DE69316105T2 - Optisches Filter aus Störstellenhalbleiter - Google Patents
Optisches Filter aus StörstellenhalbleiterInfo
- Publication number
- DE69316105T2 DE69316105T2 DE69316105T DE69316105T DE69316105T2 DE 69316105 T2 DE69316105 T2 DE 69316105T2 DE 69316105 T DE69316105 T DE 69316105T DE 69316105 T DE69316105 T DE 69316105T DE 69316105 T2 DE69316105 T2 DE 69316105T2
- Authority
- DE
- Germany
- Prior art keywords
- optical filter
- impurity semiconductor
- filter made
- impurity
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012535 impurity Substances 0.000 title 1
- 230000003287 optical effect Effects 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/207—Filters comprising semiconducting materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
- H01L31/02165—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors using interference filters, e.g. multilayer dielectric filters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US91240492A | 1992-07-13 | 1992-07-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69316105D1 DE69316105D1 (de) | 1998-02-12 |
DE69316105T2 true DE69316105T2 (de) | 1998-04-23 |
Family
ID=25431865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69316105T Expired - Lifetime DE69316105T2 (de) | 1992-07-13 | 1993-07-13 | Optisches Filter aus Störstellenhalbleiter |
Country Status (5)
Country | Link |
---|---|
US (1) | US5463494A (de) |
EP (1) | EP0583069B1 (de) |
JP (1) | JPH07101241B2 (de) |
DE (1) | DE69316105T2 (de) |
IL (1) | IL106265A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10393617B4 (de) * | 2002-11-05 | 2015-10-22 | Mattson Technology Inc. | Vorrichtung und Verfahren zum Dämpfen von Streulicht in Substratbehandlungskammern |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6002792A (en) * | 1993-11-16 | 1999-12-14 | Hamamatsu Photonics Kk | Semiconductor device inspection system |
US6043550A (en) * | 1997-09-03 | 2000-03-28 | Sumitomo Electric Industries, Ltd. | Photodiode and photodiode module |
US6269202B1 (en) * | 1997-10-10 | 2001-07-31 | Dicon Fiberoptics, Inc. | Highly temperature stable filter for fiberoptic applications and system for altering the wavelength or other characteristics of optical devices |
FI105598B (fi) * | 1997-12-10 | 2000-09-15 | Vaisala Oyj | Optisesti musta pinta ja menetelmä sen valmistamiseksi |
JP2004507781A (ja) * | 2000-08-21 | 2004-03-11 | スリーエム イノベイティブ プロパティズ カンパニー | 損失強化型反射光フィルタ |
US6809859B2 (en) * | 2002-07-31 | 2004-10-26 | Semrock, Inc. | Optical filter and fluorescence spectroscopy system incorporating the same |
US7411679B2 (en) * | 2002-07-31 | 2008-08-12 | Semrock, Inc. | Optical filter and fluorescence spectroscopy system incorporating the same |
US8107167B2 (en) * | 2009-05-04 | 2012-01-31 | The Regents Of The University Of Michigan | Spatial-dispersion-free spectral combining of pulsed high peak power fiber laser beams |
US20130057959A1 (en) * | 2011-09-01 | 2013-03-07 | Theodore D. Fay | Highly dispersive optical element with binary transmissibility |
KR102171020B1 (ko) | 2013-10-16 | 2020-10-29 | 삼성전자주식회사 | 엑스레이 흡수 필터를 갖는 엑스레이 시스템, 반도체 패키지, 및 트레이 |
WO2020180899A1 (en) * | 2019-03-05 | 2020-09-10 | Quantum-Si Incorporated | Optical absorption filter for an integrated device |
EP4100704A1 (de) * | 2020-02-06 | 2022-12-14 | ams-OSRAM International GmbH | Integriertes photodetektierendes optoelektronisches halbleiterbauelement |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE787599A (fr) * | 1971-08-16 | 1973-02-16 | Battelle Memorial Institute | Vitrage filtrant antisolaire et isolant thermique |
DE2637616A1 (de) * | 1976-08-20 | 1978-02-23 | Siemens Ag | Filter fuer fotodetektoren |
JPS5945943A (ja) * | 1982-09-07 | 1984-03-15 | Nippon Soken Inc | 熱線遮断ガラス |
US4497974A (en) * | 1982-11-22 | 1985-02-05 | Exxon Research & Engineering Co. | Realization of a thin film solar cell with a detached reflector |
JPS60171775A (ja) * | 1984-02-17 | 1985-09-05 | Hitachi Ltd | 発光素子用フイルタ |
US4528418A (en) * | 1984-02-24 | 1985-07-09 | Energy Conversion Devices, Inc. | Photoresponsive semiconductor device having a double layer anti-reflective coating |
FR2586485B1 (fr) * | 1985-08-23 | 1991-04-19 | Thomson Csf | Dispositif optique a filtrage spectral selectif |
JPS6249335A (ja) * | 1985-08-29 | 1987-03-04 | Agency Of Ind Science & Technol | 光制御素子 |
JPH02177379A (ja) * | 1988-12-27 | 1990-07-10 | Kyocera Corp | 赤外線受光素子 |
-
1993
- 1993-07-07 IL IL10626593A patent/IL106265A/en not_active IP Right Cessation
- 1993-07-13 EP EP93305463A patent/EP0583069B1/de not_active Expired - Lifetime
- 1993-07-13 DE DE69316105T patent/DE69316105T2/de not_active Expired - Lifetime
- 1993-07-13 JP JP5173247A patent/JPH07101241B2/ja not_active Expired - Lifetime
- 1993-12-23 US US08/174,573 patent/US5463494A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10393617B4 (de) * | 2002-11-05 | 2015-10-22 | Mattson Technology Inc. | Vorrichtung und Verfahren zum Dämpfen von Streulicht in Substratbehandlungskammern |
Also Published As
Publication number | Publication date |
---|---|
JPH06174917A (ja) | 1994-06-24 |
EP0583069B1 (de) | 1998-01-07 |
US5463494A (en) | 1995-10-31 |
EP0583069A1 (de) | 1994-02-16 |
DE69316105D1 (de) | 1998-02-12 |
IL106265A (en) | 1999-07-14 |
JPH07101241B2 (ja) | 1995-11-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: RAYTHEON CO. (N.D.GES.D. STAATES DELAWARE), LEXING |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: WITTE, WELLER & PARTNER, 70178 STUTTGART |