DE69311105D1 - Schleifmittel - Google Patents

Schleifmittel

Info

Publication number
DE69311105D1
DE69311105D1 DE69311105T DE69311105T DE69311105D1 DE 69311105 D1 DE69311105 D1 DE 69311105D1 DE 69311105 T DE69311105 T DE 69311105T DE 69311105 T DE69311105 T DE 69311105T DE 69311105 D1 DE69311105 D1 DE 69311105D1
Authority
DE
Germany
Prior art keywords
abrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69311105T
Other languages
English (en)
Other versions
DE69311105T2 (de
Inventor
Gene Lindholm
Mark Sterner
Theodore Tocci
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of DE69311105D1 publication Critical patent/DE69311105D1/de
Publication of DE69311105T2 publication Critical patent/DE69311105T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
DE69311105T 1992-04-13 1993-03-01 Schleifmittel Expired - Fee Related DE69311105T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86800792A 1992-04-13 1992-04-13
PCT/US1993/001789 WO1993020976A1 (en) 1992-04-13 1993-03-01 Abrasive article

Publications (2)

Publication Number Publication Date
DE69311105D1 true DE69311105D1 (de) 1997-07-03
DE69311105T2 DE69311105T2 (de) 1997-10-30

Family

ID=25350905

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311105T Expired - Fee Related DE69311105T2 (de) 1992-04-13 1993-03-01 Schleifmittel

Country Status (8)

Country Link
EP (1) EP0636057B1 (de)
JP (1) JPH07505583A (de)
KR (1) KR950700809A (de)
AU (1) AU3781293A (de)
CA (1) CA2131526A1 (de)
DE (1) DE69311105T2 (de)
ES (1) ES2104137T3 (de)
WO (1) WO1993020976A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7037403B1 (en) 1992-12-28 2006-05-02 Applied Materials Inc. In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization
US6614529B1 (en) 1992-12-28 2003-09-02 Applied Materials, Inc. In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization
GB9322174D0 (en) * 1993-10-28 1993-12-15 Minnesota Mining & Mfg Abrasive article
US5607345A (en) * 1994-01-13 1997-03-04 Minnesota Mining And Manufacturing Company Abrading apparatus
DE69635816T2 (de) 1995-03-28 2006-10-12 Applied Materials, Inc., Santa Clara Verfahren zum Herstellen einer Vorrichtung zur In-Situ-Kontrolle und Bestimmung des Endes von chemisch-mechanischen Planiervorgängen
US5893796A (en) 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US6537133B1 (en) 1995-03-28 2003-03-25 Applied Materials, Inc. Method for in-situ endpoint detection for chemical mechanical polishing operations
US6876454B1 (en) 1995-03-28 2005-04-05 Applied Materials, Inc. Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
US6719818B1 (en) 1995-03-28 2004-04-13 Applied Materials, Inc. Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
US6676717B1 (en) 1995-03-28 2004-01-13 Applied Materials Inc Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
US5605760A (en) * 1995-08-21 1997-02-25 Rodel, Inc. Polishing pads
JP3853437B2 (ja) * 1996-08-08 2006-12-06 大日本印刷株式会社 研磨シート
US6106922A (en) * 1997-10-03 2000-08-22 3M Innovative Company Coextruded mechanical fastener constructions
US6994607B2 (en) 2001-12-28 2006-02-07 Applied Materials, Inc. Polishing pad with window
US6179709B1 (en) 1999-02-04 2001-01-30 Applied Materials, Inc. In-situ monitoring of linear substrate polishing operations
WO2000050229A1 (en) 1999-02-25 2000-08-31 3M Innovative Properties Company Web having discrete stem regions
US6524164B1 (en) 1999-09-14 2003-02-25 Applied Materials, Inc. Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus
JP2001252878A (ja) * 2000-03-08 2001-09-18 Fuji Photo Film Co Ltd 研磨シート
US20020019206A1 (en) * 2000-05-12 2002-02-14 Deka Ganesh Chandra Colored loop substrate for releasably attachable abrasive sheet material
US8485862B2 (en) 2000-05-19 2013-07-16 Applied Materials, Inc. Polishing pad for endpoint detection and related methods
US7374477B2 (en) 2002-02-06 2008-05-20 Applied Materials, Inc. Polishing pads useful for endpoint detection in chemical mechanical polishing
US6599177B2 (en) * 2001-06-25 2003-07-29 Saint-Gobain Abrasives Technology Company Coated abrasives with indicia
US7264536B2 (en) 2003-09-23 2007-09-04 Applied Materials, Inc. Polishing pad with window
EP2180978B1 (de) * 2006-03-03 2010-11-17 Giovanni Giuseppe Ferronato Sandro System zur anzeige des grades eines schleifmittels
WO2007144915A1 (en) * 2006-06-16 2007-12-21 Power-Tech Srl Abrasive member
JP2012066328A (ja) * 2010-09-22 2012-04-05 Disco Corp ドレッシングボードおよびドレッシングボード収容ケース
PT3215316T (pt) 2014-11-07 2018-10-22 3M Innovative Properties Co Artigo abrasivo impresso
DE102021215121A1 (de) 2021-12-30 2023-07-06 Robert Bosch Gesellschaft mit beschränkter Haftung Schleifmittel

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4437269A (en) * 1979-08-17 1984-03-20 S.I.A.C.O. Limited Abrasive and polishing sheets
DE3942301C1 (de) * 1989-12-21 1991-02-14 Robert Bosch Gmbh, 7000 Stuttgart, De

Also Published As

Publication number Publication date
EP0636057B1 (de) 1997-05-28
JPH07505583A (ja) 1995-06-22
ES2104137T3 (es) 1997-10-01
CA2131526A1 (en) 1993-10-28
WO1993020976A1 (en) 1993-10-28
DE69311105T2 (de) 1997-10-30
KR950700809A (ko) 1995-02-20
EP0636057A1 (de) 1995-02-01
AU3781293A (en) 1993-11-18

Similar Documents

Publication Publication Date Title
DE69326190D1 (de) Schleifmittel
DE69311105D1 (de) Schleifmittel
DE69333322D1 (de) Poliergerät
DE69317838D1 (de) Poliergerät
DE69712637D1 (de) Schleifmittel
DE69435110D1 (de) Poliergerät
DE69513687T2 (de) Beschichtetes schleifmittel
DE69523866T2 (de) Schleifkörper
BR9306020A (pt) Artigo abrasivo
DE69423581D1 (de) Poliergerät
DE69312238T2 (de) Mahlverfahren
DK0536596T3 (da) Slibemiddel
DE69201405T2 (de) Schleifmittel.
DE69004465T2 (de) Schleifmittel.
FI942674A0 (fi) Kiillotuskone
DE9213203U1 (de) Flächenschleifgerät
KR940026330U (ko) 분쇄기
KR930025202U (ko) 석재 연마기
KR940022150U (ko) 분쇄기
KR940009577U (ko) 그라인더
KR950010999U (ko) 분쇄기
DE59400941D1 (de) Spitzervorrichtung
KR930000430U (ko) 회전 연마기
KR940026161U (ko) 때밀이기
KR940026159U (ko) 때밀이

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee