DE69417673T2 - Verschiebungsmesseinrichtung - Google Patents

Verschiebungsmesseinrichtung

Info

Publication number
DE69417673T2
DE69417673T2 DE69417673T DE69417673T DE69417673T2 DE 69417673 T2 DE69417673 T2 DE 69417673T2 DE 69417673 T DE69417673 T DE 69417673T DE 69417673 T DE69417673 T DE 69417673T DE 69417673 T2 DE69417673 T2 DE 69417673T2
Authority
DE
Germany
Prior art keywords
measuring device
displacement measuring
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69417673T
Other languages
English (en)
Other versions
DE69417673D1 (de
Inventor
Noriko Nakanishi
Hidehiro Kume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Magnescale Co Ltd
Original Assignee
Sony Precision Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Precision Technology Inc filed Critical Sony Precision Technology Inc
Application granted granted Critical
Publication of DE69417673D1 publication Critical patent/DE69417673D1/de
Publication of DE69417673T2 publication Critical patent/DE69417673T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
DE69417673T 1993-10-08 1994-10-07 Verschiebungsmesseinrichtung Expired - Lifetime DE69417673T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25317593A JP3413503B2 (ja) 1993-10-08 1993-10-08 変位検出装置

Publications (2)

Publication Number Publication Date
DE69417673D1 DE69417673D1 (de) 1999-05-12
DE69417673T2 true DE69417673T2 (de) 1999-07-29

Family

ID=17247586

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69417673T Expired - Lifetime DE69417673T2 (de) 1993-10-08 1994-10-07 Verschiebungsmesseinrichtung

Country Status (4)

Country Link
US (1) US5521394A (de)
EP (1) EP0647835B1 (de)
JP (1) JP3413503B2 (de)
DE (1) DE69417673T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0411837D0 (en) * 2004-05-27 2004-06-30 Leuven K U Res & Dev A measurement configuration based on linear scales able to measure to a target also moving perpendicular to the measurement axis
JP2009258022A (ja) * 2008-04-18 2009-11-05 Sony Corp 変位検出装置
CN103411543B (zh) * 2013-08-07 2016-01-20 厦门大学 丝杆导程精度检测设备及其测头装置
CN103940342B (zh) * 2014-03-28 2017-02-22 北京工业大学 一种对滚式弧面凸轮加工精度检测装置
US11577859B1 (en) * 2019-10-08 2023-02-14 Rockwell Collins, Inc. Fault resilient airborne network
US11921344B2 (en) * 2020-01-20 2024-03-05 Lecc Technology Co., Ltd. Laser module

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950005031B1 (ko) * 1986-02-24 1995-05-17 소니 가부시끼가이샤 초점 검출 장치
GB8625054D0 (en) * 1986-10-20 1986-11-26 Renishaw Plc Optical measuring probe
JPS6435730A (en) * 1987-07-31 1989-02-06 Sony Corp Focussing error detector
US5144603A (en) * 1990-03-07 1992-09-01 Hitachi, Ltd. Optical head incorporating refractive index distribution changeable lens
JPH0460933A (ja) * 1990-06-26 1992-02-26 Matsushita Electric Ind Co Ltd 光ピックアップヘッド装置
DE4219311C2 (de) * 1991-06-13 1996-03-07 Sony Magnescale Inc Verschiebungsdetektor
JP3256984B2 (ja) * 1991-06-13 2002-02-18 ソニー・プレシジョン・テクノロジー株式会社 変位検出装置
JP3473057B2 (ja) * 1993-10-05 2003-12-02 ソニー・プレシジョン・テクノロジー株式会社 変位検出装置

Also Published As

Publication number Publication date
JPH07110212A (ja) 1995-04-25
US5521394A (en) 1996-05-28
EP0647835A3 (de) 1996-11-06
DE69417673D1 (de) 1999-05-12
JP3413503B2 (ja) 2003-06-03
EP0647835A2 (de) 1995-04-12
EP0647835B1 (de) 1999-04-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MAGNESCALE CO., LTD., TOKYO, JP