DE69409306T2 - Thermisch emittierende Kathode, Herstellungsverfahren einer solchen thermisch emittierende Kathode und Elektronenstrahl-Gerät - Google Patents

Thermisch emittierende Kathode, Herstellungsverfahren einer solchen thermisch emittierende Kathode und Elektronenstrahl-Gerät

Info

Publication number
DE69409306T2
DE69409306T2 DE1994609306 DE69409306T DE69409306T2 DE 69409306 T2 DE69409306 T2 DE 69409306T2 DE 1994609306 DE1994609306 DE 1994609306 DE 69409306 T DE69409306 T DE 69409306T DE 69409306 T2 DE69409306 T2 DE 69409306T2
Authority
DE
Germany
Prior art keywords
emitting cathode
thermally emitting
manufacturing
electron beam
beam device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1994609306
Other languages
English (en)
Other versions
DE69409306D1 (de
Inventor
Yutaka Kawase
Tsuyoshi Nakamura
Toshinori Ishida
Toshikazu Sugimura
Maki Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE69409306D1 publication Critical patent/DE69409306D1/de
Publication of DE69409306T2 publication Critical patent/DE69409306T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
DE1994609306 1993-07-29 1994-07-29 Thermisch emittierende Kathode, Herstellungsverfahren einer solchen thermisch emittierende Kathode und Elektronenstrahl-Gerät Expired - Fee Related DE69409306T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18790293 1993-07-29

Publications (2)

Publication Number Publication Date
DE69409306D1 DE69409306D1 (de) 1998-05-07
DE69409306T2 true DE69409306T2 (de) 1998-07-30

Family

ID=16214204

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994609306 Expired - Fee Related DE69409306T2 (de) 1993-07-29 1994-07-29 Thermisch emittierende Kathode, Herstellungsverfahren einer solchen thermisch emittierende Kathode und Elektronenstrahl-Gerät

Country Status (2)

Country Link
EP (1) EP0637046B1 (de)
DE (1) DE69409306T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3479392A4 (de) * 2016-06-30 2020-06-17 Kla-Tencor Corporation Borhaltige elektronenstrahlemitter mit hoher helligkeit zur verwendung in einem vakuum

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004072732A2 (en) * 2003-02-14 2004-08-26 Mapper Lithography Ip B.V. Dispenser cathode
CN103165361B (zh) * 2013-03-13 2015-11-25 清华大学深圳研究生院 一种含铯化合物阴极的制备方法及该阴极
CN103560060B (zh) * 2013-10-30 2016-06-29 北京工业大学 一种碳化锆热阴极材料及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU371632A1 (ru) * 1968-08-22 1973-02-22 МАТЕРИАЛ ДЛЯ КАТОДОВI .7С:::ООЮЗНАЯjj;-j:>&-:;;;^.yUi?w'!EC??,I ;:': ••'•'-, •''Г-^"--г;;^
FR2058653A5 (en) * 1969-09-19 1971-05-28 Onera (Off Nat Aerospatiale) Cathode material for ion propulsion - motor
NL7207276A (de) * 1972-05-30 1973-12-04
FR2498372A1 (fr) * 1981-01-16 1982-07-23 Thomson Csf Cathode a chauffage direct, son procede de fabrication, et tube electronique incorporant une telle cathode
JP2635415B2 (ja) * 1989-07-21 1997-07-30 関西日本電気株式会社 含浸型陰極の製造方法
JP2748729B2 (ja) * 1991-07-25 1998-05-13 日本電気株式会社 含浸形陰極構体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3479392A4 (de) * 2016-06-30 2020-06-17 Kla-Tencor Corporation Borhaltige elektronenstrahlemitter mit hoher helligkeit zur verwendung in einem vakuum

Also Published As

Publication number Publication date
EP0637046A1 (de) 1995-02-01
EP0637046B1 (de) 1998-04-01
DE69409306D1 (de) 1998-05-07

Similar Documents

Publication Publication Date Title
FR2689312B1 (fr) Cathode à émission de champ.
DE69605459D1 (de) Herstellungsverfahrung einer Elektronenfeldemissionsvorrichtung
DE69320617D1 (de) Elektronenemitter
DE69411280T2 (de) Laser sintern mit mehreren strahlen
DE69406739D1 (de) Elektronenstrahlgerät
FR2701601B1 (fr) Elément d'émission de champ et procédé de fabrication de celui-ci.
DE69635119D1 (de) Kathode, elektronenstrahlemittierende Vorrichtung mit Verwendung derselben, und Verfahren zur Herstellung der Kathode
FR2713394B1 (fr) Source d'électron de type à émission de champ.
DE69817641D1 (de) Herstellungsverfahren einer Elektronenemissionsvorrichtung und Anzeigevorrichtung
DE69405529T2 (de) Feldemissionselektronenvorrichtung
DE59303531D1 (de) Elektronenstrahl-Vorrichtung
FR2744834B1 (fr) Cathode a emission de champ et son procede de fabrication
DE69402397D1 (de) Lineare Elektronenstrahlröhrenanordnungen
EP0416558A3 (en) Electron emission element and method of manufacturing the same
DE69317962D1 (de) Elektronenemittierende Vorrichtung
DE69316960D1 (de) Elektronenröhre mit Halbleiterkathode
FR2689311B1 (fr) Cathode à émission de champ.
ATE232645T1 (de) Feldemissionskathode und eine lichtquelle mit einer feldemissionskathode
DE69412666D1 (de) Gewinngekoppelter Halbleiterlaser mit verteilter Rückkoppelung und Herstellungsverfahren
DE69409306T2 (de) Thermisch emittierende Kathode, Herstellungsverfahren einer solchen thermisch emittierende Kathode und Elektronenstrahl-Gerät
DE69403940D1 (de) Feldemissionskathodenstruktur und Herstellungsverfahren
DE69622445D1 (de) Herstellungsverfahren einer Feldemissionskaltkathode
DK0539365T3 (da) Strukturer og fremgangsmåder til fremstilling af feltemissionskatoder.
DE69514576T2 (de) Herstellungsverfahren einer Mikrospitzelektronenquelle
DE69815462D1 (de) Halbleiterkathode und eine elektronenröhre mit einer halbleiterkathode

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee