DE69322029D1 - Methode zur Untersuchung von Wafern für das Herstellen von lichtemittierenden Elementen - Google Patents

Methode zur Untersuchung von Wafern für das Herstellen von lichtemittierenden Elementen

Info

Publication number
DE69322029D1
DE69322029D1 DE69322029T DE69322029T DE69322029D1 DE 69322029 D1 DE69322029 D1 DE 69322029D1 DE 69322029 T DE69322029 T DE 69322029T DE 69322029 T DE69322029 T DE 69322029T DE 69322029 D1 DE69322029 D1 DE 69322029D1
Authority
DE
Germany
Prior art keywords
production
light
emitting elements
wafers
examining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69322029T
Other languages
English (en)
Other versions
DE69322029T2 (de
Inventor
Masato Yamada
Makoto Kawasaki
Yutaka Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69322029D1 publication Critical patent/DE69322029D1/de
Application granted granted Critical
Publication of DE69322029T2 publication Critical patent/DE69322029T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/0004—Devices characterised by their operation
    • H01L33/002—Devices characterised by their operation having heterojunctions or graded gap
    • H01L33/0025—Devices characterised by their operation having heterojunctions or graded gap comprising only AIIIBV compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Led Devices (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Semiconductor Lasers (AREA)
DE69322029T 1992-09-10 1993-09-06 Methode zur Untersuchung von Wafern für das Herstellen von lichtemittierenden Elementen Expired - Fee Related DE69322029T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26822292A JP2711966B2 (ja) 1992-09-10 1992-09-10 発光素子製造用ウエーハの検査方法

Publications (2)

Publication Number Publication Date
DE69322029D1 true DE69322029D1 (de) 1998-12-17
DE69322029T2 DE69322029T2 (de) 1999-06-24

Family

ID=17455612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69322029T Expired - Fee Related DE69322029T2 (de) 1992-09-10 1993-09-06 Methode zur Untersuchung von Wafern für das Herstellen von lichtemittierenden Elementen

Country Status (4)

Country Link
US (1) US5440384A (de)
EP (1) EP0587091B1 (de)
JP (1) JP2711966B2 (de)
DE (1) DE69322029T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4855266A (en) * 1987-01-13 1989-08-08 E. I. Du Pont De Nemours And Company High K dielectric composition for use in multilayer ceramic capacitors having copper internal electrodes
JP4105170B2 (ja) * 2005-03-02 2008-06-25 日本テキサス・インスツルメンツ株式会社 半導体装置およびその検査方法
KR101365363B1 (ko) * 2005-10-11 2014-02-20 비티 이미징 피티와이 리미티드 간접 밴드갭 반도체 구조 검사 방법 및 시스템
JP4153021B1 (ja) 2007-10-22 2008-09-17 日清紡績株式会社 太陽電池の検査装置
KR101101132B1 (ko) * 2007-11-23 2012-01-12 삼성엘이디 주식회사 발광소자 검사장치 및 이를 이용한 발광소자 검사방법
JP4235685B1 (ja) * 2008-07-01 2009-03-11 日清紡績株式会社 太陽電池の検査装置及び太陽電池の欠陥判定方法
DE112012002619T5 (de) * 2011-06-24 2014-04-17 Kla-Tencor Corp. Verfahren und Vorrichtung zur Inspektion von lichtemittierenden Halbleiterelementen mittels Photolumineszenz-Abbildung
KR101293493B1 (ko) * 2011-07-27 2013-08-07 삼성전자주식회사 발광소자 검사장치 및 이를 이용한 발광소자 검사방법
JP6051917B2 (ja) * 2013-02-18 2016-12-27 日亜化学工業株式会社 半導体発光素子の検査方法及び半導体発光素子の製造方法
JP5633099B1 (ja) * 2013-12-18 2014-12-03 レーザーテック株式会社 欠陥分類方法及び検査装置
JP6891510B2 (ja) * 2017-01-26 2021-06-18 株式会社リコー 面発光レーザ素子の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49107483A (de) * 1973-02-16 1974-10-12
US4442402A (en) * 1982-09-10 1984-04-10 Bell Telephone Laboratories, Incorporated Photoluminescence method of testing double heterostructure wafers
JPS6139596A (ja) * 1984-07-31 1986-02-25 Fujitsu Ltd 分布帰還型半導体レーザの製造方法
JPS6180888A (ja) * 1984-09-27 1986-04-24 Sony Corp 化合物半導体の評価方法
JPS61269389A (ja) * 1985-05-24 1986-11-28 Hitachi Ltd 半導体レ−ザ装置の製造方法
JPS63250835A (ja) * 1987-04-08 1988-10-18 Hitachi Cable Ltd エピタキシヤルウエハの検査方法

Also Published As

Publication number Publication date
EP0587091A1 (de) 1994-03-16
JP2711966B2 (ja) 1998-02-10
US5440384A (en) 1995-08-08
EP0587091B1 (de) 1998-11-11
JPH0697508A (ja) 1994-04-08
DE69322029T2 (de) 1999-06-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee