechenbearbeitung, zum schneiden und dgl. von koerpern aus oxidwerkstoff
US4838989A (en) * 1987-08-25 1989-06-13 The United States Of America As Represented By The United States Department Of Energy Laser-driven fusion etching process
DE59002516D1 (de) * 1989-04-06 1993-10-07 Ciba Geigy Laserbeschriftung von keramischen Materialien, Glasuren, keramischen Gläsern und Gläsern.
JP2889892B2 (ja) * 1990-12-20 1999-05-10 セイコープレシジョン株式会社 感光性ガラスの加工方法

Also Published As

Publication number Publication date
DE69503693D1 (de) 1998-09-03
EP0680804A1 (de) 1995-11-08
DK121994A (da) 1995-11-04
EP0680804B1 (de) 1998-07-29
ATE168913T1 (de) 1998-08-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SPECTRUM CONTROL,INC.(N.D.GES.D.STAATES DELAWARE),

8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER GBR, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee