DE69310630T2 - Beobachtung von Phaseninformation und Interferenzvorrichtung dafür - Google Patents

Beobachtung von Phaseninformation und Interferenzvorrichtung dafür

Info

Publication number
DE69310630T2
DE69310630T2 DE69310630T DE69310630T DE69310630T2 DE 69310630 T2 DE69310630 T2 DE 69310630T2 DE 69310630 T DE69310630 T DE 69310630T DE 69310630 T DE69310630 T DE 69310630T DE 69310630 T2 DE69310630 T2 DE 69310630T2
Authority
DE
Germany
Prior art keywords
sample
films
scattering
interference
lens system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69310630T
Other languages
German (de)
English (en)
Other versions
DE69310630D1 (de
Inventor
Junji Endo
Qing Xin Ru
Akira Tonomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Hitachi Ltd
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Research Development Corp of Japan filed Critical Hitachi Ltd
Publication of DE69310630D1 publication Critical patent/DE69310630D1/de
Application granted granted Critical
Publication of DE69310630T2 publication Critical patent/DE69310630T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0402—Recording geometries or arrangements
    • G03H1/0404—In-line recording arrangement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H5/00—Holographic processes or apparatus using particles or using waves other than those covered by groups G03H1/00 or G03H3/00 for obtaining holograms; Processes or apparatus for obtaining an optical image from them

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69310630T 1992-08-11 1993-08-11 Beobachtung von Phaseninformation und Interferenzvorrichtung dafür Expired - Fee Related DE69310630T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21394392A JP3285157B2 (ja) 1992-08-11 1992-08-11 位相情報観測方法及び位相情報観測用干渉装置

Publications (2)

Publication Number Publication Date
DE69310630D1 DE69310630D1 (de) 1997-06-19
DE69310630T2 true DE69310630T2 (de) 1997-09-04

Family

ID=16647620

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69310630T Expired - Fee Related DE69310630T2 (de) 1992-08-11 1993-08-11 Beobachtung von Phaseninformation und Interferenzvorrichtung dafür

Country Status (4)

Country Link
US (1) US5446589A (ja)
EP (1) EP0583162B1 (ja)
JP (1) JP3285157B2 (ja)
DE (1) DE69310630T2 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3378413B2 (ja) * 1994-09-16 2003-02-17 株式会社東芝 電子線描画装置及び電子線描画方法
JP4164261B2 (ja) * 2000-03-30 2008-10-15 独立行政法人科学技術振興機構 干渉計測装置
JP5034295B2 (ja) 2006-03-31 2012-09-26 富士通株式会社 応力測定方法及び装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4038543A (en) * 1975-07-08 1977-07-26 Siemens Aktiengesellschaft Scanning transmission electron microscope including an improved image detector
JP2651154B2 (ja) * 1987-09-04 1997-09-10 株式会社日立製作所 電子線ホログラフィ装置
JP3039563B2 (ja) * 1990-11-29 2000-05-08 株式会社日立製作所 走査電子顕微鏡及び走査電子顕微方法
US5300776A (en) * 1992-09-16 1994-04-05 Gatan, Inc. Autoadjusting electron microscope

Also Published As

Publication number Publication date
EP0583162A1 (en) 1994-02-16
JP3285157B2 (ja) 2002-05-27
JPH0728000A (ja) 1995-01-31
DE69310630D1 (de) 1997-06-19
US5446589A (en) 1995-08-29
EP0583162B1 (en) 1997-05-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: JAPAN SCIENCE AND TECHNOLOGY CORP., KAWAGUCHI, SAI

8339 Ceased/non-payment of the annual fee