DE69309111T2 - Phasenverschiebungsmaskenstruktur mit lichtabsorbierenden/lichtdämpfenden seitenwänden und verfahren zum aufbauen von phasenverschiebern - Google Patents

Phasenverschiebungsmaskenstruktur mit lichtabsorbierenden/lichtdämpfenden seitenwänden und verfahren zum aufbauen von phasenverschiebern

Info

Publication number
DE69309111T2
DE69309111T2 DE69309111T DE69309111T DE69309111T2 DE 69309111 T2 DE69309111 T2 DE 69309111T2 DE 69309111 T DE69309111 T DE 69309111T DE 69309111 T DE69309111 T DE 69309111T DE 69309111 T2 DE69309111 T2 DE 69309111T2
Authority
DE
Germany
Prior art keywords
light
side walls
shift mask
mask structure
phase shift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309111T
Other languages
English (en)
Other versions
DE69309111D1 (de
Inventor
Prahalad Vasudev
Kah Low
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sematech Inc
Original Assignee
Sematech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sematech Inc filed Critical Sematech Inc
Application granted granted Critical
Publication of DE69309111D1 publication Critical patent/DE69309111D1/de
Publication of DE69309111T2 publication Critical patent/DE69309111T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/34—Phase-edge PSM, e.g. chromeless PSM; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
DE69309111T 1993-01-21 1993-12-13 Phasenverschiebungsmaskenstruktur mit lichtabsorbierenden/lichtdämpfenden seitenwänden und verfahren zum aufbauen von phasenverschiebern Expired - Fee Related DE69309111T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US763893A 1993-01-21 1993-01-21
US764093A 1993-01-21 1993-01-21
PCT/US1993/012094 WO1994017450A1 (en) 1993-01-21 1993-12-13 Phase shifting mask structure with absorbing/attenuating sidewalls for improved imaging and method of fabricating phase shifters with absorbing/attenuating sidewalls

Publications (2)

Publication Number Publication Date
DE69309111D1 DE69309111D1 (de) 1997-04-24
DE69309111T2 true DE69309111T2 (de) 1997-08-21

Family

ID=26677231

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309111T Expired - Fee Related DE69309111T2 (de) 1993-01-21 1993-12-13 Phasenverschiebungsmaskenstruktur mit lichtabsorbierenden/lichtdämpfenden seitenwänden und verfahren zum aufbauen von phasenverschiebern

Country Status (6)

Country Link
EP (1) EP0680624B1 (de)
JP (1) JPH10512683A (de)
AU (1) AU5749494A (de)
DE (1) DE69309111T2 (de)
TW (1) TW320734B (de)
WO (1) WO1994017450A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3257893B2 (ja) * 1993-10-18 2002-02-18 三菱電機株式会社 位相シフトマスク、その位相シフトマスクの製造方法およびその位相シフトマスクを用いた露光方法
US6544694B2 (en) 2000-03-03 2003-04-08 Koninklijke Philips Electronics N.V. Method of manufacturing a device by means of a mask phase-shifting mask for use in said method
JP4504622B2 (ja) 2001-05-18 2010-07-14 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ デバイスを製造するリソグラフィック方法
US7604903B1 (en) * 2004-01-30 2009-10-20 Advanced Micro Devices, Inc. Mask having sidewall absorbers to enable the printing of finer features in nanoprint lithography (1XMASK)
US9765934B2 (en) 2011-05-16 2017-09-19 The Board Of Trustees Of The University Of Illinois Thermally managed LED arrays assembled by printing
JP6035884B2 (ja) * 2012-06-07 2016-11-30 大日本印刷株式会社 フォトマスクの製造方法
JP6315033B2 (ja) * 2016-07-09 2018-04-25 大日本印刷株式会社 フォトマスク

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4119483A (en) * 1974-07-30 1978-10-10 U.S. Philips Corporation Method of structuring thin layers
JP2710967B2 (ja) * 1988-11-22 1998-02-10 株式会社日立製作所 集積回路装置の製造方法
DE69028871T2 (de) * 1989-04-28 1997-02-27 Fujitsu Ltd Maske, Herstellungsverfahren und Musterherstellung mit einer solchen Maske
JP2519815B2 (ja) * 1990-03-01 1996-07-31 三菱電機株式会社 フォトマスク及びその製造方法
DE69131173T2 (de) * 1990-09-10 1999-08-19 Fujitsu Ltd Optische Phasenmaske und Verfahren zur Herstellung
JPH04123060A (ja) * 1990-09-14 1992-04-23 Fujitsu Ltd 位相シフトマスク及びその形成方法
JPH053146A (ja) * 1991-04-19 1993-01-08 Hitachi Ltd Ｘ線露光法

Also Published As

Publication number Publication date
EP0680624B1 (de) 1997-03-19
AU5749494A (en) 1994-08-15
WO1994017450A1 (en) 1994-08-04
TW320734B (de) 1997-11-21
DE69309111D1 (de) 1997-04-24
EP0680624A1 (de) 1995-11-08
JPH10512683A (ja) 1998-12-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee