DE69329128D1 - Lichtempfindliche Bildaufzeichnungszusammensetzungen - Google Patents

Lichtempfindliche Bildaufzeichnungszusammensetzungen

Info

Publication number
DE69329128D1
DE69329128D1 DE69329128T DE69329128T DE69329128D1 DE 69329128 D1 DE69329128 D1 DE 69329128D1 DE 69329128 T DE69329128 T DE 69329128T DE 69329128 T DE69329128 T DE 69329128T DE 69329128 D1 DE69329128 D1 DE 69329128D1
Authority
DE
Germany
Prior art keywords
photosensitive imaging
imaging compositions
compositions
photosensitive
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69329128T
Other languages
English (en)
Inventor
Daniel Y Pai
Stephen S Rodriguez
Roger F Sinta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Application granted granted Critical
Publication of DE69329128D1 publication Critical patent/DE69329128D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/164—Coating processes; Apparatus therefor using electric, electrostatic or magnetic means; powder coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S524/00—Synthetic resins or natural rubbers -- part of the class 520 series
    • Y10S524/901—Electrodepositable compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
DE69329128T 1992-05-07 1993-04-07 Lichtempfindliche Bildaufzeichnungszusammensetzungen Expired - Lifetime DE69329128D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/879,598 US5384229A (en) 1992-05-07 1992-05-07 Photoimageable compositions for electrodeposition

Publications (1)

Publication Number Publication Date
DE69329128D1 true DE69329128D1 (de) 2000-09-07

Family

ID=25374475

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69329128T Expired - Lifetime DE69329128D1 (de) 1992-05-07 1993-04-07 Lichtempfindliche Bildaufzeichnungszusammensetzungen

Country Status (4)

Country Link
US (1) US5384229A (de)
EP (1) EP0568827B1 (de)
JP (1) JPH06289609A (de)
DE (1) DE69329128D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5527656A (en) * 1993-04-27 1996-06-18 Kansai Paint Co., Ltd. Positive type electrodeposition photoresist compositions
US6004720A (en) * 1993-12-28 1999-12-21 Fujitsu Limited Radiation sensitive material and method for forming pattern
EP0689098B1 (de) * 1994-06-22 2000-08-16 Ciba SC Holding AG Positiv-Photoresist
JPH08262699A (ja) * 1995-03-28 1996-10-11 Canon Inc レジスト組成物、レジスト処理方法及び装置
US5665792A (en) * 1995-06-07 1997-09-09 E. I. Du Pont De Nemours And Company Stabilizers for use with photoacid precursor formulations
US5721088A (en) * 1995-12-20 1998-02-24 Ppg Industries, Inc. Electrodepositable photoimageable compositions with improved edge coverage
JP3875280B2 (ja) 1997-07-15 2007-01-31 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー ミクロリソグラフィーのための改良された溶解抑制レジスト
EP1023360B1 (de) 1997-10-16 2011-03-09 Sun Chemical Corporation Photoneutralisierung von ph-empfindlichen wässrigen polymerdispersionen und verfahren zur deren verwendung
KR100252061B1 (ko) * 1998-04-20 2000-06-01 윤종용 포토레지스트용 중합체, 이를 포함하는 포토레지스트 조성물 및이의 제조방법
US6686122B1 (en) 1998-12-22 2004-02-03 Vantico Inc. Production of photoresist coatings
US6379865B1 (en) 2000-04-11 2002-04-30 3M Innovative Properties Company Photoimageable, aqueous acid soluble polyimide polymers
US6803092B2 (en) 2001-06-26 2004-10-12 3M Innovative Properties Company Selective deposition of circuit-protective polymers
AU2002331809A1 (en) * 2001-08-31 2004-03-19 Semitool, Inc. Apparatus and method for deposition of an electrophoretic emulsion
US7144488B2 (en) * 2002-06-05 2006-12-05 Shipley Company, L.L.C. Electrode, electrochemical cell, and method for analysis of electroplating baths
US7314700B2 (en) * 2002-12-05 2008-01-01 International Business Machines Corporation High sensitivity resist compositions for electron-based lithography
TW200506538A (en) * 2003-08-04 2005-02-16 Fujitsu Ltd Resist pattern thickening material, process for forming resist pattern using the same, and process for manufacturing semiconductor device using the same
US8003293B2 (en) * 2004-09-30 2011-08-23 Intel Corporation Pixelated photoresists
US7635552B2 (en) * 2006-07-25 2009-12-22 Endicott Interconnect Technologies, Inc. Photoresist composition with antibacterial agent
WO2009039485A1 (en) * 2007-09-20 2009-03-26 University Of Utah Research Foundation Electrochemical deposition of polymers on metal substrates
DE102009007799B4 (de) 2009-02-06 2010-10-14 ITM Isotopen Technologien München AG Molekül zur Funktionalisierung eines Trägers, Bindung eines Radionuklids an den Träger und Radionuklidgenerator zur Herstellung des Radionuklids sowie Herstellungsverfahren
WO2012001945A1 (ja) 2010-06-30 2012-01-05 日本曹達株式会社 新規共重合体
TW201229693A (en) * 2010-10-01 2012-07-16 Fujifilm Corp Gap embedding composition, method of embedding gap and method of producing semiconductor device by using the composition

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4442197A (en) 1982-01-11 1984-04-10 General Electric Company Photocurable compositions
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
EP0153904B1 (de) 1984-02-10 1988-09-14 Ciba-Geigy Ag Verfahren zur Herstellung einer Schutzschicht oder einer Reliefabbildung
DE3406927A1 (de) * 1984-02-25 1985-08-29 Hoechst Ag, 6230 Frankfurt Strahlungsempfindliches gemisch auf basis von saeurespaltbaren verbindungen
DE3586263D1 (de) * 1984-03-07 1992-08-06 Ciba Geigy Ag Verfahren zur herstellung von abbildungen.
US4592816A (en) * 1984-09-26 1986-06-03 Rohm And Haas Company Electrophoretic deposition process
US4877818A (en) * 1984-09-26 1989-10-31 Rohm And Haas Company Electrophoretically depositable photosensitive polymer composition
GB8430377D0 (en) * 1984-12-01 1985-01-09 Ciba Geigy Ag Modified phenolic resins
US4603101A (en) 1985-09-27 1986-07-29 General Electric Company Photoresist compositions containing t-substituted organomethyl vinylaryl ether materials
CA1307695C (en) 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
US4968581A (en) * 1986-02-24 1990-11-06 Hoechst Celanese Corporation High resolution photoresist of imide containing polymers
JPS62235496A (ja) * 1986-04-04 1987-10-15 Hitachi Chem Co Ltd レジストパタ−ンを有する基板の製造法
US4939070A (en) * 1986-07-28 1990-07-03 Brunsvold William R Thermally stable photoresists with high sensitivity
US4931379A (en) * 1986-10-23 1990-06-05 International Business Machines Corporation High sensitivity resists having autodecomposition temperatures greater than about 160° C.
EP0662636A3 (de) * 1986-10-23 1995-11-22 Ciba Geigy Ag Bilderzeugungsverfahren.
GB8708747D0 (en) * 1987-04-11 1987-05-20 Ciba Geigy Ag Formation of image
US4810613A (en) * 1987-05-22 1989-03-07 Hoechst Celanese Corporation Blocked monomer and polymers therefrom for use as photoresists
JPS6420694A (en) * 1987-07-15 1989-01-24 Kansai Paint Co Ltd Manufacture of printed wiring board
JPH07119374B2 (ja) * 1987-11-06 1995-12-20 関西ペイント株式会社 ポジ型感光性カチオン電着塗料組成物
US4996136A (en) * 1988-02-25 1991-02-26 At&T Bell Laboratories Radiation sensitive materials and devices made therewith
US4898656A (en) * 1988-03-28 1990-02-06 Kansai Paint Co., Ltd. Electrodeposition coating process of photoresist for printed circuit board
DE3817010A1 (de) * 1988-05-19 1989-11-30 Basf Ag Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern
DE3817011A1 (de) * 1988-05-19 1989-11-30 Basf Ag Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern
EP0366590B2 (de) * 1988-10-28 2001-03-21 International Business Machines Corporation Positiv arbeitende hochempfindliche Photolack-Zusammensetzung
GB8827847D0 (en) * 1988-11-29 1988-12-29 Ciba Geigy Ag Method
JP2804579B2 (ja) * 1989-02-14 1998-09-30 関西ペイント株式会社 ポジ型感光性電着塗料組成物及びこれを用いた回路板の製造方法
JP2721843B2 (ja) * 1989-03-23 1998-03-04 関西ペイント株式会社 プリント配線板の製造方法
US5004672A (en) * 1989-07-10 1991-04-02 Shipley Company Inc. Electrophoretic method for applying photoresist to three dimensional circuit board substrate
DE3935875A1 (de) * 1989-10-27 1991-05-02 Basf Ag Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern
GB8923459D0 (en) * 1989-10-18 1989-12-06 Minnesota Mining & Mfg Positive-acting photoresist compositions
US5650261A (en) * 1989-10-27 1997-07-22 Rohm And Haas Company Positive acting photoresist comprising a photoacid, a photobase and a film forming acid-hardening resin system
US5055164A (en) * 1990-03-26 1991-10-08 Shipley Company Inc. Electrodepositable photoresists for manufacture of hybrid circuit boards
US5045431A (en) * 1990-04-24 1991-09-03 International Business Machines Corporation Dry film, aqueous processable photoresist compositions
EP0467841A3 (en) * 1990-07-18 1992-10-28 Ciba-Geigy Ag Benzoic acid ester comprising an olefinically unsaturated substituant
JPH0539444A (ja) * 1990-11-30 1993-02-19 Hitachi Chem Co Ltd ポジ型感光性アニオン電着塗料樹脂組成物、これを用いた電着塗装浴、電着塗装法及びプリント回路板の製造方法
JPH04258957A (ja) * 1991-02-14 1992-09-14 Nippon Paint Co Ltd ポジ型感光性電着樹脂組成物
JPH05247386A (ja) * 1991-11-27 1993-09-24 Hitachi Chem Co Ltd ポジ型感光性アニオン電着塗料樹脂組成物、ポジ型感光性アニオン電着塗料、電着塗装浴、電着塗装法及びプリント回路板の製造法

Also Published As

Publication number Publication date
JPH06289609A (ja) 1994-10-18
US5384229A (en) 1995-01-24
EP0568827A2 (de) 1993-11-10
EP0568827A3 (de) 1995-08-09
EP0568827B1 (de) 2000-08-02

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Legal Events

Date Code Title Description
8332 No legal effect for de