DE69414457D1 - Ultraviolettes Licht beständige antireflektierende Beschichtung - Google Patents

Ultraviolettes Licht beständige antireflektierende Beschichtung

Info

Publication number
DE69414457D1
DE69414457D1 DE69414457T DE69414457T DE69414457D1 DE 69414457 D1 DE69414457 D1 DE 69414457D1 DE 69414457 T DE69414457 T DE 69414457T DE 69414457 T DE69414457 T DE 69414457T DE 69414457 D1 DE69414457 D1 DE 69414457D1
Authority
DE
Germany
Prior art keywords
ultraviolet light
reflective coating
resistant anti
light resistant
reflective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69414457T
Other languages
English (en)
Other versions
DE69414457T2 (de
Inventor
Samuel Lu
Ming-Jan Sun
Alan F Stewart
Anthony W Louderback
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Guidance and Electronics Co Inc
Original Assignee
Litton Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc filed Critical Litton Systems Inc
Publication of DE69414457D1 publication Critical patent/DE69414457D1/de
Application granted granted Critical
Publication of DE69414457T2 publication Critical patent/DE69414457T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/283—Interference filters designed for the ultraviolet

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Gyroscopes (AREA)
  • Lasers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Filters (AREA)
DE69414457T 1993-05-25 1994-05-23 Ultraviolettes Licht beständige antireflektierende Beschichtung Expired - Fee Related DE69414457T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/067,863 US5457570A (en) 1993-05-25 1993-05-25 Ultraviolet resistive antireflective coating of Ta2 O5 doped with Al2 O3 and method of fabrication

Publications (2)

Publication Number Publication Date
DE69414457D1 true DE69414457D1 (de) 1998-12-17
DE69414457T2 DE69414457T2 (de) 1999-06-10

Family

ID=22078922

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69414457T Expired - Fee Related DE69414457T2 (de) 1993-05-25 1994-05-23 Ultraviolettes Licht beständige antireflektierende Beschichtung

Country Status (4)

Country Link
US (1) US5457570A (de)
EP (1) EP0626596B1 (de)
JP (1) JP2696306B2 (de)
DE (1) DE69414457T2 (de)

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Publication number Priority date Publication date Assignee Title
US5661596A (en) * 1994-02-03 1997-08-26 Canon Kabushiki Kaisha Antireflection film and exposure apparatus using the same
CH690511A5 (de) * 1994-09-01 2000-09-29 Balzers Hochvakuum Optisches Bauteil und Verfahren zum Herstellen eines solchen.
JPH08220304A (ja) 1995-02-13 1996-08-30 Tadahiro Omi 光学物品及びそれを用いた露光装置又は光学系並びにその製造方法
US6262830B1 (en) 1997-09-16 2001-07-17 Michael Scalora Transparent metallo-dielectric photonic band gap structure
US5907427A (en) 1997-10-24 1999-05-25 Time Domain Corporation Photonic band gap device and method using a periodicity defect region to increase photonic signal delay
US6004850A (en) * 1998-02-23 1999-12-21 Motorola Inc. Tantalum oxide anti-reflective coating (ARC) integrated with a metallic transistor gate electrode and method of formation
US6744552B2 (en) * 1998-04-02 2004-06-01 Michael Scalora Photonic signal frequency up and down-conversion using a photonic band gap structure
US6304366B1 (en) 1998-04-02 2001-10-16 Michael Scalora Photonic signal frequency conversion using a photonic band gap structure
US6396617B1 (en) 1999-05-17 2002-05-28 Michael Scalora Photonic band gap device and method using a periodicity defect region doped with a gain medium to increase photonic signal delay
US6538794B1 (en) 1999-09-30 2003-03-25 D'aguanno Giuseppe Efficient non-linear phase shifting using a photonic band gap structure
US6339493B1 (en) 1999-12-23 2002-01-15 Michael Scalora Apparatus and method for controlling optics propagation based on a transparent metal stack
US6414780B1 (en) 1999-12-23 2002-07-02 D'aguanno Giuseppe Photonic signal reflectivity and transmissivity control using a photonic band gap structure
US6278549B1 (en) * 2000-04-17 2001-08-21 Ciena Corporation Optical filter having a quartz substrate
JP2003015175A (ja) 2001-04-27 2003-01-15 Mitsubishi Electric Corp 固体光源装置
US7760432B2 (en) * 2002-04-25 2010-07-20 Honeywell International Inc. Photochromic resistant materials for optical devices in plasma environments
US7310454B2 (en) * 2004-05-24 2007-12-18 Massachusetts Institute Of Technology Photonic bandgap modulator, amplifier, demux, and TDM devices
US20080137706A1 (en) * 2006-12-12 2008-06-12 Honeywell International Inc. Laser mirror for a ring laser gyroscope
US10830787B2 (en) * 2018-02-20 2020-11-10 General Electric Company Optical accelerometers for use in navigation grade environments

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3741657A (en) * 1971-03-03 1973-06-26 Raytheon Co Laser gyroscope
US4063803A (en) * 1976-06-03 1977-12-20 Spectra-Physics, Inc. Transmissive end seal for laser tubes
USRE32849E (en) * 1978-04-13 1989-01-31 Litton Systems, Inc. Method for fabricating multi-layer optical films
US4213705A (en) * 1978-11-09 1980-07-22 Litton Systems, Inc. Four mode Zeeman laser gyroscope with minimum hole burning competition
US4579750A (en) * 1980-07-07 1986-04-01 Massachusetts Institute Of Technology Laser heated CVD process
US4685110A (en) * 1984-09-24 1987-08-04 Spectra-Physics, Inc. Optical component of a laser
US4583822A (en) * 1984-10-31 1986-04-22 Rockwell International Corporation Quintic refractive index profile antireflection coatings
DE3514053A1 (de) * 1985-04-18 1986-10-23 Lacrex Brevetti S.A., Orselina Vorrichtung zum vorwaermen von fluessigkeiten, insbesondere von fluessigen brenn- oder kraftstoffen
US4809293A (en) * 1985-09-03 1989-02-28 Spectra-Physics, Inc. Optical component of a laser
US4793908A (en) * 1986-12-29 1988-12-27 Rockwell International Corporation Multiple ion source method and apparatus for fabricating multilayer optical films
US4934788A (en) * 1987-03-20 1990-06-19 Rockwell International Corporation Deposition of gradient index coatings using coevaporation with rate control
DE3853970D1 (de) * 1987-07-22 1995-07-20 Philips Patentverwaltung Optisches Interferenzfilter.
US4904083A (en) * 1987-09-11 1990-02-27 Litton Systems, Inc. Partially transparent mirror for a ring laser
US4827870A (en) * 1987-10-05 1989-05-09 Honeywell Inc. Apparatus for applying multilayer optical interference coating on complex curved substrates
US4907846A (en) * 1987-11-20 1990-03-13 Raytheon Company Thick, impact resistant antireflection coatings for IR transparent optical elements
US4966437A (en) * 1988-04-19 1990-10-30 Litton Systems, Inc. Fault-tolerant anti-reflective coatings
US4925259A (en) * 1988-10-20 1990-05-15 The United States Of America As Represented By The United States Department Of Energy Multilayer optical dielectric coating
EP0379738B1 (de) * 1989-01-23 1997-12-10 Balzers Aktiengesellschaft Laser und eine damit gekoppelte optische Schicht aus Ta2O5
US5147125A (en) * 1989-08-24 1992-09-15 Viratec Thin Films, Inc. Multilayer anti-reflection coating using zinc oxide to provide ultraviolet blocking
JPH03107801A (ja) * 1989-09-21 1991-05-08 Sekinosu Kk プラスチック基材の反射防止膜
US5170291A (en) * 1989-12-19 1992-12-08 Leybold Aktiengesellschaft Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for manufacturing the coating
EP0452828B1 (de) * 1990-04-19 1995-06-21 Sony Corporation Optische Wellenleitervorrichtung und optischer zweiter harmonischer Generator der diese benützt
JPH07119845B2 (ja) * 1990-11-27 1995-12-20 ホーヤ株式会社 光学部品

Also Published As

Publication number Publication date
US5457570A (en) 1995-10-10
EP0626596B1 (de) 1998-11-11
JPH0772329A (ja) 1995-03-17
EP0626596A1 (de) 1994-11-30
DE69414457T2 (de) 1999-06-10
JP2696306B2 (ja) 1998-01-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee