DE69314567T2 - Verkleinerndes katadioptrisches Projektionssystem - Google Patents

Verkleinerndes katadioptrisches Projektionssystem

Info

Publication number
DE69314567T2
DE69314567T2 DE69314567T DE69314567T DE69314567T2 DE 69314567 T2 DE69314567 T2 DE 69314567T2 DE 69314567 T DE69314567 T DE 69314567T DE 69314567 T DE69314567 T DE 69314567T DE 69314567 T2 DE69314567 T2 DE 69314567T2
Authority
DE
Germany
Prior art keywords
downsizing
projection system
catadioptric projection
catadioptric
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69314567T
Other languages
English (en)
Other versions
DE69314567D1 (de
Inventor
Yutaka Virunubu Hodoga Suenaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4202359A external-priority patent/JPH05188298A/ja
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE69314567D1 publication Critical patent/DE69314567D1/de
Publication of DE69314567T2 publication Critical patent/DE69314567T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0812—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
DE69314567T 1992-07-29 1993-07-28 Verkleinerndes katadioptrisches Projektionssystem Expired - Fee Related DE69314567T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4202359A JPH05188298A (ja) 1991-08-05 1992-07-29 反射屈折縮小投影光学系

Publications (2)

Publication Number Publication Date
DE69314567D1 DE69314567D1 (de) 1997-11-20
DE69314567T2 true DE69314567T2 (de) 1998-02-26

Family

ID=16456206

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69314567T Expired - Fee Related DE69314567T2 (de) 1992-07-29 1993-07-28 Verkleinerndes katadioptrisches Projektionssystem

Country Status (2)

Country Link
EP (1) EP0581585B1 (de)
DE (1) DE69314567T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3819048B2 (ja) * 1995-03-15 2006-09-06 株式会社ニコン 投影光学系及びそれを備えた露光装置並びに露光方法
DE19639586A1 (de) * 1996-09-26 1998-04-02 Zeiss Carl Fa Katadioptrisches Mikrolithographie-Reduktionsobjektiv
US6631036B2 (en) 1996-09-26 2003-10-07 Carl-Zeiss-Stiftung Catadioptric objective
USRE42570E1 (en) 1996-09-26 2011-07-26 Carl Zeiss Smt Gmbh Catadioptric objective
US6169627B1 (en) 1996-09-26 2001-01-02 Carl-Zeiss-Stiftung Catadioptric microlithographic reduction objective
CN116699827B (zh) * 2023-07-19 2023-10-03 清华大学 用于中大口径光谱巡天望远镜的光学系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1199515B (de) * 1961-12-23 1965-08-26 Rodenstock Optik G Spiegelobjektiv
US4812028A (en) * 1984-07-23 1989-03-14 Nikon Corporation Reflection type reduction projection optical system
JPS61156737A (ja) * 1984-12-27 1986-07-16 Canon Inc 回路の製造方法及び露光装置
US4747678A (en) * 1986-12-17 1988-05-31 The Perkin-Elmer Corporation Optical relay system with magnification
EP0527043B1 (de) * 1991-08-05 1997-01-22 Nikon Corporation Verkleinerndes katadioptrisches Projektionssystem

Also Published As

Publication number Publication date
DE69314567D1 (de) 1997-11-20
EP0581585B1 (de) 1997-10-15
EP0581585A1 (de) 1994-02-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: WESER & KOLLEGEN, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee