DE69428391D1 - Method and device for coating a film - Google Patents

Method and device for coating a film

Info

Publication number
DE69428391D1
DE69428391D1 DE69428391T DE69428391T DE69428391D1 DE 69428391 D1 DE69428391 D1 DE 69428391D1 DE 69428391 T DE69428391 T DE 69428391T DE 69428391 T DE69428391 T DE 69428391T DE 69428391 D1 DE69428391 D1 DE 69428391D1
Authority
DE
Germany
Prior art keywords
coating
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69428391T
Other languages
German (de)
Other versions
DE69428391T2 (en
Inventor
Keizo Hasebe
Akihiro Fujimoto
Hiroichi Inada
Hiroyuki Iino
Shinzi Kitamura
Masatoshi Deguchi
Mitsuhiro Nambu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69428391D1 publication Critical patent/DE69428391D1/en
Publication of DE69428391T2 publication Critical patent/DE69428391T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/162Coating on a rotating support, e.g. using a whirler or a spinner
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE69428391T 1993-03-25 1994-03-25 Method and device for coating a film Expired - Lifetime DE69428391T2 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP9257993 1993-03-25
JP13259493 1993-05-10
JP18344393 1993-06-30
JP18344293 1993-06-30
JP34372293 1993-12-16
JP34371793 1993-12-16
JP34734893 1993-12-24
JP34881293 1993-12-27
JP35405293 1993-12-28
JP35405493 1993-12-28

Publications (2)

Publication Number Publication Date
DE69428391D1 true DE69428391D1 (en) 2001-10-31
DE69428391T2 DE69428391T2 (en) 2002-07-04

Family

ID=27580182

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69428391T Expired - Lifetime DE69428391T2 (en) 1993-03-25 1994-03-25 Method and device for coating a film

Country Status (6)

Country Link
US (3) US5658615A (en)
EP (1) EP0618504B1 (en)
KR (1) KR100284556B1 (en)
CN (1) CN1059967C (en)
DE (1) DE69428391T2 (en)
SG (2) SG130022A1 (en)

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EP0618504A3 (en) 1996-04-10
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SG130022A1 (en) 2007-03-20
SG93216A1 (en) 2002-12-17
CN1059967C (en) 2000-12-27
CN1102505A (en) 1995-05-10
EP0618504B1 (en) 2001-09-26
US5658615A (en) 1997-08-19
US6063190A (en) 2000-05-16
EP0618504A2 (en) 1994-10-05
US5942035A (en) 1999-08-24
KR100284556B1 (en) 2001-04-02

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