DE69328381T2 - Vorrichtung zur messung von kraftkomponenten in monokristallinem material, methode zur herstellung einer solchen vorrichtung sowie deren anwendung - Google Patents

Vorrichtung zur messung von kraftkomponenten in monokristallinem material, methode zur herstellung einer solchen vorrichtung sowie deren anwendung

Info

Publication number
DE69328381T2
DE69328381T2 DE69328381T DE69328381T DE69328381T2 DE 69328381 T2 DE69328381 T2 DE 69328381T2 DE 69328381 T DE69328381 T DE 69328381T DE 69328381 T DE69328381 T DE 69328381T DE 69328381 T2 DE69328381 T2 DE 69328381T2
Authority
DE
Germany
Prior art keywords
monocristalline
producing
application
force components
measuring force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69328381T
Other languages
English (en)
Other versions
DE69328381D1 (de
Inventor
Gert Andersson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69328381D1 publication Critical patent/DE69328381D1/de
Application granted granted Critical
Publication of DE69328381T2 publication Critical patent/DE69328381T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/133—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with piezoelectric counterbalancing means
DE69328381T 1992-12-03 1993-12-02 Vorrichtung zur messung von kraftkomponenten in monokristallinem material, methode zur herstellung einer solchen vorrichtung sowie deren anwendung Expired - Lifetime DE69328381T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9203648A SE500615C2 (sv) 1992-12-03 1992-12-03 Anordning för mätning av kraftkomponenter, förfarande för framställning av dylik samt användning därav.
PCT/SE1993/001040 WO1994012886A1 (en) 1992-12-03 1993-12-02 A device for measuring force components in monocristalline material, a method for manufacturing such a device and a use of such a device

Publications (2)

Publication Number Publication Date
DE69328381D1 DE69328381D1 (de) 2000-05-18
DE69328381T2 true DE69328381T2 (de) 2000-12-28

Family

ID=20388021

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69328381T Expired - Lifetime DE69328381T2 (de) 1992-12-03 1993-12-02 Vorrichtung zur messung von kraftkomponenten in monokristallinem material, methode zur herstellung einer solchen vorrichtung sowie deren anwendung

Country Status (5)

Country Link
EP (1) EP0738396B1 (de)
JP (1) JPH08504035A (de)
DE (1) DE69328381T2 (de)
SE (1) SE500615C2 (de)
WO (1) WO1994012886A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9416683D0 (en) * 1994-08-18 1994-10-19 British Tech Group Accelerometer
US5962788A (en) * 1994-08-18 1999-10-05 Btg International Limited Transducer
SE9500729L (sv) * 1995-02-27 1996-08-28 Gert Andersson Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
US5883012A (en) * 1995-12-21 1999-03-16 Motorola, Inc. Method of etching a trench into a semiconductor substrate
DE19649715C2 (de) * 1996-11-30 2001-07-12 Telefunken Microelectron Anordnung zur Messung von Beschleunigungen
DE19715575C1 (de) * 1997-04-15 1998-09-24 Telefunken Microelectron Verfahren zur richtungsselektiven Ausrichtung einer passiven Sicherheitseinrichtung
SE9800194D0 (sv) * 1998-01-23 1998-01-23 Gert Andersson Anordning för mätning av vinkelhastighet
DE19939984C2 (de) * 1999-08-24 2001-09-13 Daimler Chrysler Ag Verfahren zur richtungsselektiven Ausrichtung einer passiven Sicherheitseinrichtung
DE10002471A1 (de) 2000-01-21 2001-07-26 Daimler Chrysler Ag Verfahren zum Betreiben einer Sensorbaugruppe mit richtungsempfindlichen Sensoren sowie entsprechende Beschleunigungsaufnehmergruppe
WO2005088317A1 (de) * 2004-03-16 2005-09-22 Continental Teves Ag & Co.Ohg Sensoranordnung
WO2012098901A1 (ja) * 2011-01-20 2012-07-26 パナソニック株式会社 加速度センサ
EP2711720B1 (de) 2012-09-25 2019-05-22 RISE Acreo AB Vorrichtung zum Messen von Kraftkomponenten und Herstellungsverfahren dafür

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8718004D0 (en) * 1987-07-29 1987-12-16 Marconi Co Ltd Accelerometer
DE3741036A1 (de) * 1987-12-03 1989-06-15 Fraunhofer Ges Forschung Mikromechanischer beschleunigungsmesser
US4951510A (en) * 1988-07-14 1990-08-28 University Of Hawaii Multidimensional force sensor

Also Published As

Publication number Publication date
EP0738396A1 (de) 1996-10-23
SE500615C2 (sv) 1994-07-25
JPH08504035A (ja) 1996-04-30
DE69328381D1 (de) 2000-05-18
WO1994012886A1 (en) 1994-06-09
EP0738396B1 (de) 2000-04-12
SE9203648D0 (sv) 1992-12-03
SE9203648L (sv) 1994-06-04

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Legal Events

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