KR940017859U - 반도체 제조장치용 필터 - Google Patents

반도체 제조장치용 필터

Info

Publication number
KR940017859U
KR940017859U KR2019920025117U KR920025117U KR940017859U KR 940017859 U KR940017859 U KR 940017859U KR 2019920025117 U KR2019920025117 U KR 2019920025117U KR 920025117 U KR920025117 U KR 920025117U KR 940017859 U KR940017859 U KR 940017859U
Authority
KR
South Korea
Prior art keywords
filter
semiconductor manufacturing
manufacturing equipment
equipment
semiconductor
Prior art date
Application number
KR2019920025117U
Other languages
English (en)
Other versions
KR960000789Y1 (ko
Inventor
이중현
한우성
박춘근
Original Assignee
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자 주식회사 filed Critical 삼성전자 주식회사
Priority to KR92025117U priority Critical patent/KR960000789Y1/ko
Publication of KR940017859U publication Critical patent/KR940017859U/ko
Priority to KR2019950027629U priority patent/KR960000713Y1/ko
Application granted granted Critical
Publication of KR960000789Y1 publication Critical patent/KR960000789Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/265—Selective reaction with inorganic or organometallic reagents after image-wise exposure, e.g. silylation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
KR92025117U 1992-12-11 1992-12-11 반도체 제조장치용 필터 KR960000789Y1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR92025117U KR960000789Y1 (ko) 1992-12-11 1992-12-11 반도체 제조장치용 필터
KR2019950027629U KR960000713Y1 (ko) 1992-12-11 1995-09-30 기상도포장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92025117U KR960000789Y1 (ko) 1992-12-11 1992-12-11 반도체 제조장치용 필터

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR2019950027629U Division KR960000713Y1 (ko) 1992-12-11 1995-09-30 기상도포장치

Publications (2)

Publication Number Publication Date
KR940017859U true KR940017859U (ko) 1994-07-28
KR960000789Y1 KR960000789Y1 (ko) 1996-01-27

Family

ID=19346302

Family Applications (2)

Application Number Title Priority Date Filing Date
KR92025117U KR960000789Y1 (ko) 1992-12-11 1992-12-11 반도체 제조장치용 필터
KR2019950027629U KR960000713Y1 (ko) 1992-12-11 1995-09-30 기상도포장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR2019950027629U KR960000713Y1 (ko) 1992-12-11 1995-09-30 기상도포장치

Country Status (1)

Country Link
KR (2) KR960000789Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101108775B1 (ko) * 2005-06-30 2012-02-24 엘지디스플레이 주식회사 드라이 에칭 장비

Also Published As

Publication number Publication date
KR960000713Y1 (ko) 1996-01-25
KR960000789Y1 (ko) 1996-01-27

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