DE69318220D1 - Verfahren zur Bestimmung der Scharfeinstellung einer photolithographischen Belichtungsvorrichtung - Google Patents

Verfahren zur Bestimmung der Scharfeinstellung einer photolithographischen Belichtungsvorrichtung

Info

Publication number
DE69318220D1
DE69318220D1 DE69318220T DE69318220T DE69318220D1 DE 69318220 D1 DE69318220 D1 DE 69318220D1 DE 69318220 T DE69318220 T DE 69318220T DE 69318220 T DE69318220 T DE 69318220T DE 69318220 D1 DE69318220 D1 DE 69318220D1
Authority
DE
Germany
Prior art keywords
focus
determining
exposure device
photolithographic exposure
photolithographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69318220T
Other languages
English (en)
Other versions
DE69318220T2 (de
Inventor
Blandine Minghetti
Annie Tissier
Alain Prola
Eric Schwartz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orange SA
Original Assignee
France Telecom SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by France Telecom SA filed Critical France Telecom SA
Publication of DE69318220D1 publication Critical patent/DE69318220D1/de
Application granted granted Critical
Publication of DE69318220T2 publication Critical patent/DE69318220T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70641—Focus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing
DE69318220T 1992-07-10 1993-07-06 Verfahren zur Bestimmung der Scharfeinstellung einer photolithographischen Belichtungsvorrichtung Expired - Lifetime DE69318220T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9208610A FR2693565B1 (fr) 1992-07-10 1992-07-10 Procédé de réglage d'une machine d'exposition photolithographique et dispositif associé.

Publications (2)

Publication Number Publication Date
DE69318220D1 true DE69318220D1 (de) 1998-06-04
DE69318220T2 DE69318220T2 (de) 1998-11-19

Family

ID=9431808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318220T Expired - Lifetime DE69318220T2 (de) 1992-07-10 1993-07-06 Verfahren zur Bestimmung der Scharfeinstellung einer photolithographischen Belichtungsvorrichtung

Country Status (5)

Country Link
US (1) US5437948A (de)
EP (1) EP0578562B1 (de)
JP (1) JPH07183185A (de)
DE (1) DE69318220T2 (de)
FR (1) FR2693565B1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970006931B1 (ko) * 1993-11-25 1997-04-30 현대전자산업 주식회사 포토레지스트 패턴 형성방법
US5898479A (en) * 1997-07-10 1999-04-27 Vlsi Technology, Inc. System for monitoring optical properties of photolithography equipment
KR100500939B1 (ko) * 1997-12-27 2005-10-14 주식회사 하이닉스반도체 레티클 위치에서의 자동 초점 조정/편평도 조정
JPH11354421A (ja) * 1998-06-03 1999-12-24 Nikon Corp 荷電粒子線露光装置
US6430464B1 (en) * 1999-03-09 2002-08-06 International Business Machines Corporation Stepper alignment process
US7561270B2 (en) * 2000-08-24 2009-07-14 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
TW527526B (en) * 2000-08-24 2003-04-11 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby
JP2012063321A (ja) 2010-09-17 2012-03-29 Hamamatsu Photonics Kk 反射率測定装置、反射率測定方法、膜厚測定装置及び膜厚測定方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4759626A (en) * 1986-11-10 1988-07-26 Hewlett-Packard Company Determination of best focus for step and repeat projection aligners
US5077464A (en) * 1988-07-20 1991-12-31 Applied Materials, Inc. Method and apparatus for endpoint detection in a semiconductor wafer etching system
FR2642188B1 (fr) 1988-12-30 1991-08-30 Tissier Annie Procede de determination de la mise au point d'une machine d'exposition de photolithographie
JPH0458250A (ja) * 1990-06-28 1992-02-25 Miyazaki Oki Electric Co Ltd オートフォーカス方法
US5674652A (en) * 1991-02-28 1997-10-07 University Of New Mexico Diffracted light from latent images in photoresist for exposure control
US5303002A (en) * 1993-03-31 1994-04-12 Intel Corporation Method and apparatus for enhancing the focus latitude in lithography

Also Published As

Publication number Publication date
EP0578562B1 (de) 1998-04-29
EP0578562A1 (de) 1994-01-12
FR2693565A1 (fr) 1994-01-14
JPH07183185A (ja) 1995-07-21
FR2693565B1 (fr) 1994-09-23
DE69318220T2 (de) 1998-11-19
US5437948A (en) 1995-08-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition