DE69325055T2 - Orientierte polykristalline dünne Filme aus Übergangsmetallchalcogeniden - Google Patents
Orientierte polykristalline dünne Filme aus ÜbergangsmetallchalcogenidenInfo
- Publication number
- DE69325055T2 DE69325055T2 DE69325055T DE69325055T DE69325055T2 DE 69325055 T2 DE69325055 T2 DE 69325055T2 DE 69325055 T DE69325055 T DE 69325055T DE 69325055 T DE69325055 T DE 69325055T DE 69325055 T2 DE69325055 T2 DE 69325055T2
- Authority
- DE
- Germany
- Prior art keywords
- transition metal
- thin films
- films made
- polycrystalline thin
- metal chalcogenides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
- C23C14/5813—Thermal treatment using lasers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
- C23C14/5833—Ion beam bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5866—Treatment with sulfur, selenium or tellurium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/46—Sulfur-, selenium- or tellurium-containing compounds
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IL10244092A IL102440A (en) | 1992-07-08 | 1992-07-08 | Oriented polycrystalline thin films and fullerene-like structures of transition metal chalcogenides |
IL104513A IL104513A0 (en) | 1993-01-26 | 1993-01-26 | Oriented polycrystalline thin films or transition metal chalcogenides |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69325055D1 DE69325055D1 (de) | 1999-07-01 |
DE69325055T2 true DE69325055T2 (de) | 2000-03-09 |
Family
ID=26322475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69325055T Expired - Lifetime DE69325055T2 (de) | 1992-07-08 | 1993-07-07 | Orientierte polykristalline dünne Filme aus Übergangsmetallchalcogeniden |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0580019B1 (de) |
JP (1) | JP3302108B2 (de) |
DE (1) | DE69325055T2 (de) |
ES (1) | ES2135427T3 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008051520A1 (de) * | 2008-10-13 | 2010-04-22 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Verfahren zur Erzeugung einer (001)-texturierten Kristallschicht aus einem photoaktiven Schichtgitter-Halbleiter auf einer metallisch leitfähigen Schicht unter Beteiligung eines Metallpromoters |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL118378A0 (en) * | 1996-05-22 | 1996-09-12 | Yeda Res & Dev | Method and apparatus for preparing inorganic fullerene-like nanoparticles of transition metal chalcogenides having predetermined size and shape |
IL119719A0 (en) | 1996-11-29 | 1997-02-18 | Yeda Res & Dev | Inorganic fullerene-like structures of metal chalcogenides |
CH690720A5 (de) | 1996-12-18 | 2000-12-29 | Eidgenoess Tech Hochschule | Nanotubes, Verwendung solcher Nanotubes sowie Verfahren zu deren Herstellung. |
US6528171B1 (en) | 1999-03-03 | 2003-03-04 | Widia Gmbh | Tool with a molybdenum sulfide containing coating and method for its production |
DE19916403C1 (de) * | 1999-04-06 | 2000-10-12 | Hahn Meitner Inst Berlin Gmbh | Verfahren zur Herstellung dünner, schwer löslicher Beschichtungen |
IL129718A0 (en) | 1999-05-02 | 2000-02-29 | Yeda Res & Dev | Synthesis of nanotubes of transition metal chalcogenides |
GB2360790A (en) * | 2000-03-28 | 2001-10-03 | Gehan Anil Joseph Amaratunga | Low friction coatings produced by cathodic arc evaporation |
EP1486582A1 (de) * | 2003-06-13 | 2004-12-15 | Asulab S.A. | Mikromechanisches Bauelement mit geringer Reibung |
KR101354910B1 (ko) * | 2005-04-07 | 2014-01-22 | 에이.와이.와이.티. 테크놀로지컬 어플리케이션즈 앤드 데이타 업데이트 리미티드 | 무기 풀러렌-유사 나노입자의 제조 공정 및 제조장치 |
AU2006248559B2 (en) * | 2005-05-17 | 2012-10-11 | Hadasit Medical Research Services & Development Ltd. | Low friction coatings for use in dental and medical devices |
FR2949786B1 (fr) | 2009-09-10 | 2013-07-05 | Total Raffinage Marketing | Composition de graisse. |
KR101500944B1 (ko) | 2013-03-22 | 2015-03-10 | 경희대학교 산학협력단 | 칼코겐 화합물의 2차원 대면적 성장 방법, cmos형 구조체의 제조 방법, 칼코겐 화합물의 막, 칼코겐 화합물의 막을 포함하는 전자 소자 및 cmos형 구조체 |
KR101464173B1 (ko) * | 2013-07-23 | 2014-11-21 | 영남대학교 산학협력단 | 전이금속 칼코겐화합물 박막 형성 방법 |
KR101638221B1 (ko) | 2013-09-02 | 2016-07-20 | 서울대학교산학협력단 | 전하 밀도파 특성 물질을 이용한 온도센서 |
WO2015102006A1 (en) | 2014-01-06 | 2015-07-09 | Yeda Research And Development Co. Ltd. | Attenuation of encrustation of medical devices using coatings of inorganic fullerene-like nanoparticles |
KR101503735B1 (ko) * | 2014-01-20 | 2015-03-19 | 연세대학교 산학협력단 | 원자층 증착법으로 증착된 금속 산화물을 이용한 금속 황화물 합성 방법 |
US9781838B2 (en) | 2014-02-24 | 2017-10-03 | Industry-Academic Cooperation Foundation, Yonsei University | Gas sensor and method of manufacturing the same |
KR101503438B1 (ko) | 2014-02-24 | 2015-03-18 | 연세대학교 산학협력단 | 가스 센서 제조 방법 및 그를 이용하여 제조된 가스 센서 |
FR3018079B1 (fr) | 2014-02-28 | 2017-06-23 | Total Marketing Services | Composition lubrifiante a base de nanoparticules metalliques |
KR101738214B1 (ko) * | 2014-06-17 | 2017-05-30 | 한양대학교 산학협력단 | 2차원 주석 구조체 및 그 제조 방법 |
EP3023390B1 (de) * | 2014-11-18 | 2019-04-10 | IMEC vzw | MoS2-Film-Bildung und -Übertragung in einem Substrat |
CN104846428B (zh) * | 2015-04-13 | 2017-04-05 | 山东大学 | 一种金属助熔剂法生长过渡金属硫属化合物晶体的方法 |
US10079144B2 (en) | 2015-04-22 | 2018-09-18 | Samsung Electronics Co., Ltd. | Composition for layered transition metal chalcogenide compound layer and method of forming layered transition metal chalcogenide compound layer |
CN109115764B (zh) * | 2018-07-30 | 2021-06-15 | 深圳瑞达生物股份有限公司 | 环保型尿液羟苯衍生物检测试剂及其制备方法 |
KR102301846B1 (ko) * | 2018-12-12 | 2021-09-15 | 한국세라믹기술원 | 전이금속 칼코겐화합물 박막의 제조 방법 및 이를 이용한 전자소자의 제조 방법 |
EP4080549A4 (de) * | 2019-12-17 | 2023-07-26 | Resonac Corporation | Verfahren zur herstellung einer passivierungsfolie |
CN111514916A (zh) * | 2020-05-12 | 2020-08-11 | 刘志国 | 一种制备氮掺杂钼基硫族化合物电解水析氢催化材料的方法 |
CN113235049A (zh) * | 2021-04-27 | 2021-08-10 | 清华-伯克利深圳学院筹备办公室 | 一种过渡金属硫化物薄膜及其制备方法和应用 |
WO2023230668A1 (en) * | 2022-06-02 | 2023-12-07 | Monash University | Transition metal di-chalcogenides |
-
1993
- 1993-07-07 ES ES93110852T patent/ES2135427T3/es not_active Expired - Lifetime
- 1993-07-07 DE DE69325055T patent/DE69325055T2/de not_active Expired - Lifetime
- 1993-07-07 EP EP93110852A patent/EP0580019B1/de not_active Expired - Lifetime
- 1993-07-08 JP JP16919493A patent/JP3302108B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008051520A1 (de) * | 2008-10-13 | 2010-04-22 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Verfahren zur Erzeugung einer (001)-texturierten Kristallschicht aus einem photoaktiven Schichtgitter-Halbleiter auf einer metallisch leitfähigen Schicht unter Beteiligung eines Metallpromoters |
Also Published As
Publication number | Publication date |
---|---|
EP0580019B1 (de) | 1999-05-26 |
ES2135427T3 (es) | 1999-11-01 |
DE69325055D1 (de) | 1999-07-01 |
JPH0769782A (ja) | 1995-03-14 |
JP3302108B2 (ja) | 2002-07-15 |
EP0580019A1 (de) | 1994-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69325055D1 (de) | Orientierte polykristalline dünne Filme aus Übergangsmetallchalcogeniden | |
DE69131279D1 (de) | Dünne filme | |
DE69319531D1 (de) | Ultradünnes Filmlaminat | |
DE69322026T2 (de) | Polypropylen-Zusammensetzungen und daraus gefertigte Filme | |
DE69424569D1 (de) | Poröser Film aus Polytetrafluoroethylen | |
BR9406774A (pt) | Filme metalizado e artigo decorativo | |
EP0454100A3 (en) | Method of forming silicon-based thin film and method of manufacturing thin film transistor using silicon-based thin film | |
DE69333685D1 (de) | Photographischer Film | |
DE69310036D1 (de) | Polypropylen-Zusammensetzungen und daraus gebildete Filme | |
DE69313796D1 (de) | Maskierband | |
DE69402713T2 (de) | Monolotisches substrat aus gewellter, dünner metallfolie | |
FI923649A (fi) | Foerfarande foer avskiljning av tellurium av kopparelektroraffineringsslam | |
DE69215608D1 (de) | Dünnschichttransistor und dessen Herstellungsmethode | |
DE69404213T2 (de) | Gleitstück aus Aluminiumlegierung | |
DE69332850T2 (de) | Porträtkamera | |
IL102440A0 (en) | Oriented polycrystalline thin films of transition metal chalcogenides | |
IL104513A0 (en) | Oriented polycrystalline thin films or transition metal chalcogenides | |
DE69219623T2 (de) | Dünnfilmsupraleiter und Herstellungsmethode | |
KR940006467U (ko) | 스퍼터 성막 장치 | |
AU4556593A (en) | Strip of tape | |
KR950008935U (ko) | 알미늄 증착 필름테이프 | |
AU3977793A (en) | Non-slip film leader and process of manufacture | |
AU5667199A (en) | Thin film hg-based superconductors and methods of fabrication thereof | |
KR950013336U (ko) | 콘돔 테이프 | |
KR930021851U (ko) | 문자나 도형이 표현되는 셔터 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8381 | Inventor (new situation) |
Inventor name: TENNE, RESHEF, 76231 REHOVOT, IL Inventor name: HODES, GARY, 73270 GEZER, IL Inventor name: MARGULIS, LEV, 76381 REHOVOT, IL Inventor name: GENUT, DR., MENACHEM, GIVATAIM, IL |