DE69407194D1 - Magnetoresistiver stromsensor und verfahren zu seiner herstellung - Google Patents

Magnetoresistiver stromsensor und verfahren zu seiner herstellung

Info

Publication number
DE69407194D1
DE69407194D1 DE69407194T DE69407194T DE69407194D1 DE 69407194 D1 DE69407194 D1 DE 69407194D1 DE 69407194 T DE69407194 T DE 69407194T DE 69407194 T DE69407194 T DE 69407194T DE 69407194 D1 DE69407194 D1 DE 69407194D1
Authority
DE
Germany
Prior art keywords
production
current sensor
magnetoresistive current
magnetoresistive
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69407194T
Other languages
English (en)
Other versions
DE69407194T2 (de
Inventor
Jean Mouchot
Jean-Marc Fedeli
Franck Boileau
Patrick Mas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69407194D1 publication Critical patent/DE69407194D1/de
Application granted granted Critical
Publication of DE69407194T2 publication Critical patent/DE69407194T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
    • G01R15/205—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using magneto-resistance devices, e.g. field plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
DE69407194T 1993-09-27 1994-09-27 Magnetoresistiver stromsensor und verfahren zu seiner herstellung Expired - Lifetime DE69407194T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9311442A FR2710753B1 (fr) 1993-09-27 1993-09-27 Capteur de courant comprenant un ruban magnétorésistif et son procédé de réalisation.
PCT/FR1994/001128 WO1995009447A1 (fr) 1993-09-27 1994-09-27 Capteur de courant comprenant un ruban magnetoresistif et son procede de realisation

Publications (2)

Publication Number Publication Date
DE69407194D1 true DE69407194D1 (de) 1998-01-15
DE69407194T2 DE69407194T2 (de) 1998-05-28

Family

ID=9451240

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69407194T Expired - Lifetime DE69407194T2 (de) 1993-09-27 1994-09-27 Magnetoresistiver stromsensor und verfahren zu seiner herstellung

Country Status (6)

Country Link
US (1) US5708407A (de)
EP (1) EP0721670B1 (de)
JP (1) JPH09503297A (de)
DE (1) DE69407194T2 (de)
FR (1) FR2710753B1 (de)
WO (1) WO1995009447A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2742571B1 (fr) * 1995-12-15 1998-01-16 Commissariat Energie Atomique Structure et capteur multicouches et procede de realisation
FR2749664B1 (fr) * 1996-06-05 1998-07-24 Chauvin Arnoux Dispositif de mesure de courants faibles par pince amperemetrique
ES2114824B1 (es) * 1996-07-10 1998-12-16 Univ Madrid Complutense Dispositivo para la medida de corrientes electricas continuas basado en magnetoimpedancia.
US6094330A (en) * 1998-01-14 2000-07-25 General Electric Company Circuit interrupter having improved current sensing apparatus
DE60037790T2 (de) * 1999-06-18 2009-01-08 Koninklijke Philips Electronics N.V. Magnetisches messsystem mit irreversibler charakteristik, sowie methode zur erzeugung, reparatur und verwendung eines solchen systems
DE10127754B4 (de) * 2001-06-07 2014-11-20 Robert Bosch Gmbh Magnetoresistive Schichtanordnung
US6949927B2 (en) 2001-08-27 2005-09-27 International Rectifier Corporation Magnetoresistive magnetic field sensors and motor control devices using same
DE10162752A1 (de) * 2001-12-20 2003-07-03 Philips Intellectual Property Magnetoresistiver Sensor
EP1514126A1 (de) * 2002-06-06 2005-03-16 Koninklijke Philips Electronics N.V. Fühler und verfahren zum messen eines stroms geladener teilchen
US7239123B2 (en) * 2003-10-09 2007-07-03 Hewlett-Packard Development Company, L.P. Multiplexed dual-purpose magnetoresistive sensor and method of measuring current and temperature
WO2005064356A2 (en) * 2003-12-23 2005-07-14 Koninklijke Philips Electronics N.V. High sensitivity magnetic built-in current sensor
DE102004062474A1 (de) * 2004-03-23 2005-10-13 Siemens Ag Vorrichtung zur potenzialfreien Strommessung
JP2009229112A (ja) * 2008-03-19 2009-10-08 Tdk Corp 電圧検出回路
CN102812367B (zh) * 2010-03-12 2014-10-29 阿尔卑斯绿色器件株式会社 电流测定装置
US9678129B2 (en) * 2011-08-18 2017-06-13 Siemens Aktiengesellschaft Device and method for monitoring the state of a system component
US10145906B2 (en) 2015-12-17 2018-12-04 Analog Devices Global Devices, systems and methods including magnetic structures
US10782323B2 (en) * 2016-05-13 2020-09-22 University Of North Carolina Charlotte Wideband contactless magnetoresistive-rogowski current sensing
FR3116608B1 (fr) * 2020-11-26 2022-12-23 Chauvin Arnoux Dispositif de mesure de courant électrique sans contact à noyau magnétique flexible

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3813692A (en) * 1972-10-11 1974-05-28 Ibm Internally biased magnetoresistive magnetic transducer
JPS6031014A (ja) * 1983-07-30 1985-02-16 Sanyo Electric Co Ltd 磁気抵抗体を使用してなす位置センサ
DE3854457T2 (de) * 1987-07-07 1996-02-29 Nippon Denso Co Stromdetektoranordnung mit ferromagnetischem Magnetwiderstandselement.
US4808911A (en) * 1987-07-22 1989-02-28 Hughes Aircraft Company Loop resistance test apparatus
JPH0644644B2 (ja) * 1987-09-08 1994-06-08 住友持殊金属株式会社 半導体磁気抵抗素子の製造方法
DE3820475C1 (de) * 1988-06-16 1989-12-21 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
JP2698642B2 (ja) * 1989-02-03 1998-01-19 シャープ株式会社 超電導磁気抵抗素子
FR2648942B1 (fr) * 1989-06-27 1995-08-11 Thomson Csf Capteur a effet magnetoresistif
DE3929452A1 (de) * 1989-09-05 1991-03-07 Asea Brown Boveri Strom-messeinrichtung
DE4027226A1 (de) * 1990-02-13 1991-08-14 Forschungszentrum Juelich Gmbh Magnetfeldsensor mit ferromagnetischer, duenner schicht
DE69106334T2 (de) * 1990-12-10 1995-05-04 Hitachi Ltd Mehrsicht Film mit magnetoresistiven Effekt und magnetoresitives Element.
US5317251A (en) * 1992-11-23 1994-05-31 Honeywell Inc. Peak magnetic field detector with non-volatile storage
JP2551321B2 (ja) * 1993-04-21 1996-11-06 日本電気株式会社 集積化磁気抵抗効果センサ
FR2709549B1 (fr) * 1993-09-02 1995-10-13 Commissariat Energie Atomique Guide de flux magnétique à languettes et capteur magnétorésistif comportant ce guide .
JP3210192B2 (ja) * 1994-09-29 2001-09-17 アルプス電気株式会社 磁気検出素子

Also Published As

Publication number Publication date
JPH09503297A (ja) 1997-03-31
FR2710753B1 (fr) 1995-10-27
US5708407A (en) 1998-01-13
EP0721670A1 (de) 1996-07-17
DE69407194T2 (de) 1998-05-28
WO1995009447A1 (fr) 1995-04-06
FR2710753A1 (fr) 1995-04-07
EP0721670B1 (de) 1997-12-03

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