DE69413792D1 - Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente - Google Patents

Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente

Info

Publication number
DE69413792D1
DE69413792D1 DE69413792T DE69413792T DE69413792D1 DE 69413792 D1 DE69413792 D1 DE 69413792D1 DE 69413792 T DE69413792 T DE 69413792T DE 69413792 T DE69413792 T DE 69413792T DE 69413792 D1 DE69413792 D1 DE 69413792D1
Authority
DE
Germany
Prior art keywords
comb
tuning fork
drive elements
shaped drive
revolution meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69413792T
Other languages
English (en)
Other versions
DE69413792T2 (de
Inventor
Jonathan J Bernstein
Marc S Weinberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Charles Stark Draper Laboratory Inc filed Critical Charles Stark Draper Laboratory Inc
Application granted granted Critical
Publication of DE69413792D1 publication Critical patent/DE69413792D1/de
Publication of DE69413792T2 publication Critical patent/DE69413792T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
DE1994613792 1994-01-25 1994-01-25 Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente Expired - Lifetime DE69413792T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19940400150 EP0664438B1 (de) 1994-01-25 1994-01-25 Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente

Publications (2)

Publication Number Publication Date
DE69413792D1 true DE69413792D1 (de) 1998-11-12
DE69413792T2 DE69413792T2 (de) 1999-03-04

Family

ID=8217978

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994613792 Expired - Lifetime DE69413792T2 (de) 1994-01-25 1994-01-25 Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente

Country Status (2)

Country Link
EP (1) EP0664438B1 (de)
DE (1) DE69413792T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
JP3412293B2 (ja) * 1994-11-17 2003-06-03 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
DE19539049A1 (de) * 1995-10-20 1997-04-24 Bosch Gmbh Robert Verfahren zur Herstellung eines Coriolis-Drehratensensors
JP3931405B2 (ja) * 1997-04-10 2007-06-13 日産自動車株式会社 角速度センサ
FR2798993B1 (fr) * 1999-09-28 2001-12-07 Thomson Csf Sextant Gyrometre de type diapason
JP2002296039A (ja) 2001-03-30 2002-10-09 Murata Mfg Co Ltd ジャイロ装置およびそれを用いた電子装置
US6718823B2 (en) 2002-04-30 2004-04-13 Honeywell International Inc. Pulse width modulation drive signal for a MEMS gyroscope
JP4352975B2 (ja) * 2003-07-25 2009-10-28 セイコーエプソン株式会社 圧電振動片、圧電振動片の支持構造、圧電振動子及び振動型圧電ジャイロスコープ
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
DE102009048139A1 (de) * 2009-10-02 2011-04-07 Siemens Aktiengesellschaft Mikromechanischer Sensor
ITUA20162173A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
IT201600106928A1 (it) 2016-10-24 2018-04-24 St Microelectronics Srl Giroscopio triassiale mems a modulazione di frequenza

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer

Also Published As

Publication number Publication date
DE69413792T2 (de) 1999-03-04
EP0664438B1 (de) 1998-10-07
EP0664438A1 (de) 1995-07-26

Similar Documents

Publication Publication Date Title
DE69416750D1 (de) Drehratensensor mit zentral montierter Stimmgabel
DK0660920T3 (da) Coriolis-massegennemstrømningsdetektor
DE69729684D1 (de) Navigationsvorrichtung mit Formveränderungsanzeigefunktion
DE69726207D1 (de) Gerät mit wiederbeschreibbarer Anzeigeeinheit
DE59702126D1 (de) Drehzahlmesser mit Ökonometer
DE69413792D1 (de) Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente
DE59510007D1 (de) Massendurchflussmessgerät
DE59814321D1 (de) Antriebsvorrichtung für drei Rotationselemente mit wenigstens zwei piezoelektrischen Antriebselementen
DE60032697D1 (de) Trägheitsgeschwindigkeitssensor mit Stimmgabel
DE69519353D1 (de) Schokolade mit niedrigem Erweichungspunkt
DE69625184D1 (de) Coriolis-massendurchflussmesse mit konzentrischen rotoren
DE69523380D1 (de) Nabeneinheit mit Drehgeschwindigkeitsmessaufnehmer
DE59407740D1 (de) Coriolis-massedurchflussaufnehmer mit schraubenförmigen messrohr
DE19882130T1 (de) Handmessinstrument mit Berührungsbildschirm
DE69507913D1 (de) Optischer drehmomentsensor
DE59700779D1 (de) Coriolis-Massedurchflussaufnehmer
NO308225B1 (no) En multippel glassenhet med et tilhørende avstandsstykke
DE69805095D1 (de) Mit verschiedenen oberflächen gekoppelter resonator
FI97925B (fi) Virityslineaarisuudeltaan parannettu jänniteohjattu oskillaattori
DE69721998D1 (de) Piezoelektrischer flüssigkeitsstandmesser
ID20214A (id) Pasta dengan sedikit cairan
FI954297A0 (fi) Tehomittari
FR2727202B1 (fr) Debitmetre massique
DE69501373D1 (de) Electromechanischer Wandler mit zwei Rotoren
DE59510864D1 (de) Woltmannzähler

Legal Events

Date Code Title Description
8364 No opposition during term of opposition