DE69403532D1 - Optik- und Umweltschutzvorrichtung für Laserbehandlungsverfahren - Google Patents

Optik- und Umweltschutzvorrichtung für Laserbehandlungsverfahren

Info

Publication number
DE69403532D1
DE69403532D1 DE69403532T DE69403532T DE69403532D1 DE 69403532 D1 DE69403532 D1 DE 69403532D1 DE 69403532 T DE69403532 T DE 69403532T DE 69403532 T DE69403532 T DE 69403532T DE 69403532 D1 DE69403532 D1 DE 69403532D1
Authority
DE
Germany
Prior art keywords
optical
protection device
environmental protection
laser treatment
treatment processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69403532T
Other languages
English (en)
Inventor
Jr Clifford Milton Balliet
David Erle Houser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69403532D1 publication Critical patent/DE69403532D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
DE69403532T 1993-04-02 1994-03-28 Optik- und Umweltschutzvorrichtung für Laserbehandlungsverfahren Expired - Lifetime DE69403532D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/042,324 US5359176A (en) 1993-04-02 1993-04-02 Optics and environmental protection device for laser processing applications

Publications (1)

Publication Number Publication Date
DE69403532D1 true DE69403532D1 (de) 1997-07-10

Family

ID=21921243

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69403532T Expired - Lifetime DE69403532D1 (de) 1993-04-02 1994-03-28 Optik- und Umweltschutzvorrichtung für Laserbehandlungsverfahren

Country Status (4)

Country Link
US (1) US5359176A (de)
EP (1) EP0618037B1 (de)
JP (1) JP2549265B2 (de)
DE (1) DE69403532D1 (de)

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Also Published As

Publication number Publication date
EP0618037A1 (de) 1994-10-05
JPH06285668A (ja) 1994-10-11
JP2549265B2 (ja) 1996-10-30
US5359176A (en) 1994-10-25
EP0618037B1 (de) 1997-06-04

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