DE69414457D1 - Ultraviolettes Licht beständige antireflektierende Beschichtung - Google Patents
Ultraviolettes Licht beständige antireflektierende BeschichtungInfo
- Publication number
- DE69414457D1 DE69414457D1 DE69414457T DE69414457T DE69414457D1 DE 69414457 D1 DE69414457 D1 DE 69414457D1 DE 69414457 T DE69414457 T DE 69414457T DE 69414457 T DE69414457 T DE 69414457T DE 69414457 D1 DE69414457 D1 DE 69414457D1
- Authority
- DE
- Germany
- Prior art keywords
- ultraviolet light
- reflective coating
- resistant anti
- light resistant
- reflective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/283—Interference filters designed for the ultraviolet
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Gyroscopes (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Filters (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/067,863 US5457570A (en) | 1993-05-25 | 1993-05-25 | Ultraviolet resistive antireflective coating of Ta2 O5 doped with Al2 O3 and method of fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69414457D1 true DE69414457D1 (de) | 1998-12-17 |
DE69414457T2 DE69414457T2 (de) | 1999-06-10 |
Family
ID=22078922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69414457T Expired - Fee Related DE69414457T2 (de) | 1993-05-25 | 1994-05-23 | Ultraviolettes Licht beständige antireflektierende Beschichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5457570A (de) |
EP (1) | EP0626596B1 (de) |
JP (1) | JP2696306B2 (de) |
DE (1) | DE69414457T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5661596A (en) * | 1994-02-03 | 1997-08-26 | Canon Kabushiki Kaisha | Antireflection film and exposure apparatus using the same |
CH690511A5 (de) * | 1994-09-01 | 2000-09-29 | Balzers Hochvakuum | Optisches Bauteil und Verfahren zum Herstellen eines solchen. |
JPH08220304A (ja) | 1995-02-13 | 1996-08-30 | Tadahiro Omi | 光学物品及びそれを用いた露光装置又は光学系並びにその製造方法 |
US6262830B1 (en) | 1997-09-16 | 2001-07-17 | Michael Scalora | Transparent metallo-dielectric photonic band gap structure |
US5907427A (en) | 1997-10-24 | 1999-05-25 | Time Domain Corporation | Photonic band gap device and method using a periodicity defect region to increase photonic signal delay |
US6004850A (en) * | 1998-02-23 | 1999-12-21 | Motorola Inc. | Tantalum oxide anti-reflective coating (ARC) integrated with a metallic transistor gate electrode and method of formation |
US6744552B2 (en) * | 1998-04-02 | 2004-06-01 | Michael Scalora | Photonic signal frequency up and down-conversion using a photonic band gap structure |
US6304366B1 (en) | 1998-04-02 | 2001-10-16 | Michael Scalora | Photonic signal frequency conversion using a photonic band gap structure |
US6396617B1 (en) | 1999-05-17 | 2002-05-28 | Michael Scalora | Photonic band gap device and method using a periodicity defect region doped with a gain medium to increase photonic signal delay |
US6538794B1 (en) | 1999-09-30 | 2003-03-25 | D'aguanno Giuseppe | Efficient non-linear phase shifting using a photonic band gap structure |
US6339493B1 (en) | 1999-12-23 | 2002-01-15 | Michael Scalora | Apparatus and method for controlling optics propagation based on a transparent metal stack |
US6414780B1 (en) | 1999-12-23 | 2002-07-02 | D'aguanno Giuseppe | Photonic signal reflectivity and transmissivity control using a photonic band gap structure |
US6278549B1 (en) * | 2000-04-17 | 2001-08-21 | Ciena Corporation | Optical filter having a quartz substrate |
JP2003015175A (ja) | 2001-04-27 | 2003-01-15 | Mitsubishi Electric Corp | 固体光源装置 |
US7760432B2 (en) * | 2002-04-25 | 2010-07-20 | Honeywell International Inc. | Photochromic resistant materials for optical devices in plasma environments |
US7310454B2 (en) * | 2004-05-24 | 2007-12-18 | Massachusetts Institute Of Technology | Photonic bandgap modulator, amplifier, demux, and TDM devices |
US20080137706A1 (en) * | 2006-12-12 | 2008-06-12 | Honeywell International Inc. | Laser mirror for a ring laser gyroscope |
US10830787B2 (en) * | 2018-02-20 | 2020-11-10 | General Electric Company | Optical accelerometers for use in navigation grade environments |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3741657A (en) * | 1971-03-03 | 1973-06-26 | Raytheon Co | Laser gyroscope |
US4063803A (en) * | 1976-06-03 | 1977-12-20 | Spectra-Physics, Inc. | Transmissive end seal for laser tubes |
USRE32849E (en) * | 1978-04-13 | 1989-01-31 | Litton Systems, Inc. | Method for fabricating multi-layer optical films |
US4213705A (en) * | 1978-11-09 | 1980-07-22 | Litton Systems, Inc. | Four mode Zeeman laser gyroscope with minimum hole burning competition |
US4579750A (en) * | 1980-07-07 | 1986-04-01 | Massachusetts Institute Of Technology | Laser heated CVD process |
US4685110A (en) * | 1984-09-24 | 1987-08-04 | Spectra-Physics, Inc. | Optical component of a laser |
US4583822A (en) * | 1984-10-31 | 1986-04-22 | Rockwell International Corporation | Quintic refractive index profile antireflection coatings |
DE3514053A1 (de) * | 1985-04-18 | 1986-10-23 | Lacrex Brevetti S.A., Orselina | Vorrichtung zum vorwaermen von fluessigkeiten, insbesondere von fluessigen brenn- oder kraftstoffen |
US4809293A (en) * | 1985-09-03 | 1989-02-28 | Spectra-Physics, Inc. | Optical component of a laser |
US4793908A (en) * | 1986-12-29 | 1988-12-27 | Rockwell International Corporation | Multiple ion source method and apparatus for fabricating multilayer optical films |
US4934788A (en) * | 1987-03-20 | 1990-06-19 | Rockwell International Corporation | Deposition of gradient index coatings using coevaporation with rate control |
DE3853970D1 (de) * | 1987-07-22 | 1995-07-20 | Philips Patentverwaltung | Optisches Interferenzfilter. |
US4904083A (en) * | 1987-09-11 | 1990-02-27 | Litton Systems, Inc. | Partially transparent mirror for a ring laser |
US4827870A (en) * | 1987-10-05 | 1989-05-09 | Honeywell Inc. | Apparatus for applying multilayer optical interference coating on complex curved substrates |
US4907846A (en) * | 1987-11-20 | 1990-03-13 | Raytheon Company | Thick, impact resistant antireflection coatings for IR transparent optical elements |
US4966437A (en) * | 1988-04-19 | 1990-10-30 | Litton Systems, Inc. | Fault-tolerant anti-reflective coatings |
US4925259A (en) * | 1988-10-20 | 1990-05-15 | The United States Of America As Represented By The United States Department Of Energy | Multilayer optical dielectric coating |
EP0379738B1 (de) * | 1989-01-23 | 1997-12-10 | Balzers Aktiengesellschaft | Laser und eine damit gekoppelte optische Schicht aus Ta2O5 |
US5147125A (en) * | 1989-08-24 | 1992-09-15 | Viratec Thin Films, Inc. | Multilayer anti-reflection coating using zinc oxide to provide ultraviolet blocking |
JPH03107801A (ja) * | 1989-09-21 | 1991-05-08 | Sekinosu Kk | プラスチック基材の反射防止膜 |
US5170291A (en) * | 1989-12-19 | 1992-12-08 | Leybold Aktiengesellschaft | Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for manufacturing the coating |
EP0452828B1 (de) * | 1990-04-19 | 1995-06-21 | Sony Corporation | Optische Wellenleitervorrichtung und optischer zweiter harmonischer Generator der diese benützt |
JPH07119845B2 (ja) * | 1990-11-27 | 1995-12-20 | ホーヤ株式会社 | 光学部品 |
-
1993
- 1993-05-25 US US08/067,863 patent/US5457570A/en not_active Expired - Lifetime
-
1994
- 1994-05-23 DE DE69414457T patent/DE69414457T2/de not_active Expired - Fee Related
- 1994-05-23 EP EP94303686A patent/EP0626596B1/de not_active Expired - Lifetime
- 1994-05-24 JP JP6109605A patent/JP2696306B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5457570A (en) | 1995-10-10 |
EP0626596B1 (de) | 1998-11-11 |
JPH0772329A (ja) | 1995-03-17 |
EP0626596A1 (de) | 1994-11-30 |
DE69414457T2 (de) | 1999-06-10 |
JP2696306B2 (ja) | 1998-01-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |