DE69417772D1 - Feineinstellungsapparat mit atomarer auflösung - Google Patents

Feineinstellungsapparat mit atomarer auflösung

Info

Publication number
DE69417772D1
DE69417772D1 DE69417772T DE69417772T DE69417772D1 DE 69417772 D1 DE69417772 D1 DE 69417772D1 DE 69417772 T DE69417772 T DE 69417772T DE 69417772 T DE69417772 T DE 69417772T DE 69417772 D1 DE69417772 D1 DE 69417772D1
Authority
DE
Germany
Prior art keywords
atomar
resolution
fine
adjusting device
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69417772T
Other languages
English (en)
Other versions
DE69417772T2 (de
Inventor
Gerd Binnig
Walter Haeberle
Heinrich Rohrer
Douglas Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69417772D1 publication Critical patent/DE69417772D1/de
Publication of DE69417772T2 publication Critical patent/DE69417772T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H02K41/0352—Unipolar motors
    • H02K41/0354—Lorentz force motors, e.g. voice coil motors
    • H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/02—Driving or moving of heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • G11B5/55—Track change, selection or acquisition by displacement of the head
    • G11B5/5521—Track change, selection or acquisition by displacement of the head across disk tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Control Of Position Or Direction (AREA)
DE69417772T 1994-08-27 1994-08-27 Feineinstellungsapparat mit atomarer auflösung Expired - Lifetime DE69417772T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1994/002844 WO1996007074A1 (en) 1994-08-27 1994-08-27 Fine positioning apparatus with atomic resolution

Publications (2)

Publication Number Publication Date
DE69417772D1 true DE69417772D1 (de) 1999-05-12
DE69417772T2 DE69417772T2 (de) 1999-12-02

Family

ID=8165882

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69417772T Expired - Lifetime DE69417772T2 (de) 1994-08-27 1994-08-27 Feineinstellungsapparat mit atomarer auflösung

Country Status (6)

Country Link
US (1) US5808302A (de)
EP (1) EP0783662B1 (de)
JP (1) JP3013858B2 (de)
KR (1) KR100255578B1 (de)
DE (1) DE69417772T2 (de)
WO (1) WO1996007074A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3390318B2 (ja) * 1996-02-13 2003-03-24 セイコーインスツルメンツ株式会社 微小位置決め機構及びそれを用いた走査型プローブ顕微鏡及び微小領域加工機
EP0807799B1 (de) * 1996-05-13 2002-10-09 Seiko Instruments Inc. Abtastgerät für eine Sonde
JP3106242B2 (ja) * 1996-11-13 2000-11-06 セイコーインスツルメンツ株式会社 プローブ顕微鏡
JP3468655B2 (ja) * 1997-01-31 2003-11-17 セイコーインスツルメンツ株式会社 プローブ走査装置
US6249747B1 (en) * 1997-07-17 2001-06-19 International Business Machines Corporation Investigation and/or manipulation device
JP3179380B2 (ja) * 1997-08-11 2001-06-25 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
WO1999010705A2 (en) * 1997-08-22 1999-03-04 Thermomicroscopes Corp. A scanning probe microscope system removably attached to an optical microscope objective
US6076397A (en) * 1997-12-01 2000-06-20 International Business Machines Corporation Positioning apparatus
EP0998016B1 (de) 1998-10-30 2007-08-29 International Business Machines Corporation Magnetisches Abtastungs- oder Positionierungssystem mit mindestens zwei Freiheitsgraden
EP1159761B1 (de) * 1999-02-22 2010-04-21 Joseph E. Clawson, Jr. Elektronisches bauteil auf basis von nanostrukturen
EP1037009B1 (de) * 1999-03-09 2005-01-19 Nanosurf AG Positionierkopf für ein Rastersondenmikroskop
JP3735701B2 (ja) * 1999-03-31 2006-01-18 独立行政法人産業技術総合研究所 電気測定用プローバおよび該プローバによる電気的特性の測定方法
US6555829B1 (en) 2000-01-10 2003-04-29 Applied Materials, Inc. High precision flexure stage
US7328446B2 (en) * 2001-09-04 2008-02-05 International Business Machines Corporation Apparatus for reducing sensitivity of an article to mechanical shock
US7119511B2 (en) 2003-04-11 2006-10-10 International Business Machines Corporation Servo system for a two-dimensional micro-electromechanical system (MEMS)-based scanner and method therefor
US7241992B1 (en) 2004-01-21 2007-07-10 United States Of America As Represented By The Secretary Of The Air Force Method of amplitude modulated electrostatic polymer nanolithography
US7431970B1 (en) 2004-01-21 2008-10-07 United States Of America As Represented By The Secretary Of The Air Force Method of polymer nanolithography
US7538332B1 (en) 2004-09-02 2009-05-26 The United States Of America As Represented By The Secretary Of The Air Force Method of Z-lift electrostatic nanolithography
DE112006000456T5 (de) * 2005-02-24 2008-01-17 Sii Nano Technology Inc. Abtastsondenmikroskop-Feinbewegungsmechanismus und Abtastsondenmikroskop, welches dergleichen verwendet
US20070046285A1 (en) * 2005-08-29 2007-03-01 Kenta Arima Sample observation method and observation device
US8109466B2 (en) * 2008-06-23 2012-02-07 Rohr, Inc. Thrust reverser cascade assembly and AFT cascade ring with flow deflector portion
KR101494046B1 (ko) * 2008-10-09 2015-02-16 뉴캐슬 이노베이션 리미티드 포지셔닝 시스템 및 방법
US20110074403A1 (en) * 2009-09-30 2011-03-31 Herng-Er Horng High-sensitivity, in-vivo, and dynamic detection of magnetic particles within living organism using a probe-type squid system
TWI563034B (en) * 2011-05-13 2016-12-21 Dsm Ip Assets Bv Flame retardant semi-aromatic polyamide composition and moulded products made therefrom

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988004047A1 (en) * 1986-11-24 1988-06-02 Lasarray Holding Ag Device for generating and detecting magnetic material structures at atomic levels
US4947042A (en) * 1988-12-13 1990-08-07 Mitsubishi Denki Kabushiki Kaisha Tunnel unit and scanning head for scanning tunneling microscope
US5276545A (en) * 1989-03-24 1994-01-04 Nicolet Instrument Corporation Mirror alignment and damping device
JPH07122830B2 (ja) * 1989-05-31 1995-12-25 新技術事業団 超精密位置決め装置
US5103174A (en) * 1990-02-26 1992-04-07 The United States Of America As Represented By The Secretary Of The Navy Magnetic field sensor and device for determining the magnetostriction of a material based on a tunneling tip detector and methods of using same
US5375087A (en) * 1991-02-04 1994-12-20 The United States Of America As Represented By The Secretary Of Commerce Tunneling-stabilized magnetic reading and recording
CA2074713A1 (en) * 1991-09-30 1993-03-31 Gordon Walter Culp Magnetic actuator
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi Ltd Verfahren und Vorrichtung zum Beobachten einer Fläche

Also Published As

Publication number Publication date
US5808302A (en) 1998-09-15
EP0783662A1 (de) 1997-07-16
DE69417772T2 (de) 1999-12-02
KR970705736A (ko) 1997-10-09
KR100255578B1 (ko) 2000-05-01
JP3013858B2 (ja) 2000-02-28
WO1996007074A1 (en) 1996-03-07
JPH10507541A (ja) 1998-07-21
EP0783662B1 (de) 1999-04-07

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Legal Events

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8320 Willingness to grant licences declared (paragraph 23)