DE69315665D1 - Ein mechanischer Sensor - Google Patents
Ein mechanischer SensorInfo
- Publication number
- DE69315665D1 DE69315665D1 DE69315665T DE69315665T DE69315665D1 DE 69315665 D1 DE69315665 D1 DE 69315665D1 DE 69315665 T DE69315665 T DE 69315665T DE 69315665 T DE69315665 T DE 69315665T DE 69315665 D1 DE69315665 D1 DE 69315665D1
- Authority
- DE
- Germany
- Prior art keywords
- mechanical sensor
- mechanical
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/127—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using inductive means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0073—Printed inductances with a special conductive pattern, e.g. flat spiral
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Coils Or Transformers For Communication (AREA)
- Hall/Mr Elements (AREA)
- Measuring Magnetic Variables (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28266392 | 1992-10-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69315665D1 true DE69315665D1 (de) | 1998-01-22 |
DE69315665T2 DE69315665T2 (de) | 1998-04-09 |
Family
ID=17655442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69315665T Expired - Fee Related DE69315665T2 (de) | 1992-10-21 | 1993-10-21 | Ein mechanischer Sensor |
Country Status (4)
Country | Link |
---|---|
US (1) | US5450755A (de) |
EP (1) | EP0594180B1 (de) |
KR (1) | KR970000027B1 (de) |
DE (1) | DE69315665T2 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5939966A (en) * | 1994-06-02 | 1999-08-17 | Ricoh Company, Ltd. | Inductor, transformer, and manufacturing method thereof |
US5589770A (en) * | 1994-06-27 | 1996-12-31 | Matsushita Electric Industrial Co., Ltd. | Mechanical sensor for detecting stress or distortion with high sensitivity |
KR100231356B1 (ko) * | 1994-09-12 | 1999-11-15 | 모리시타요이찌 | 적층형 세라믹칩 인덕터 및 그 제조방법 |
US6911887B1 (en) | 1994-09-12 | 2005-06-28 | Matsushita Electric Industrial Co., Ltd. | Inductor and method for producing the same |
US5580084A (en) * | 1995-09-12 | 1996-12-03 | Artistic Analytical Methods, Inc. | System and method for controlling vehicle safety device |
JPH09213530A (ja) * | 1996-01-30 | 1997-08-15 | Alps Electric Co Ltd | 平面トランス |
US5757623A (en) * | 1996-12-30 | 1998-05-26 | General Electric Company | Low-noise, high-Q stripline inductor |
US5847634A (en) * | 1997-07-30 | 1998-12-08 | Lucent Technologies Inc. | Article comprising an inductive element with a magnetic thin film |
US6417754B1 (en) * | 1997-12-08 | 2002-07-09 | The Regents Of The University Of California | Three-dimensional coil inductor |
DE19809794A1 (de) * | 1998-03-09 | 1999-09-16 | Gatzen Hans Heinrich | Induktiver Mikrosensor zur Messung von Dehnung |
JPH11261325A (ja) * | 1998-03-10 | 1999-09-24 | Shiro Sugimura | コイル素子と、その製造方法 |
US6147582A (en) * | 1999-03-04 | 2000-11-14 | Raytheon Company | Substrate supported three-dimensional micro-coil |
US6227343B1 (en) | 1999-03-30 | 2001-05-08 | Millenium Enterprises Ltd. | Dual coil coin identifier |
US6240622B1 (en) | 1999-07-09 | 2001-06-05 | Micron Technology, Inc. | Integrated circuit inductors |
DE102004032482B4 (de) * | 2004-07-05 | 2008-01-31 | Infineon Technologies Ag | Sensor und Verfahren zum Erfassen einer Verformung |
KR100600808B1 (ko) * | 2004-12-08 | 2006-07-18 | 주식회사 엠디티 | 자왜효과를 이용한 가변 인덕터형 mems 압력센서 |
US8486545B2 (en) * | 2005-09-28 | 2013-07-16 | Southwest Research Institute | Systems and methods for flaw detection and monitoring at elevated temperatures with wireless communication using surface embedded, monolithically integrated, thin-film, magnetically actuated sensors, and methods for fabricating the sensors |
US7875955B1 (en) | 2006-03-09 | 2011-01-25 | National Semiconductor Corporation | On-chip power inductor |
US8250928B2 (en) | 2008-07-09 | 2012-08-28 | The Boeing Company | Measurement of strain in an adhesively bonded joint including magnetostrictive material |
US8102236B1 (en) * | 2010-12-14 | 2012-01-24 | International Business Machines Corporation | Thin film inductor with integrated gaps |
US8717136B2 (en) * | 2012-01-10 | 2014-05-06 | International Business Machines Corporation | Inductor with laminated yoke |
US9064628B2 (en) | 2012-05-22 | 2015-06-23 | International Business Machines Corporation | Inductor with stacked conductors |
US9523720B2 (en) | 2013-03-15 | 2016-12-20 | Infineon Technologies Ag | Multiple current sensor device, a multiple current shunt device and a method for providing a sensor signal |
US9324489B2 (en) * | 2014-03-31 | 2016-04-26 | International Business Machines Corporation | Thin film inductor with extended yokes |
DE102016209322A1 (de) | 2016-05-30 | 2017-11-30 | Robert Bosch Gmbh | Sensorvorrichtung und Verfahren zur Ermittlung einer mechanischen Größe |
DE102016219309B4 (de) | 2016-10-05 | 2024-05-02 | Vitesco Technologies GmbH | Vibrationsfeste Schaltungsanordnung zum elektrischen Verbinden zweier Anschlussbereiche sowie Kraftfahrzeug und Verfahren zum Herstellen der Schaltungsanordnung |
JP7006216B2 (ja) * | 2017-12-13 | 2022-02-10 | 株式会社ジェイテクト | 触知センサ及びアンドロイド |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4494100A (en) * | 1982-07-12 | 1985-01-15 | Motorola, Inc. | Planar inductors |
JPH06100444B2 (ja) * | 1985-07-09 | 1994-12-12 | 住友電気工業株式会社 | 歪センサーの製造方法 |
JPS649330A (en) * | 1987-06-30 | 1989-01-12 | Toyoda Automatic Loom Works | Torque detector |
JPS6474705A (en) * | 1987-09-17 | 1989-03-20 | Toshiba Corp | Plane inductor |
JPH01173702A (ja) * | 1987-12-28 | 1989-07-10 | Matsushita Electric Ind Co Ltd | インダクタンス素子 |
JPH01212301A (ja) * | 1988-02-19 | 1989-08-25 | Toshiba Corp | ひずみセンサ |
JPH0210233A (ja) * | 1988-06-29 | 1990-01-16 | Mitsubishi Electric Corp | 歪検出器 |
US5070317A (en) * | 1989-01-17 | 1991-12-03 | Bhagat Jayant K | Miniature inductor for integrated circuits and devices |
US4933209A (en) * | 1989-06-28 | 1990-06-12 | Hewlett-Packard Company | Method of making a thin film recording head apparatus utilizing polyimide films |
JPH03188607A (ja) * | 1989-12-18 | 1991-08-16 | Seiko Epson Corp | トランス |
JPH03191802A (ja) * | 1989-12-21 | 1991-08-21 | Sumitomo Electric Ind Ltd | 感歪素子 |
KR960006848B1 (ko) * | 1990-05-31 | 1996-05-23 | 가부시끼가이샤 도시바 | 평면형 자기소자 |
JPH0442004A (ja) * | 1990-06-07 | 1992-02-12 | Toshiba Corp | ひずみセンサおよびその製造方法 |
JPH0794965B2 (ja) * | 1990-12-28 | 1995-10-11 | ヤマハ株式会社 | 曲げ検出器 |
JP3141893B2 (ja) * | 1991-06-17 | 2001-03-07 | 株式会社東芝 | 平面インダクタ |
-
1993
- 1993-10-19 KR KR1019930021661A patent/KR970000027B1/ko not_active IP Right Cessation
- 1993-10-19 US US08/138,744 patent/US5450755A/en not_active Expired - Fee Related
- 1993-10-21 DE DE69315665T patent/DE69315665T2/de not_active Expired - Fee Related
- 1993-10-21 EP EP93117098A patent/EP0594180B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR940009681A (ko) | 1994-05-20 |
EP0594180A3 (de) | 1995-02-15 |
US5450755A (en) | 1995-09-19 |
KR970000027B1 (ko) | 1997-01-04 |
EP0594180A2 (de) | 1994-04-27 |
DE69315665T2 (de) | 1998-04-09 |
EP0594180B1 (de) | 1997-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |