DE69419968T2 - Bearbeitungsgerät mittels Mikrowellen und Verfahren zur Herstellung eines anorganischen dielektrischen Films - Google Patents

Bearbeitungsgerät mittels Mikrowellen und Verfahren zur Herstellung eines anorganischen dielektrischen Films

Info

Publication number
DE69419968T2
DE69419968T2 DE1994619968 DE69419968T DE69419968T2 DE 69419968 T2 DE69419968 T2 DE 69419968T2 DE 1994619968 DE1994619968 DE 1994619968 DE 69419968 T DE69419968 T DE 69419968T DE 69419968 T2 DE69419968 T2 DE 69419968T2
Authority
DE
Germany
Prior art keywords
producing
processing apparatus
dielectric film
inorganic dielectric
microwave processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1994619968
Other languages
English (en)
Other versions
DE69419968D1 (de
Inventor
Kunio Takada
Nobumasa Suzuki
Toshimori Miyakoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69419968D1 publication Critical patent/DE69419968D1/de
Publication of DE69419968T2 publication Critical patent/DE69419968T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
DE1994619968 1993-05-27 1994-05-26 Bearbeitungsgerät mittels Mikrowellen und Verfahren zur Herstellung eines anorganischen dielektrischen Films Expired - Fee Related DE69419968T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12627593 1993-05-27

Publications (2)

Publication Number Publication Date
DE69419968D1 DE69419968D1 (de) 1999-09-16
DE69419968T2 true DE69419968T2 (de) 2000-04-06

Family

ID=14931175

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994619968 Expired - Fee Related DE69419968T2 (de) 1993-05-27 1994-05-26 Bearbeitungsgerät mittels Mikrowellen und Verfahren zur Herstellung eines anorganischen dielektrischen Films

Country Status (2)

Country Link
EP (1) EP0626683B1 (de)
DE (1) DE69419968T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1848918B2 (de) † 2005-02-03 2013-07-17 Albis Plastic GmbH Beleuchtungsvorrichtung

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0987851A (ja) * 1995-09-21 1997-03-31 Canon Inc マイクロ波プラズマ処理装置及び処理方法
WO1997022136A1 (de) * 1995-12-08 1997-06-19 Balzers Aktiengesellschaft Hf-plasmabehandlungskammer bzw. pecvd-beschichtungskammer, deren verwendungen und verfahren zur beschichtung von speicherplatten
JP2002230834A (ja) * 2000-06-26 2002-08-16 Tdk Corp 光情報媒体、その製造方法、その記録または再生方法、およびその検査方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01223644A (ja) * 1988-03-02 1989-09-06 Hitachi Ltd 光学式情報記録媒体
KR900015914A (ko) * 1988-04-13 1990-11-10 미다 가쓰시게 유기재료와 무기재료와의 적층구조체
JPH0366043A (ja) * 1989-08-04 1991-03-20 Nippon Telegr & Teleph Corp <Ntt> 光記録媒体用保護層およびその形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1848918B2 (de) † 2005-02-03 2013-07-17 Albis Plastic GmbH Beleuchtungsvorrichtung
US9321396B2 (en) 2005-02-03 2016-04-26 Albis Plastic Gmbh Illumination device

Also Published As

Publication number Publication date
EP0626683B1 (de) 1999-08-11
EP0626683A1 (de) 1994-11-30
DE69419968D1 (de) 1999-09-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee